8/17/2011	10:15:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	10:15:02 AM	Recipe started at 10:15 AM
8/17/2011	10:15:02 AM	Helium valve closed
8/17/2011	10:15:02 AM	H2 valve closed
8/17/2011	10:15:02 AM	BCl3 valve closed
8/17/2011	10:15:02 AM	PH3 valve closed
8/17/2011	10:15:02 AM	SiCl4 pre valve closed
8/17/2011	10:15:02 AM	SiCl4 post valve closed
8/17/2011	10:15:02 AM	Main Vac valve closed
8/17/2011	10:15:02 AM	Bypass valve closed
8/17/2011	10:15:02 AM	Bubbler valve closed
8/17/2011	10:15:02 AM	Helium MFC set to  0.000000
8/17/2011	10:15:02 AM	H2 MFC set to  0.000000
8/17/2011	10:15:02 AM	BCl3 MFC set to  0.000000
8/17/2011	10:15:02 AM	PHl3 MFC set to  0.000000
8/17/2011	10:15:02 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:15:03 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:15:03 AM	Tube furnace set to 0
8/17/2011	10:15:06 AM	H2 valve closed
8/17/2011	10:15:06 AM	BCl3 valve closed
8/17/2011	10:15:06 AM	PH3 valve closed
8/17/2011	10:15:06 AM	SiCl4 pre valve closed
8/17/2011	10:15:06 AM	SiCl4 post valve closed
8/17/2011	10:15:06 AM	Main Vac valve closed
8/17/2011	10:15:06 AM	Bypass valve closed
8/17/2011	10:15:06 AM	Bubbler valve closed
8/17/2011	10:15:06 AM	Helium valve opened
8/17/2011	10:15:06 AM	Helium MFC set to  500.000000
8/17/2011	10:15:06 AM	H2 MFC set to  0.000000
8/17/2011	10:15:06 AM	BCl3 MFC set to  0.000000
8/17/2011	10:15:06 AM	PHl3 MFC set to  0.000000
8/17/2011	10:15:06 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:15:06 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:15:06 AM	Tube furnace set to 0
8/17/2011	10:16:10 AM	Helium valve closed
8/17/2011	10:16:10 AM	H2 valve closed
8/17/2011	10:16:10 AM	BCl3 valve closed
8/17/2011	10:16:10 AM	PH3 valve closed
8/17/2011	10:16:10 AM	SiCl4 pre valve closed
8/17/2011	10:16:10 AM	SiCl4 post valve closed
8/17/2011	10:16:10 AM	Main Vac valve closed
8/17/2011	10:16:10 AM	Bypass valve closed
8/17/2011	10:16:10 AM	Bubbler valve closed
8/17/2011	10:16:10 AM	Helium MFC set to  0.000000
8/17/2011	10:16:10 AM	H2 MFC set to  0.000000
8/17/2011	10:16:10 AM	BCl3 MFC set to  0.000000
8/17/2011	10:16:10 AM	PHl3 MFC set to  0.000000
8/17/2011	10:16:10 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:16:10 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:16:11 AM	Tube furnace set to 0
8/17/2011	10:16:12 AM	Run finished at 10:16 AM
8/17/2011	10:16:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	10:20:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2011	10:20:05 AM	Recipe started at 10:20 AM
8/17/2011	10:20:05 AM	Helium valve closed
8/17/2011	10:20:05 AM	H2 valve closed
8/17/2011	10:20:05 AM	BCl3 valve closed
8/17/2011	10:20:05 AM	PH3 valve closed
8/17/2011	10:20:05 AM	SiCl4 pre valve closed
8/17/2011	10:20:05 AM	SiCl4 post valve closed
8/17/2011	10:20:05 AM	Main Vac valve closed
8/17/2011	10:20:05 AM	Bubbler valve closed
8/17/2011	10:20:05 AM	Bypass valve opened
8/17/2011	10:20:05 AM	Helium MFC set to  0.000000
8/17/2011	10:20:05 AM	H2 MFC set to  0.000000
8/17/2011	10:20:05 AM	BCl3 MFC set to  0.000000
8/17/2011	10:20:05 AM	PHl3 MFC set to  0.000000
8/17/2011	10:20:05 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:20:05 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:20:05 AM	Tube furnace set to 0
8/17/2011	10:21:12 AM	Helium valve closed
8/17/2011	10:21:12 AM	H2 valve closed
8/17/2011	10:21:12 AM	BCl3 valve closed
8/17/2011	10:21:12 AM	PH3 valve closed
8/17/2011	10:21:12 AM	SiCl4 pre valve closed
8/17/2011	10:21:12 AM	SiCl4 post valve closed
8/17/2011	10:21:12 AM	Main Vac valve closed
8/17/2011	10:21:12 AM	Bubbler valve closed
8/17/2011	10:21:12 AM	Bypass valve opened
8/17/2011	10:21:12 AM	Helium MFC set to  0.000000
8/17/2011	10:21:12 AM	H2 MFC set to  0.000000
8/17/2011	10:21:12 AM	BCl3 MFC set to  0.000000
8/17/2011	10:21:12 AM	PHl3 MFC set to  0.000000
8/17/2011	10:21:12 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:21:12 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:21:12 AM	Tube furnace set to 0
8/17/2011	10:22:13 AM	Helium valve closed
8/17/2011	10:22:13 AM	H2 valve closed
8/17/2011	10:22:13 AM	BCl3 valve closed
8/17/2011	10:22:13 AM	PH3 valve closed
8/17/2011	10:22:13 AM	SiCl4 pre valve closed
8/17/2011	10:22:13 AM	SiCl4 post valve closed
8/17/2011	10:22:13 AM	Bypass valve closed
8/17/2011	10:22:13 AM	Bubbler valve closed
8/17/2011	10:22:13 AM	Main Vac valve opened
8/17/2011	10:22:13 AM	Helium MFC set to  0.000000
8/17/2011	10:22:13 AM	H2 MFC set to  0.000000
8/17/2011	10:22:13 AM	BCl3 MFC set to  0.000000
8/17/2011	10:22:13 AM	PHl3 MFC set to  0.000000
8/17/2011	10:22:13 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:22:13 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:22:13 AM	Tube furnace set to 0
8/17/2011	10:22:14 AM	Run finished at 10:22 AM
8/17/2011	10:22:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2011	10:23:34 AM	Main Vac valve closed
8/17/2011	10:23:37 AM	Main Vac valve opened
8/17/2011	10:51:04 AM	Main Vac valve closed
8/17/2011	10:51:10 AM	Main Vac valve opened
8/17/2011	10:51:28 AM	Recipe started at 10:51 AM
8/17/2011	10:51:28 AM	Helium valve closed
8/17/2011	10:51:28 AM	H2 valve closed
8/17/2011	10:51:28 AM	BCl3 valve closed
8/17/2011	10:51:28 AM	PH3 valve closed
8/17/2011	10:51:28 AM	SiCl4 pre valve closed
8/17/2011	10:51:28 AM	SiCl4 post valve closed
8/17/2011	10:51:28 AM	Bypass valve closed
8/17/2011	10:51:28 AM	Bubbler valve closed
8/17/2011	10:51:28 AM	Main Vac valve opened
8/17/2011	10:51:28 AM	Helium MFC set to  0.000000
8/17/2011	10:51:28 AM	H2 MFC set to  0.000000
8/17/2011	10:51:28 AM	BCl3 MFC set to  0.000000
8/17/2011	10:51:28 AM	PHl3 MFC set to  0.000000
8/17/2011	10:51:28 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:51:28 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:51:28 AM	Tube furnace set to 0
8/17/2011	10:51:58 AM	H2 valve closed
8/17/2011	10:51:58 AM	BCl3 valve closed
8/17/2011	10:51:58 AM	PH3 valve closed
8/17/2011	10:51:58 AM	SiCl4 pre valve closed
8/17/2011	10:51:58 AM	SiCl4 post valve closed
8/17/2011	10:51:58 AM	Bypass valve closed
8/17/2011	10:51:58 AM	Bubbler valve closed
8/17/2011	10:51:58 AM	Helium valve opened
8/17/2011	10:51:58 AM	Main Vac valve opened
8/17/2011	10:51:58 AM	Helium MFC set to  20.000000
8/17/2011	10:51:58 AM	H2 MFC set to  0.000000
8/17/2011	10:51:58 AM	BCl3 MFC set to  0.000000
8/17/2011	10:51:58 AM	PHl3 MFC set to  0.000000
8/17/2011	10:51:58 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:51:58 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:51:59 AM	Tube furnace set to 0
8/17/2011	10:52:29 AM	Helium valve closed
8/17/2011	10:52:29 AM	H2 valve closed
8/17/2011	10:52:29 AM	BCl3 valve closed
8/17/2011	10:52:29 AM	PH3 valve closed
8/17/2011	10:52:29 AM	SiCl4 pre valve closed
8/17/2011	10:52:29 AM	SiCl4 post valve closed
8/17/2011	10:52:29 AM	Bypass valve closed
8/17/2011	10:52:29 AM	Bubbler valve closed
8/17/2011	10:52:29 AM	Main Vac valve opened
8/17/2011	10:52:29 AM	Helium MFC set to  0.000000
8/17/2011	10:52:29 AM	H2 MFC set to  0.000000
8/17/2011	10:52:29 AM	BCl3 MFC set to  0.000000
8/17/2011	10:52:29 AM	PHl3 MFC set to  0.000000
8/17/2011	10:52:29 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:52:29 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:52:29 AM	Tube furnace set to 0
8/17/2011	10:52:59 AM	H2 valve closed
8/17/2011	10:52:59 AM	BCl3 valve closed
8/17/2011	10:52:59 AM	PH3 valve closed
8/17/2011	10:52:59 AM	SiCl4 pre valve closed
8/17/2011	10:52:59 AM	SiCl4 post valve closed
8/17/2011	10:52:59 AM	Bypass valve closed
8/17/2011	10:52:59 AM	Bubbler valve closed
8/17/2011	10:52:59 AM	Helium valve opened
8/17/2011	10:52:59 AM	Main Vac valve opened
8/17/2011	10:52:59 AM	Helium MFC set to  20.000000
8/17/2011	10:52:59 AM	H2 MFC set to  0.000000
8/17/2011	10:52:59 AM	BCl3 MFC set to  0.000000
8/17/2011	10:52:59 AM	PHl3 MFC set to  0.000000
8/17/2011	10:52:59 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:52:59 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:52:59 AM	Tube furnace set to 0
8/17/2011	10:53:29 AM	Helium valve closed
8/17/2011	10:53:29 AM	H2 valve closed
8/17/2011	10:53:29 AM	BCl3 valve closed
8/17/2011	10:53:29 AM	PH3 valve closed
8/17/2011	10:53:29 AM	SiCl4 pre valve closed
8/17/2011	10:53:29 AM	SiCl4 post valve closed
8/17/2011	10:53:29 AM	Bypass valve closed
8/17/2011	10:53:29 AM	Bubbler valve closed
8/17/2011	10:53:29 AM	Main Vac valve opened
8/17/2011	10:53:29 AM	Helium MFC set to  0.000000
8/17/2011	10:53:29 AM	H2 MFC set to  0.000000
8/17/2011	10:53:29 AM	BCl3 MFC set to  0.000000
8/17/2011	10:53:29 AM	PHl3 MFC set to  0.000000
8/17/2011	10:53:29 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:53:29 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:53:29 AM	Tube furnace set to 0
8/17/2011	10:53:59 AM	H2 valve closed
8/17/2011	10:53:59 AM	BCl3 valve closed
8/17/2011	10:53:59 AM	PH3 valve closed
8/17/2011	10:53:59 AM	SiCl4 pre valve closed
8/17/2011	10:53:59 AM	SiCl4 post valve closed
8/17/2011	10:53:59 AM	Bypass valve closed
8/17/2011	10:53:59 AM	Bubbler valve closed
8/17/2011	10:53:59 AM	Helium valve opened
8/17/2011	10:53:59 AM	Main Vac valve opened
8/17/2011	10:53:59 AM	Helium MFC set to  20.000000
8/17/2011	10:53:59 AM	H2 MFC set to  0.000000
8/17/2011	10:53:59 AM	BCl3 MFC set to  0.000000
8/17/2011	10:53:59 AM	PHl3 MFC set to  0.000000
8/17/2011	10:53:59 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:53:59 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:53:59 AM	Tube furnace set to 0
8/17/2011	10:54:29 AM	Helium valve closed
8/17/2011	10:54:29 AM	H2 valve closed
8/17/2011	10:54:29 AM	BCl3 valve closed
8/17/2011	10:54:29 AM	PH3 valve closed
8/17/2011	10:54:29 AM	SiCl4 pre valve closed
8/17/2011	10:54:29 AM	SiCl4 post valve closed
8/17/2011	10:54:29 AM	Bypass valve closed
8/17/2011	10:54:29 AM	Bubbler valve closed
8/17/2011	10:54:29 AM	Main Vac valve opened
8/17/2011	10:54:29 AM	Helium MFC set to  0.000000
8/17/2011	10:54:29 AM	H2 MFC set to  0.000000
8/17/2011	10:54:29 AM	BCl3 MFC set to  0.000000
8/17/2011	10:54:29 AM	PHl3 MFC set to  0.000000
8/17/2011	10:54:29 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:54:29 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:54:30 AM	Tube furnace set to 0
8/17/2011	10:55:00 AM	H2 valve closed
8/17/2011	10:55:00 AM	BCl3 valve closed
8/17/2011	10:55:00 AM	PH3 valve closed
8/17/2011	10:55:00 AM	SiCl4 pre valve closed
8/17/2011	10:55:00 AM	SiCl4 post valve closed
8/17/2011	10:55:00 AM	Bypass valve closed
8/17/2011	10:55:00 AM	Bubbler valve closed
8/17/2011	10:55:00 AM	Helium valve opened
8/17/2011	10:55:00 AM	Main Vac valve opened
8/17/2011	10:55:00 AM	Helium MFC set to  20.000000
8/17/2011	10:55:00 AM	H2 MFC set to  0.000000
8/17/2011	10:55:00 AM	BCl3 MFC set to  0.000000
8/17/2011	10:55:00 AM	PHl3 MFC set to  0.000000
8/17/2011	10:55:00 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:55:00 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:55:00 AM	Tube furnace set to 0
8/17/2011	10:55:30 AM	Helium valve closed
8/17/2011	10:55:30 AM	H2 valve closed
8/17/2011	10:55:30 AM	BCl3 valve closed
8/17/2011	10:55:30 AM	PH3 valve closed
8/17/2011	10:55:30 AM	SiCl4 pre valve closed
8/17/2011	10:55:30 AM	SiCl4 post valve closed
8/17/2011	10:55:30 AM	Bypass valve closed
8/17/2011	10:55:30 AM	Bubbler valve closed
8/17/2011	10:55:30 AM	Main Vac valve opened
8/17/2011	10:55:30 AM	Helium MFC set to  0.000000
8/17/2011	10:55:30 AM	H2 MFC set to  0.000000
8/17/2011	10:55:30 AM	BCl3 MFC set to  0.000000
8/17/2011	10:55:30 AM	PHl3 MFC set to  0.000000
8/17/2011	10:55:30 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:55:30 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:55:30 AM	Tube furnace set to 0
8/17/2011	10:56:00 AM	H2 valve closed
8/17/2011	10:56:00 AM	BCl3 valve closed
8/17/2011	10:56:00 AM	PH3 valve closed
8/17/2011	10:56:00 AM	SiCl4 pre valve closed
8/17/2011	10:56:00 AM	SiCl4 post valve closed
8/17/2011	10:56:00 AM	Bypass valve closed
8/17/2011	10:56:00 AM	Bubbler valve closed
8/17/2011	10:56:00 AM	Helium valve opened
8/17/2011	10:56:00 AM	Main Vac valve opened
8/17/2011	10:56:00 AM	Helium MFC set to  20.000000
8/17/2011	10:56:00 AM	H2 MFC set to  0.000000
8/17/2011	10:56:00 AM	BCl3 MFC set to  0.000000
8/17/2011	10:56:00 AM	PHl3 MFC set to  0.000000
8/17/2011	10:56:00 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:56:00 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:56:00 AM	Tube furnace set to 0
8/17/2011	10:56:30 AM	Helium valve closed
8/17/2011	10:56:30 AM	H2 valve closed
8/17/2011	10:56:30 AM	BCl3 valve closed
8/17/2011	10:56:30 AM	PH3 valve closed
8/17/2011	10:56:30 AM	SiCl4 pre valve closed
8/17/2011	10:56:30 AM	SiCl4 post valve closed
8/17/2011	10:56:30 AM	Bypass valve closed
8/17/2011	10:56:30 AM	Bubbler valve closed
8/17/2011	10:56:30 AM	Main Vac valve opened
8/17/2011	10:56:30 AM	Helium MFC set to  0.000000
8/17/2011	10:56:30 AM	H2 MFC set to  0.000000
8/17/2011	10:56:30 AM	BCl3 MFC set to  0.000000
8/17/2011	10:56:30 AM	PHl3 MFC set to  0.000000
8/17/2011	10:56:30 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:56:30 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:56:30 AM	Tube furnace set to 0
8/17/2011	10:57:00 AM	H2 valve closed
8/17/2011	10:57:00 AM	BCl3 valve closed
8/17/2011	10:57:00 AM	PH3 valve closed
8/17/2011	10:57:00 AM	SiCl4 pre valve closed
8/17/2011	10:57:00 AM	SiCl4 post valve closed
8/17/2011	10:57:00 AM	Bypass valve closed
8/17/2011	10:57:00 AM	Bubbler valve closed
8/17/2011	10:57:00 AM	Helium valve opened
8/17/2011	10:57:00 AM	Main Vac valve opened
8/17/2011	10:57:00 AM	Helium MFC set to  20.000000
8/17/2011	10:57:00 AM	H2 MFC set to  0.000000
8/17/2011	10:57:00 AM	BCl3 MFC set to  0.000000
8/17/2011	10:57:00 AM	PHl3 MFC set to  0.000000
8/17/2011	10:57:00 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:57:00 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:57:01 AM	Tube furnace set to 0
8/17/2011	10:57:31 AM	Helium valve closed
8/17/2011	10:57:31 AM	H2 valve closed
8/17/2011	10:57:31 AM	BCl3 valve closed
8/17/2011	10:57:31 AM	PH3 valve closed
8/17/2011	10:57:31 AM	SiCl4 pre valve closed
8/17/2011	10:57:31 AM	SiCl4 post valve closed
8/17/2011	10:57:31 AM	Bypass valve closed
8/17/2011	10:57:31 AM	Bubbler valve closed
8/17/2011	10:57:31 AM	Main Vac valve opened
8/17/2011	10:57:31 AM	Helium MFC set to  0.000000
8/17/2011	10:57:31 AM	H2 MFC set to  0.000000
8/17/2011	10:57:31 AM	BCl3 MFC set to  0.000000
8/17/2011	10:57:31 AM	PHl3 MFC set to  0.000000
8/17/2011	10:57:31 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:57:31 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:57:31 AM	Tube furnace set to 0
8/17/2011	10:58:01 AM	H2 valve closed
8/17/2011	10:58:01 AM	BCl3 valve closed
8/17/2011	10:58:01 AM	PH3 valve closed
8/17/2011	10:58:01 AM	SiCl4 pre valve closed
8/17/2011	10:58:01 AM	SiCl4 post valve closed
8/17/2011	10:58:01 AM	Bypass valve closed
8/17/2011	10:58:01 AM	Bubbler valve closed
8/17/2011	10:58:01 AM	Helium valve opened
8/17/2011	10:58:01 AM	Main Vac valve opened
8/17/2011	10:58:01 AM	Helium MFC set to  20.000000
8/17/2011	10:58:01 AM	H2 MFC set to  0.000000
8/17/2011	10:58:01 AM	BCl3 MFC set to  0.000000
8/17/2011	10:58:01 AM	PHl3 MFC set to  0.000000
8/17/2011	10:58:01 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:58:01 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:58:01 AM	Tube furnace set to 0
8/17/2011	10:58:31 AM	Helium valve closed
8/17/2011	10:58:31 AM	H2 valve closed
8/17/2011	10:58:31 AM	BCl3 valve closed
8/17/2011	10:58:31 AM	PH3 valve closed
8/17/2011	10:58:31 AM	SiCl4 pre valve closed
8/17/2011	10:58:31 AM	SiCl4 post valve closed
8/17/2011	10:58:31 AM	Bypass valve closed
8/17/2011	10:58:31 AM	Bubbler valve closed
8/17/2011	10:58:31 AM	Main Vac valve opened
8/17/2011	10:58:31 AM	Helium MFC set to  0.000000
8/17/2011	10:58:31 AM	H2 MFC set to  0.000000
8/17/2011	10:58:31 AM	BCl3 MFC set to  0.000000
8/17/2011	10:58:31 AM	PHl3 MFC set to  0.000000
8/17/2011	10:58:31 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:58:31 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:58:31 AM	Tube furnace set to 0
8/17/2011	10:59:01 AM	H2 valve closed
8/17/2011	10:59:01 AM	BCl3 valve closed
8/17/2011	10:59:01 AM	PH3 valve closed
8/17/2011	10:59:01 AM	SiCl4 pre valve closed
8/17/2011	10:59:01 AM	SiCl4 post valve closed
8/17/2011	10:59:01 AM	Bypass valve closed
8/17/2011	10:59:01 AM	Bubbler valve closed
8/17/2011	10:59:01 AM	Helium valve opened
8/17/2011	10:59:01 AM	Main Vac valve opened
8/17/2011	10:59:01 AM	Helium MFC set to  20.000000
8/17/2011	10:59:01 AM	H2 MFC set to  0.000000
8/17/2011	10:59:01 AM	BCl3 MFC set to  0.000000
8/17/2011	10:59:01 AM	PHl3 MFC set to  0.000000
8/17/2011	10:59:01 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:59:01 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:59:01 AM	Tube furnace set to 0
8/17/2011	10:59:31 AM	Helium valve closed
8/17/2011	10:59:32 AM	H2 valve closed
8/17/2011	10:59:32 AM	BCl3 valve closed
8/17/2011	10:59:32 AM	PH3 valve closed
8/17/2011	10:59:32 AM	SiCl4 pre valve closed
8/17/2011	10:59:32 AM	SiCl4 post valve closed
8/17/2011	10:59:32 AM	Bypass valve closed
8/17/2011	10:59:32 AM	Bubbler valve closed
8/17/2011	10:59:32 AM	Main Vac valve opened
8/17/2011	10:59:32 AM	Helium MFC set to  0.000000
8/17/2011	10:59:32 AM	H2 MFC set to  0.000000
8/17/2011	10:59:32 AM	BCl3 MFC set to  0.000000
8/17/2011	10:59:32 AM	PHl3 MFC set to  0.000000
8/17/2011	10:59:32 AM	SiCl4 MFC set to  0.000000
8/17/2011	10:59:32 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:59:32 AM	Tube furnace set to 0
8/17/2011	11:00:02 AM	H2 valve closed
8/17/2011	11:00:02 AM	BCl3 valve closed
8/17/2011	11:00:02 AM	PH3 valve closed
8/17/2011	11:00:02 AM	SiCl4 pre valve closed
8/17/2011	11:00:02 AM	SiCl4 post valve closed
8/17/2011	11:00:02 AM	Bypass valve closed
8/17/2011	11:00:02 AM	Bubbler valve closed
8/17/2011	11:00:02 AM	Helium valve opened
8/17/2011	11:00:02 AM	Main Vac valve opened
8/17/2011	11:00:02 AM	Helium MFC set to  20.000000
8/17/2011	11:00:02 AM	H2 MFC set to  0.000000
8/17/2011	11:00:02 AM	BCl3 MFC set to  0.000000
8/17/2011	11:00:02 AM	PHl3 MFC set to  0.000000
8/17/2011	11:00:02 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:00:02 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:00:02 AM	Tube furnace set to 0
8/17/2011	11:00:32 AM	Helium valve closed
8/17/2011	11:00:32 AM	H2 valve closed
8/17/2011	11:00:32 AM	BCl3 valve closed
8/17/2011	11:00:32 AM	PH3 valve closed
8/17/2011	11:00:32 AM	SiCl4 pre valve closed
8/17/2011	11:00:32 AM	SiCl4 post valve closed
8/17/2011	11:00:32 AM	Bypass valve closed
8/17/2011	11:00:32 AM	Bubbler valve closed
8/17/2011	11:00:32 AM	Main Vac valve opened
8/17/2011	11:00:32 AM	Helium MFC set to  0.000000
8/17/2011	11:00:32 AM	H2 MFC set to  0.000000
8/17/2011	11:00:32 AM	BCl3 MFC set to  0.000000
8/17/2011	11:00:32 AM	PHl3 MFC set to  0.000000
8/17/2011	11:00:32 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:00:32 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:00:32 AM	Tube furnace set to 200
8/17/2011	11:01:02 AM	H2 valve closed
8/17/2011	11:01:02 AM	BCl3 valve closed
8/17/2011	11:01:02 AM	PH3 valve closed
8/17/2011	11:01:02 AM	SiCl4 pre valve closed
8/17/2011	11:01:02 AM	SiCl4 post valve closed
8/17/2011	11:01:02 AM	Bypass valve closed
8/17/2011	11:01:02 AM	Bubbler valve closed
8/17/2011	11:01:02 AM	Helium valve opened
8/17/2011	11:01:02 AM	Main Vac valve opened
8/17/2011	11:01:02 AM	Helium MFC set to  20.000000
8/17/2011	11:01:02 AM	H2 MFC set to  0.000000
8/17/2011	11:01:02 AM	BCl3 MFC set to  0.000000
8/17/2011	11:01:02 AM	PHl3 MFC set to  0.000000
8/17/2011	11:01:02 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:01:02 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:01:02 AM	Tube furnace set to 200
8/17/2011	11:01:32 AM	Helium valve closed
8/17/2011	11:01:32 AM	H2 valve closed
8/17/2011	11:01:32 AM	BCl3 valve closed
8/17/2011	11:01:32 AM	PH3 valve closed
8/17/2011	11:01:32 AM	SiCl4 pre valve closed
8/17/2011	11:01:32 AM	SiCl4 post valve closed
8/17/2011	11:01:32 AM	Bypass valve closed
8/17/2011	11:01:32 AM	Bubbler valve closed
8/17/2011	11:01:32 AM	Main Vac valve opened
8/17/2011	11:01:32 AM	Helium MFC set to  0.000000
8/17/2011	11:01:32 AM	H2 MFC set to  0.000000
8/17/2011	11:01:32 AM	BCl3 MFC set to  0.000000
8/17/2011	11:01:32 AM	PHl3 MFC set to  0.000000
8/17/2011	11:01:32 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:01:32 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:01:33 AM	Tube furnace set to 200
8/17/2011	11:02:03 AM	H2 valve closed
8/17/2011	11:02:03 AM	BCl3 valve closed
8/17/2011	11:02:03 AM	PH3 valve closed
8/17/2011	11:02:03 AM	SiCl4 pre valve closed
8/17/2011	11:02:03 AM	SiCl4 post valve closed
8/17/2011	11:02:03 AM	Bypass valve closed
8/17/2011	11:02:03 AM	Bubbler valve closed
8/17/2011	11:02:03 AM	Helium valve opened
8/17/2011	11:02:03 AM	Main Vac valve opened
8/17/2011	11:02:03 AM	Helium MFC set to  20.000000
8/17/2011	11:02:03 AM	H2 MFC set to  0.000000
8/17/2011	11:02:03 AM	BCl3 MFC set to  0.000000
8/17/2011	11:02:03 AM	PHl3 MFC set to  0.000000
8/17/2011	11:02:03 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:02:03 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:02:03 AM	Tube furnace set to 200
8/17/2011	11:02:33 AM	Helium valve closed
8/17/2011	11:02:33 AM	H2 valve closed
8/17/2011	11:02:33 AM	BCl3 valve closed
8/17/2011	11:02:33 AM	PH3 valve closed
8/17/2011	11:02:33 AM	SiCl4 pre valve closed
8/17/2011	11:02:33 AM	SiCl4 post valve closed
8/17/2011	11:02:33 AM	Bypass valve closed
8/17/2011	11:02:33 AM	Bubbler valve closed
8/17/2011	11:02:33 AM	Main Vac valve opened
8/17/2011	11:02:33 AM	Helium MFC set to  0.000000
8/17/2011	11:02:33 AM	H2 MFC set to  0.000000
8/17/2011	11:02:33 AM	BCl3 MFC set to  0.000000
8/17/2011	11:02:33 AM	PHl3 MFC set to  0.000000
8/17/2011	11:02:33 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:02:33 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:02:33 AM	Tube furnace set to 200
8/17/2011	11:03:03 AM	H2 valve closed
8/17/2011	11:03:03 AM	BCl3 valve closed
8/17/2011	11:03:03 AM	PH3 valve closed
8/17/2011	11:03:03 AM	SiCl4 pre valve closed
8/17/2011	11:03:03 AM	SiCl4 post valve closed
8/17/2011	11:03:03 AM	Bypass valve closed
8/17/2011	11:03:03 AM	Bubbler valve closed
8/17/2011	11:03:03 AM	Helium valve opened
8/17/2011	11:03:03 AM	Main Vac valve opened
8/17/2011	11:03:03 AM	Helium MFC set to  20.000000
8/17/2011	11:03:03 AM	H2 MFC set to  0.000000
8/17/2011	11:03:03 AM	BCl3 MFC set to  0.000000
8/17/2011	11:03:03 AM	PHl3 MFC set to  0.000000
8/17/2011	11:03:03 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:03:03 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:03:03 AM	Tube furnace set to 200
8/17/2011	11:03:33 AM	Helium valve closed
8/17/2011	11:03:33 AM	H2 valve closed
8/17/2011	11:03:33 AM	BCl3 valve closed
8/17/2011	11:03:33 AM	PH3 valve closed
8/17/2011	11:03:33 AM	SiCl4 pre valve closed
8/17/2011	11:03:33 AM	SiCl4 post valve closed
8/17/2011	11:03:33 AM	Bypass valve closed
8/17/2011	11:03:33 AM	Bubbler valve closed
8/17/2011	11:03:33 AM	Main Vac valve opened
8/17/2011	11:03:33 AM	Helium MFC set to  0.000000
8/17/2011	11:03:33 AM	H2 MFC set to  0.000000
8/17/2011	11:03:33 AM	BCl3 MFC set to  0.000000
8/17/2011	11:03:33 AM	PHl3 MFC set to  0.000000
8/17/2011	11:03:33 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:03:33 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:03:33 AM	Tube furnace set to 200
8/17/2011	11:04:03 AM	H2 valve closed
8/17/2011	11:04:03 AM	BCl3 valve closed
8/17/2011	11:04:03 AM	PH3 valve closed
8/17/2011	11:04:03 AM	SiCl4 pre valve closed
8/17/2011	11:04:03 AM	SiCl4 post valve closed
8/17/2011	11:04:03 AM	Bypass valve closed
8/17/2011	11:04:03 AM	Bubbler valve closed
8/17/2011	11:04:03 AM	Helium valve opened
8/17/2011	11:04:03 AM	Main Vac valve opened
8/17/2011	11:04:03 AM	Helium MFC set to  20.000000
8/17/2011	11:04:03 AM	H2 MFC set to  0.000000
8/17/2011	11:04:03 AM	BCl3 MFC set to  0.000000
8/17/2011	11:04:03 AM	PHl3 MFC set to  0.000000
8/17/2011	11:04:03 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:04:03 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:04:04 AM	Tube furnace set to 200
8/17/2011	11:04:34 AM	Helium valve closed
8/17/2011	11:04:34 AM	H2 valve closed
8/17/2011	11:04:34 AM	BCl3 valve closed
8/17/2011	11:04:34 AM	PH3 valve closed
8/17/2011	11:04:34 AM	SiCl4 pre valve closed
8/17/2011	11:04:34 AM	SiCl4 post valve closed
8/17/2011	11:04:34 AM	Bypass valve closed
8/17/2011	11:04:34 AM	Bubbler valve closed
8/17/2011	11:04:34 AM	Main Vac valve opened
8/17/2011	11:04:34 AM	Helium MFC set to  0.000000
8/17/2011	11:04:34 AM	H2 MFC set to  0.000000
8/17/2011	11:04:34 AM	BCl3 MFC set to  0.000000
8/17/2011	11:04:34 AM	PHl3 MFC set to  0.000000
8/17/2011	11:04:34 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:04:34 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:04:34 AM	Tube furnace set to 200
8/17/2011	11:05:04 AM	H2 valve closed
8/17/2011	11:05:04 AM	BCl3 valve closed
8/17/2011	11:05:04 AM	PH3 valve closed
8/17/2011	11:05:04 AM	SiCl4 pre valve closed
8/17/2011	11:05:04 AM	SiCl4 post valve closed
8/17/2011	11:05:04 AM	Bypass valve closed
8/17/2011	11:05:04 AM	Bubbler valve closed
8/17/2011	11:05:04 AM	Helium valve opened
8/17/2011	11:05:04 AM	Main Vac valve opened
8/17/2011	11:05:04 AM	Helium MFC set to  20.000000
8/17/2011	11:05:04 AM	H2 MFC set to  0.000000
8/17/2011	11:05:04 AM	BCl3 MFC set to  0.000000
8/17/2011	11:05:04 AM	PHl3 MFC set to  0.000000
8/17/2011	11:05:04 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:05:04 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:05:04 AM	Tube furnace set to 200
8/17/2011	11:05:34 AM	Helium valve closed
8/17/2011	11:05:34 AM	H2 valve closed
8/17/2011	11:05:34 AM	BCl3 valve closed
8/17/2011	11:05:34 AM	PH3 valve closed
8/17/2011	11:05:34 AM	SiCl4 pre valve closed
8/17/2011	11:05:34 AM	SiCl4 post valve closed
8/17/2011	11:05:34 AM	Bypass valve closed
8/17/2011	11:05:34 AM	Bubbler valve closed
8/17/2011	11:05:34 AM	Main Vac valve opened
8/17/2011	11:05:34 AM	Helium MFC set to  0.000000
8/17/2011	11:05:34 AM	H2 MFC set to  0.000000
8/17/2011	11:05:34 AM	BCl3 MFC set to  0.000000
8/17/2011	11:05:34 AM	PHl3 MFC set to  0.000000
8/17/2011	11:05:34 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:05:34 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:05:34 AM	Tube furnace set to 200
8/17/2011	11:06:04 AM	H2 valve closed
8/17/2011	11:06:04 AM	BCl3 valve closed
8/17/2011	11:06:04 AM	PH3 valve closed
8/17/2011	11:06:04 AM	SiCl4 pre valve closed
8/17/2011	11:06:04 AM	SiCl4 post valve closed
8/17/2011	11:06:04 AM	Bypass valve closed
8/17/2011	11:06:04 AM	Bubbler valve closed
8/17/2011	11:06:04 AM	Helium valve opened
8/17/2011	11:06:04 AM	Main Vac valve opened
8/17/2011	11:06:04 AM	Helium MFC set to  20.000000
8/17/2011	11:06:04 AM	H2 MFC set to  0.000000
8/17/2011	11:06:04 AM	BCl3 MFC set to  0.000000
8/17/2011	11:06:04 AM	PHl3 MFC set to  0.000000
8/17/2011	11:06:04 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:06:04 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:06:04 AM	Tube furnace set to 200
8/17/2011	11:06:35 AM	Helium valve closed
8/17/2011	11:06:35 AM	H2 valve closed
8/17/2011	11:06:35 AM	BCl3 valve closed
8/17/2011	11:06:35 AM	PH3 valve closed
8/17/2011	11:06:35 AM	SiCl4 pre valve closed
8/17/2011	11:06:35 AM	SiCl4 post valve closed
8/17/2011	11:06:35 AM	Bypass valve closed
8/17/2011	11:06:35 AM	Bubbler valve closed
8/17/2011	11:06:35 AM	Main Vac valve opened
8/17/2011	11:06:35 AM	Helium MFC set to  0.000000
8/17/2011	11:06:35 AM	H2 MFC set to  0.000000
8/17/2011	11:06:35 AM	BCl3 MFC set to  0.000000
8/17/2011	11:06:35 AM	PHl3 MFC set to  0.000000
8/17/2011	11:06:35 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:06:35 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:06:35 AM	Tube furnace set to 0
8/17/2011	11:06:36 AM	Run finished at 11:06 AM
8/17/2011	11:30:59 AM	Main Vac valve closed
8/17/2011	11:31:16 AM	Main Vac valve opened
8/17/2011	11:35:22 AM	Recipe started at 11:35 AM
8/17/2011	11:35:22 AM	Helium valve closed
8/17/2011	11:35:22 AM	H2 valve closed
8/17/2011	11:35:22 AM	BCl3 valve closed
8/17/2011	11:35:22 AM	PH3 valve closed
8/17/2011	11:35:22 AM	SiCl4 pre valve closed
8/17/2011	11:35:22 AM	SiCl4 post valve closed
8/17/2011	11:35:22 AM	Main Vac valve closed
8/17/2011	11:35:22 AM	Bypass valve closed
8/17/2011	11:35:22 AM	Bubbler valve closed
8/17/2011	11:35:22 AM	Helium MFC set to  0.000000
8/17/2011	11:35:22 AM	H2 MFC set to  0.000000
8/17/2011	11:35:22 AM	BCl3 MFC set to  0.000000
8/17/2011	11:35:22 AM	PHl3 MFC set to  0.000000
8/17/2011	11:35:22 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:35:22 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:35:22 AM	Tube furnace set to 0
8/17/2011	11:35:25 AM	Helium valve closed
8/17/2011	11:35:25 AM	BCl3 valve closed
8/17/2011	11:35:25 AM	PH3 valve closed
8/17/2011	11:35:25 AM	SiCl4 pre valve closed
8/17/2011	11:35:25 AM	SiCl4 post valve closed
8/17/2011	11:35:25 AM	Main Vac valve closed
8/17/2011	11:35:25 AM	Bypass valve closed
8/17/2011	11:35:25 AM	Bubbler valve closed
8/17/2011	11:35:25 AM	H2 valve opened
8/17/2011	11:35:25 AM	Helium MFC set to  0.000000
8/17/2011	11:35:25 AM	H2 MFC set to  500.000000
8/17/2011	11:35:25 AM	BCl3 MFC set to  0.000000
8/17/2011	11:35:25 AM	PHl3 MFC set to  0.000000
8/17/2011	11:35:25 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:35:25 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:35:25 AM	Tube furnace set to 0
8/17/2011	11:36:27 AM	Helium valve closed
8/17/2011	11:36:27 AM	BCl3 valve closed
8/17/2011	11:36:27 AM	PH3 valve closed
8/17/2011	11:36:27 AM	SiCl4 pre valve closed
8/17/2011	11:36:27 AM	SiCl4 post valve closed
8/17/2011	11:36:27 AM	Main Vac valve closed
8/17/2011	11:36:27 AM	Bypass valve closed
8/17/2011	11:36:27 AM	H2 valve opened
8/17/2011	11:36:27 AM	Bubbler valve opened
8/17/2011	11:36:27 AM	Helium MFC set to  0.000000
8/17/2011	11:36:27 AM	H2 MFC set to  500.000000
8/17/2011	11:36:27 AM	BCl3 MFC set to  0.000000
8/17/2011	11:36:27 AM	PHl3 MFC set to  0.000000
8/17/2011	11:36:27 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:36:27 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:36:27 AM	Tube furnace set to 0
8/17/2011	11:36:28 AM	Helium valve closed
8/17/2011	11:36:28 AM	BCl3 valve closed
8/17/2011	11:36:28 AM	PH3 valve closed
8/17/2011	11:36:28 AM	SiCl4 pre valve closed
8/17/2011	11:36:28 AM	SiCl4 post valve closed
8/17/2011	11:36:28 AM	Main Vac valve closed
8/17/2011	11:36:28 AM	Bypass valve closed
8/17/2011	11:36:28 AM	H2 valve opened
8/17/2011	11:36:28 AM	Bubbler valve opened
8/17/2011	11:36:28 AM	Helium MFC set to  0.000000
8/17/2011	11:36:28 AM	H2 MFC set to  500.000000
8/17/2011	11:36:28 AM	BCl3 MFC set to  0.000000
8/17/2011	11:36:28 AM	PHl3 MFC set to  0.000000
8/17/2011	11:36:28 AM	SiCl4 MFC set to  0.000000
8/17/2011	11:36:28 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:36:28 AM	Tube furnace set to 1000
8/17/2011	11:56:28 AM	Helium valve closed
8/17/2011	11:56:28 AM	BCl3 valve closed
8/17/2011	11:56:28 AM	Main Vac valve closed
8/17/2011	11:56:28 AM	Bypass valve closed
8/17/2011	11:56:28 AM	H2 valve opened
8/17/2011	11:56:28 AM	PH3 valve opened
8/17/2011	11:56:28 AM	SiCl4 pre valve opened
8/17/2011	11:56:28 AM	SiCl4 post valve opened
8/17/2011	11:56:28 AM	Bubbler valve opened
8/17/2011	11:56:28 AM	Helium MFC set to  0.000000
8/17/2011	11:56:28 AM	H2 MFC set to  500.000000
8/17/2011	11:56:28 AM	BCl3 MFC set to  0.000000
8/17/2011	11:56:28 AM	PHl3 MFC set to  1.500000
8/17/2011	11:56:28 AM	SiCl4 MFC set to  50.000000
8/17/2011	11:56:28 AM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:56:28 AM	Tube furnace set to 1000
8/17/2011	12:12:28 PM	Helium valve closed
8/17/2011	12:12:28 PM	BCl3 valve closed
8/17/2011	12:12:28 PM	PH3 valve closed
8/17/2011	12:12:28 PM	SiCl4 pre valve closed
8/17/2011	12:12:28 PM	SiCl4 post valve closed
8/17/2011	12:12:28 PM	Main Vac valve closed
8/17/2011	12:12:28 PM	Bypass valve closed
8/17/2011	12:12:28 PM	H2 valve opened
8/17/2011	12:12:28 PM	Bubbler valve opened
8/17/2011	12:12:28 PM	Helium MFC set to  0.000000
8/17/2011	12:12:28 PM	H2 MFC set to  500.000000
8/17/2011	12:12:28 PM	BCl3 MFC set to  0.000000
8/17/2011	12:12:28 PM	PHl3 MFC set to  0.000000
8/17/2011	12:12:28 PM	SiCl4 MFC set to  0.000000
8/17/2011	12:12:28 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	12:12:29 PM	Tube furnace set to 950
8/17/2011	12:14:29 PM	Helium valve closed
8/17/2011	12:14:29 PM	BCl3 valve closed
8/17/2011	12:14:29 PM	PH3 valve closed
8/17/2011	12:14:29 PM	SiCl4 pre valve closed
8/17/2011	12:14:29 PM	SiCl4 post valve closed
8/17/2011	12:14:29 PM	Main Vac valve closed
8/17/2011	12:14:29 PM	Bypass valve closed
8/17/2011	12:14:29 PM	H2 valve opened
8/17/2011	12:14:29 PM	Bubbler valve opened
8/17/2011	12:14:29 PM	Helium MFC set to  0.000000
8/17/2011	12:14:29 PM	H2 MFC set to  500.000000
8/17/2011	12:14:29 PM	BCl3 MFC set to  0.000000
8/17/2011	12:14:29 PM	PHl3 MFC set to  0.000000
8/17/2011	12:14:29 PM	SiCl4 MFC set to  0.000000
8/17/2011	12:14:29 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	12:14:29 PM	Tube furnace set to 900
8/17/2011	12:16:29 PM	Helium valve closed
8/17/2011	12:16:29 PM	BCl3 valve closed
8/17/2011	12:16:29 PM	PH3 valve closed
8/17/2011	12:16:29 PM	SiCl4 pre valve closed
8/17/2011	12:16:29 PM	SiCl4 post valve closed
8/17/2011	12:16:29 PM	Main Vac valve closed
8/17/2011	12:16:29 PM	Bypass valve closed
8/17/2011	12:16:29 PM	H2 valve opened
8/17/2011	12:16:29 PM	Bubbler valve opened
8/17/2011	12:16:29 PM	Helium MFC set to  0.000000
8/17/2011	12:16:29 PM	H2 MFC set to  500.000000
8/17/2011	12:16:29 PM	BCl3 MFC set to  0.000000
8/17/2011	12:16:29 PM	PHl3 MFC set to  0.000000
8/17/2011	12:16:29 PM	SiCl4 MFC set to  0.000000
8/17/2011	12:16:29 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	12:16:29 PM	Tube furnace set to 850
8/17/2011	12:18:29 PM	H2 valve closed
8/17/2011	12:18:29 PM	BCl3 valve closed
8/17/2011	12:18:29 PM	PH3 valve closed
8/17/2011	12:18:29 PM	SiCl4 pre valve closed
8/17/2011	12:18:29 PM	SiCl4 post valve closed
8/17/2011	12:18:29 PM	Main Vac valve closed
8/17/2011	12:18:29 PM	Bypass valve closed
8/17/2011	12:18:29 PM	Helium valve opened
8/17/2011	12:18:29 PM	Bubbler valve opened
8/17/2011	12:18:29 PM	Helium MFC set to  500.000000
8/17/2011	12:18:29 PM	H2 MFC set to  0.000000
8/17/2011	12:18:29 PM	BCl3 MFC set to  0.000000
8/17/2011	12:18:29 PM	PHl3 MFC set to  0.000000
8/17/2011	12:18:29 PM	SiCl4 MFC set to  0.000000
8/17/2011	12:18:29 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	12:18:29 PM	Tube furnace set to 800
8/17/2011	12:20:29 PM	H2 valve closed
8/17/2011	12:20:29 PM	BCl3 valve closed
8/17/2011	12:20:29 PM	PH3 valve closed
8/17/2011	12:20:29 PM	SiCl4 pre valve closed
8/17/2011	12:20:29 PM	SiCl4 post valve closed
8/17/2011	12:20:29 PM	Main Vac valve closed
8/17/2011	12:20:29 PM	Bypass valve closed
8/17/2011	12:20:29 PM	Helium valve opened
8/17/2011	12:20:29 PM	Bubbler valve opened
8/17/2011	12:20:29 PM	Helium MFC set to  500.000000
8/17/2011	12:20:29 PM	H2 MFC set to  0.000000
8/17/2011	12:20:29 PM	BCl3 MFC set to  0.000000
8/17/2011	12:20:29 PM	PHl3 MFC set to  0.000000
8/17/2011	12:20:29 PM	SiCl4 MFC set to  0.000000
8/17/2011	12:20:29 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	12:20:29 PM	Tube furnace set to 750
8/17/2011	12:22:29 PM	H2 valve closed
8/17/2011	12:22:29 PM	BCl3 valve closed
8/17/2011	12:22:29 PM	PH3 valve closed
8/17/2011	12:22:29 PM	SiCl4 pre valve closed
8/17/2011	12:22:29 PM	SiCl4 post valve closed
8/17/2011	12:22:29 PM	Main Vac valve closed
8/17/2011	12:22:29 PM	Bypass valve closed
8/17/2011	12:22:29 PM	Helium valve opened
8/17/2011	12:22:29 PM	Bubbler valve opened
8/17/2011	12:22:29 PM	Helium MFC set to  500.000000
8/17/2011	12:22:29 PM	H2 MFC set to  0.000000
8/17/2011	12:22:29 PM	BCl3 MFC set to  0.000000
8/17/2011	12:22:29 PM	PHl3 MFC set to  0.000000
8/17/2011	12:22:29 PM	SiCl4 MFC set to  0.000000
8/17/2011	12:22:29 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	12:22:30 PM	Tube furnace set to 0
8/17/2011	12:42:30 PM	Helium valve closed
8/17/2011	12:42:30 PM	H2 valve closed
8/17/2011	12:42:30 PM	BCl3 valve closed
8/17/2011	12:42:30 PM	PH3 valve closed
8/17/2011	12:42:30 PM	SiCl4 pre valve closed
8/17/2011	12:42:30 PM	SiCl4 post valve closed
8/17/2011	12:42:30 PM	Main Vac valve closed
8/17/2011	12:42:30 PM	Bypass valve closed
8/17/2011	12:42:30 PM	Bubbler valve closed
8/17/2011	12:42:30 PM	Helium MFC set to  0.000000
8/17/2011	12:42:30 PM	H2 MFC set to  0.000000
8/17/2011	12:42:30 PM	BCl3 MFC set to  0.000000
8/17/2011	12:42:30 PM	PHl3 MFC set to  0.000000
8/17/2011	12:42:30 PM	SiCl4 MFC set to  0.000000
8/17/2011	12:42:30 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	12:42:30 PM	Tube furnace set to 0
8/17/2011	12:42:31 PM	Run finished at 12:42 PM
8/17/2011	12:59:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	12:59:25 PM	Recipe started at 12:59 PM
8/17/2011	12:59:25 PM	Helium valve closed
8/17/2011	12:59:25 PM	H2 valve closed
8/17/2011	12:59:25 PM	BCl3 valve closed
8/17/2011	12:59:25 PM	PH3 valve closed
8/17/2011	12:59:25 PM	SiCl4 pre valve closed
8/17/2011	12:59:25 PM	SiCl4 post valve closed
8/17/2011	12:59:25 PM	Main Vac valve closed
8/17/2011	12:59:25 PM	Bypass valve closed
8/17/2011	12:59:25 PM	Bubbler valve closed
8/17/2011	12:59:25 PM	Helium MFC set to  0.000000
8/17/2011	12:59:25 PM	H2 MFC set to  0.000000
8/17/2011	12:59:25 PM	BCl3 MFC set to  0.000000
8/17/2011	12:59:25 PM	PHl3 MFC set to  0.000000
8/17/2011	12:59:25 PM	SiCl4 MFC set to  0.000000
8/17/2011	12:59:25 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	12:59:25 PM	Tube furnace set to 0
8/17/2011	12:59:28 PM	H2 valve closed
8/17/2011	12:59:28 PM	BCl3 valve closed
8/17/2011	12:59:28 PM	PH3 valve closed
8/17/2011	12:59:28 PM	SiCl4 pre valve closed
8/17/2011	12:59:28 PM	SiCl4 post valve closed
8/17/2011	12:59:28 PM	Main Vac valve closed
8/17/2011	12:59:28 PM	Bypass valve closed
8/17/2011	12:59:28 PM	Bubbler valve closed
8/17/2011	12:59:28 PM	Helium valve opened
8/17/2011	12:59:28 PM	Helium MFC set to  500.000000
8/17/2011	12:59:28 PM	H2 MFC set to  0.000000
8/17/2011	12:59:28 PM	BCl3 MFC set to  0.000000
8/17/2011	12:59:28 PM	PHl3 MFC set to  0.000000
8/17/2011	12:59:28 PM	SiCl4 MFC set to  0.000000
8/17/2011	12:59:28 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	12:59:28 PM	Tube furnace set to 0
8/17/2011	12:59:34 PM	Helium valve closed
8/17/2011	12:59:34 PM	H2 valve closed
8/17/2011	12:59:34 PM	BCl3 valve closed
8/17/2011	12:59:34 PM	PH3 valve closed
8/17/2011	12:59:34 PM	SiCl4 pre valve closed
8/17/2011	12:59:34 PM	SiCl4 post valve closed
8/17/2011	12:59:34 PM	Main Vac valve closed
8/17/2011	12:59:34 PM	Bypass valve closed
8/17/2011	12:59:34 PM	Bubbler valve closed
8/17/2011	12:59:34 PM	Helium MFC set to  0.000000
8/17/2011	12:59:34 PM	H2 MFC set to  0.000000
8/17/2011	12:59:34 PM	BCl3 MFC set to  0.000000
8/17/2011	12:59:34 PM	PHl3 MFC set to  0.000000
8/17/2011	12:59:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	12:59:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	12:59:34 PM	Tube furnace set to 0
8/17/2011	12:59:35 PM	Run finished at 12:59 PM
8/17/2011	12:59:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	1:03:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2011	1:03:33 PM	Recipe started at 1:03 PM
8/17/2011	1:03:33 PM	Helium valve closed
8/17/2011	1:03:33 PM	H2 valve closed
8/17/2011	1:03:33 PM	BCl3 valve closed
8/17/2011	1:03:33 PM	PH3 valve closed
8/17/2011	1:03:33 PM	SiCl4 pre valve closed
8/17/2011	1:03:33 PM	SiCl4 post valve closed
8/17/2011	1:03:33 PM	Main Vac valve closed
8/17/2011	1:03:33 PM	Bubbler valve closed
8/17/2011	1:03:33 PM	Bypass valve opened
8/17/2011	1:03:33 PM	Helium MFC set to  0.000000
8/17/2011	1:03:33 PM	H2 MFC set to  0.000000
8/17/2011	1:03:33 PM	BCl3 MFC set to  0.000000
8/17/2011	1:03:33 PM	PHl3 MFC set to  0.000000
8/17/2011	1:03:33 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:03:33 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:03:33 PM	Tube furnace set to 0
8/17/2011	1:04:40 PM	Helium valve closed
8/17/2011	1:04:40 PM	H2 valve closed
8/17/2011	1:04:40 PM	BCl3 valve closed
8/17/2011	1:04:40 PM	PH3 valve closed
8/17/2011	1:04:40 PM	SiCl4 pre valve closed
8/17/2011	1:04:40 PM	SiCl4 post valve closed
8/17/2011	1:04:40 PM	Main Vac valve closed
8/17/2011	1:04:40 PM	Bubbler valve closed
8/17/2011	1:04:40 PM	Bypass valve opened
8/17/2011	1:04:40 PM	Helium MFC set to  0.000000
8/17/2011	1:04:40 PM	H2 MFC set to  0.000000
8/17/2011	1:04:40 PM	BCl3 MFC set to  0.000000
8/17/2011	1:04:40 PM	PHl3 MFC set to  0.000000
8/17/2011	1:04:40 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:04:40 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:04:41 PM	Tube furnace set to 0
8/17/2011	1:05:41 PM	Helium valve closed
8/17/2011	1:05:41 PM	H2 valve closed
8/17/2011	1:05:41 PM	BCl3 valve closed
8/17/2011	1:05:41 PM	PH3 valve closed
8/17/2011	1:05:41 PM	SiCl4 pre valve closed
8/17/2011	1:05:41 PM	SiCl4 post valve closed
8/17/2011	1:05:41 PM	Bypass valve closed
8/17/2011	1:05:41 PM	Bubbler valve closed
8/17/2011	1:05:41 PM	Main Vac valve opened
8/17/2011	1:05:41 PM	Helium MFC set to  0.000000
8/17/2011	1:05:41 PM	H2 MFC set to  0.000000
8/17/2011	1:05:41 PM	BCl3 MFC set to  0.000000
8/17/2011	1:05:41 PM	PHl3 MFC set to  0.000000
8/17/2011	1:05:41 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:05:41 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:05:41 PM	Tube furnace set to 0
8/17/2011	1:05:42 PM	Run finished at 1:05 PM
8/17/2011	1:05:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2011	1:25:27 PM	Main Vac valve closed
8/17/2011	1:25:35 PM	Main Vac valve opened
8/17/2011	1:28:03 PM	Recipe started at 1:27 PM
8/17/2011	1:28:03 PM	Helium valve closed
8/17/2011	1:28:03 PM	H2 valve closed
8/17/2011	1:28:03 PM	BCl3 valve closed
8/17/2011	1:28:03 PM	PH3 valve closed
8/17/2011	1:28:03 PM	SiCl4 pre valve closed
8/17/2011	1:28:03 PM	SiCl4 post valve closed
8/17/2011	1:28:03 PM	Bypass valve closed
8/17/2011	1:28:03 PM	Bubbler valve closed
8/17/2011	1:28:03 PM	Main Vac valve opened
8/17/2011	1:28:03 PM	Helium MFC set to  0.000000
8/17/2011	1:28:03 PM	H2 MFC set to  0.000000
8/17/2011	1:28:03 PM	BCl3 MFC set to  0.000000
8/17/2011	1:28:03 PM	PHl3 MFC set to  0.000000
8/17/2011	1:28:03 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:28:03 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:28:03 PM	Tube furnace set to 0
8/17/2011	1:28:33 PM	H2 valve closed
8/17/2011	1:28:33 PM	BCl3 valve closed
8/17/2011	1:28:33 PM	PH3 valve closed
8/17/2011	1:28:33 PM	SiCl4 pre valve closed
8/17/2011	1:28:33 PM	SiCl4 post valve closed
8/17/2011	1:28:33 PM	Bypass valve closed
8/17/2011	1:28:33 PM	Bubbler valve closed
8/17/2011	1:28:33 PM	Helium valve opened
8/17/2011	1:28:33 PM	Main Vac valve opened
8/17/2011	1:28:33 PM	Helium MFC set to  20.000000
8/17/2011	1:28:33 PM	H2 MFC set to  0.000000
8/17/2011	1:28:33 PM	BCl3 MFC set to  0.000000
8/17/2011	1:28:33 PM	PHl3 MFC set to  0.000000
8/17/2011	1:28:33 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:28:33 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:28:33 PM	Tube furnace set to 0
8/17/2011	1:29:03 PM	Helium valve closed
8/17/2011	1:29:03 PM	H2 valve closed
8/17/2011	1:29:03 PM	BCl3 valve closed
8/17/2011	1:29:03 PM	PH3 valve closed
8/17/2011	1:29:03 PM	SiCl4 pre valve closed
8/17/2011	1:29:03 PM	SiCl4 post valve closed
8/17/2011	1:29:03 PM	Bypass valve closed
8/17/2011	1:29:03 PM	Bubbler valve closed
8/17/2011	1:29:03 PM	Main Vac valve opened
8/17/2011	1:29:03 PM	Helium MFC set to  0.000000
8/17/2011	1:29:03 PM	H2 MFC set to  0.000000
8/17/2011	1:29:03 PM	BCl3 MFC set to  0.000000
8/17/2011	1:29:03 PM	PHl3 MFC set to  0.000000
8/17/2011	1:29:03 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:29:03 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:29:03 PM	Tube furnace set to 0
8/17/2011	1:29:33 PM	H2 valve closed
8/17/2011	1:29:33 PM	BCl3 valve closed
8/17/2011	1:29:33 PM	PH3 valve closed
8/17/2011	1:29:33 PM	SiCl4 pre valve closed
8/17/2011	1:29:33 PM	SiCl4 post valve closed
8/17/2011	1:29:33 PM	Bypass valve closed
8/17/2011	1:29:33 PM	Bubbler valve closed
8/17/2011	1:29:33 PM	Helium valve opened
8/17/2011	1:29:33 PM	Main Vac valve opened
8/17/2011	1:29:33 PM	Helium MFC set to  20.000000
8/17/2011	1:29:33 PM	H2 MFC set to  0.000000
8/17/2011	1:29:33 PM	BCl3 MFC set to  0.000000
8/17/2011	1:29:33 PM	PHl3 MFC set to  0.000000
8/17/2011	1:29:33 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:29:33 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:29:33 PM	Tube furnace set to 0
8/17/2011	1:30:03 PM	Helium valve closed
8/17/2011	1:30:03 PM	H2 valve closed
8/17/2011	1:30:03 PM	BCl3 valve closed
8/17/2011	1:30:03 PM	PH3 valve closed
8/17/2011	1:30:04 PM	SiCl4 pre valve closed
8/17/2011	1:30:04 PM	SiCl4 post valve closed
8/17/2011	1:30:04 PM	Bypass valve closed
8/17/2011	1:30:04 PM	Bubbler valve closed
8/17/2011	1:30:04 PM	Main Vac valve opened
8/17/2011	1:30:04 PM	Helium MFC set to  0.000000
8/17/2011	1:30:04 PM	H2 MFC set to  0.000000
8/17/2011	1:30:04 PM	BCl3 MFC set to  0.000000
8/17/2011	1:30:04 PM	PHl3 MFC set to  0.000000
8/17/2011	1:30:04 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:30:04 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:30:04 PM	Tube furnace set to 0
8/17/2011	1:30:34 PM	H2 valve closed
8/17/2011	1:30:34 PM	BCl3 valve closed
8/17/2011	1:30:34 PM	PH3 valve closed
8/17/2011	1:30:34 PM	SiCl4 pre valve closed
8/17/2011	1:30:34 PM	SiCl4 post valve closed
8/17/2011	1:30:34 PM	Bypass valve closed
8/17/2011	1:30:34 PM	Bubbler valve closed
8/17/2011	1:30:34 PM	Helium valve opened
8/17/2011	1:30:34 PM	Main Vac valve opened
8/17/2011	1:30:34 PM	Helium MFC set to  20.000000
8/17/2011	1:30:34 PM	H2 MFC set to  0.000000
8/17/2011	1:30:34 PM	BCl3 MFC set to  0.000000
8/17/2011	1:30:34 PM	PHl3 MFC set to  0.000000
8/17/2011	1:30:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:30:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:30:34 PM	Tube furnace set to 0
8/17/2011	1:31:04 PM	Helium valve closed
8/17/2011	1:31:04 PM	H2 valve closed
8/17/2011	1:31:04 PM	BCl3 valve closed
8/17/2011	1:31:04 PM	PH3 valve closed
8/17/2011	1:31:04 PM	SiCl4 pre valve closed
8/17/2011	1:31:04 PM	SiCl4 post valve closed
8/17/2011	1:31:04 PM	Bypass valve closed
8/17/2011	1:31:04 PM	Bubbler valve closed
8/17/2011	1:31:04 PM	Main Vac valve opened
8/17/2011	1:31:04 PM	Helium MFC set to  0.000000
8/17/2011	1:31:04 PM	H2 MFC set to  0.000000
8/17/2011	1:31:04 PM	BCl3 MFC set to  0.000000
8/17/2011	1:31:04 PM	PHl3 MFC set to  0.000000
8/17/2011	1:31:04 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:31:04 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:31:04 PM	Tube furnace set to 0
8/17/2011	1:31:34 PM	H2 valve closed
8/17/2011	1:31:34 PM	BCl3 valve closed
8/17/2011	1:31:34 PM	PH3 valve closed
8/17/2011	1:31:34 PM	SiCl4 pre valve closed
8/17/2011	1:31:34 PM	SiCl4 post valve closed
8/17/2011	1:31:34 PM	Bypass valve closed
8/17/2011	1:31:34 PM	Bubbler valve closed
8/17/2011	1:31:34 PM	Helium valve opened
8/17/2011	1:31:34 PM	Main Vac valve opened
8/17/2011	1:31:34 PM	Helium MFC set to  20.000000
8/17/2011	1:31:34 PM	H2 MFC set to  0.000000
8/17/2011	1:31:34 PM	BCl3 MFC set to  0.000000
8/17/2011	1:31:34 PM	PHl3 MFC set to  0.000000
8/17/2011	1:31:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:31:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:31:34 PM	Tube furnace set to 0
8/17/2011	1:32:04 PM	Helium valve closed
8/17/2011	1:32:04 PM	H2 valve closed
8/17/2011	1:32:04 PM	BCl3 valve closed
8/17/2011	1:32:04 PM	PH3 valve closed
8/17/2011	1:32:04 PM	SiCl4 pre valve closed
8/17/2011	1:32:04 PM	SiCl4 post valve closed
8/17/2011	1:32:04 PM	Bypass valve closed
8/17/2011	1:32:04 PM	Bubbler valve closed
8/17/2011	1:32:04 PM	Main Vac valve opened
8/17/2011	1:32:04 PM	Helium MFC set to  0.000000
8/17/2011	1:32:04 PM	H2 MFC set to  0.000000
8/17/2011	1:32:04 PM	BCl3 MFC set to  0.000000
8/17/2011	1:32:04 PM	PHl3 MFC set to  0.000000
8/17/2011	1:32:04 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:32:04 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:32:04 PM	Tube furnace set to 0
8/17/2011	1:32:34 PM	H2 valve closed
8/17/2011	1:32:34 PM	BCl3 valve closed
8/17/2011	1:32:34 PM	PH3 valve closed
8/17/2011	1:32:34 PM	SiCl4 pre valve closed
8/17/2011	1:32:34 PM	SiCl4 post valve closed
8/17/2011	1:32:34 PM	Bypass valve closed
8/17/2011	1:32:34 PM	Bubbler valve closed
8/17/2011	1:32:34 PM	Helium valve opened
8/17/2011	1:32:34 PM	Main Vac valve opened
8/17/2011	1:32:34 PM	Helium MFC set to  20.000000
8/17/2011	1:32:34 PM	H2 MFC set to  0.000000
8/17/2011	1:32:34 PM	BCl3 MFC set to  0.000000
8/17/2011	1:32:35 PM	PHl3 MFC set to  0.000000
8/17/2011	1:32:35 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:32:35 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:32:35 PM	Tube furnace set to 0
8/17/2011	1:33:05 PM	Helium valve closed
8/17/2011	1:33:05 PM	H2 valve closed
8/17/2011	1:33:05 PM	BCl3 valve closed
8/17/2011	1:33:05 PM	PH3 valve closed
8/17/2011	1:33:05 PM	SiCl4 pre valve closed
8/17/2011	1:33:05 PM	SiCl4 post valve closed
8/17/2011	1:33:05 PM	Bypass valve closed
8/17/2011	1:33:05 PM	Bubbler valve closed
8/17/2011	1:33:05 PM	Main Vac valve opened
8/17/2011	1:33:05 PM	Helium MFC set to  0.000000
8/17/2011	1:33:05 PM	H2 MFC set to  0.000000
8/17/2011	1:33:05 PM	BCl3 MFC set to  0.000000
8/17/2011	1:33:05 PM	PHl3 MFC set to  0.000000
8/17/2011	1:33:05 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:33:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:33:05 PM	Tube furnace set to 0
8/17/2011	1:33:35 PM	H2 valve closed
8/17/2011	1:33:35 PM	BCl3 valve closed
8/17/2011	1:33:35 PM	PH3 valve closed
8/17/2011	1:33:35 PM	SiCl4 pre valve closed
8/17/2011	1:33:35 PM	SiCl4 post valve closed
8/17/2011	1:33:35 PM	Bypass valve closed
8/17/2011	1:33:35 PM	Bubbler valve closed
8/17/2011	1:33:35 PM	Helium valve opened
8/17/2011	1:33:35 PM	Main Vac valve opened
8/17/2011	1:33:35 PM	Helium MFC set to  20.000000
8/17/2011	1:33:35 PM	H2 MFC set to  0.000000
8/17/2011	1:33:35 PM	BCl3 MFC set to  0.000000
8/17/2011	1:33:35 PM	PHl3 MFC set to  0.000000
8/17/2011	1:33:35 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:33:35 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:33:35 PM	Tube furnace set to 0
8/17/2011	1:34:05 PM	Helium valve closed
8/17/2011	1:34:05 PM	H2 valve closed
8/17/2011	1:34:05 PM	BCl3 valve closed
8/17/2011	1:34:05 PM	PH3 valve closed
8/17/2011	1:34:05 PM	SiCl4 pre valve closed
8/17/2011	1:34:05 PM	SiCl4 post valve closed
8/17/2011	1:34:05 PM	Bypass valve closed
8/17/2011	1:34:05 PM	Bubbler valve closed
8/17/2011	1:34:05 PM	Main Vac valve opened
8/17/2011	1:34:05 PM	Helium MFC set to  0.000000
8/17/2011	1:34:05 PM	H2 MFC set to  0.000000
8/17/2011	1:34:05 PM	BCl3 MFC set to  0.000000
8/17/2011	1:34:05 PM	PHl3 MFC set to  0.000000
8/17/2011	1:34:05 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:34:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:34:05 PM	Tube furnace set to 0
8/17/2011	1:34:35 PM	H2 valve closed
8/17/2011	1:34:35 PM	BCl3 valve closed
8/17/2011	1:34:35 PM	PH3 valve closed
8/17/2011	1:34:35 PM	SiCl4 pre valve closed
8/17/2011	1:34:35 PM	SiCl4 post valve closed
8/17/2011	1:34:35 PM	Bypass valve closed
8/17/2011	1:34:35 PM	Bubbler valve closed
8/17/2011	1:34:35 PM	Helium valve opened
8/17/2011	1:34:35 PM	Main Vac valve opened
8/17/2011	1:34:35 PM	Helium MFC set to  20.000000
8/17/2011	1:34:35 PM	H2 MFC set to  0.000000
8/17/2011	1:34:35 PM	BCl3 MFC set to  0.000000
8/17/2011	1:34:35 PM	PHl3 MFC set to  0.000000
8/17/2011	1:34:35 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:34:35 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:34:35 PM	Tube furnace set to 0
8/17/2011	1:35:05 PM	Helium valve closed
8/17/2011	1:35:05 PM	H2 valve closed
8/17/2011	1:35:05 PM	BCl3 valve closed
8/17/2011	1:35:05 PM	PH3 valve closed
8/17/2011	1:35:05 PM	SiCl4 pre valve closed
8/17/2011	1:35:05 PM	SiCl4 post valve closed
8/17/2011	1:35:05 PM	Bypass valve closed
8/17/2011	1:35:05 PM	Bubbler valve closed
8/17/2011	1:35:05 PM	Main Vac valve opened
8/17/2011	1:35:05 PM	Helium MFC set to  0.000000
8/17/2011	1:35:05 PM	H2 MFC set to  0.000000
8/17/2011	1:35:05 PM	BCl3 MFC set to  0.000000
8/17/2011	1:35:05 PM	PHl3 MFC set to  0.000000
8/17/2011	1:35:05 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:35:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:35:06 PM	Tube furnace set to 0
8/17/2011	1:35:36 PM	H2 valve closed
8/17/2011	1:35:36 PM	BCl3 valve closed
8/17/2011	1:35:36 PM	PH3 valve closed
8/17/2011	1:35:36 PM	SiCl4 pre valve closed
8/17/2011	1:35:36 PM	SiCl4 post valve closed
8/17/2011	1:35:36 PM	Bypass valve closed
8/17/2011	1:35:36 PM	Bubbler valve closed
8/17/2011	1:35:36 PM	Helium valve opened
8/17/2011	1:35:36 PM	Main Vac valve opened
8/17/2011	1:35:36 PM	Helium MFC set to  20.000000
8/17/2011	1:35:36 PM	H2 MFC set to  0.000000
8/17/2011	1:35:36 PM	BCl3 MFC set to  0.000000
8/17/2011	1:35:36 PM	PHl3 MFC set to  0.000000
8/17/2011	1:35:36 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:35:36 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:35:36 PM	Tube furnace set to 0
8/17/2011	1:36:06 PM	Helium valve closed
8/17/2011	1:36:06 PM	H2 valve closed
8/17/2011	1:36:06 PM	BCl3 valve closed
8/17/2011	1:36:06 PM	PH3 valve closed
8/17/2011	1:36:06 PM	SiCl4 pre valve closed
8/17/2011	1:36:06 PM	SiCl4 post valve closed
8/17/2011	1:36:06 PM	Bypass valve closed
8/17/2011	1:36:06 PM	Bubbler valve closed
8/17/2011	1:36:06 PM	Main Vac valve opened
8/17/2011	1:36:06 PM	Helium MFC set to  0.000000
8/17/2011	1:36:06 PM	H2 MFC set to  0.000000
8/17/2011	1:36:06 PM	BCl3 MFC set to  0.000000
8/17/2011	1:36:06 PM	PHl3 MFC set to  0.000000
8/17/2011	1:36:06 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:36:06 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:36:06 PM	Tube furnace set to 0
8/17/2011	1:36:36 PM	H2 valve closed
8/17/2011	1:36:36 PM	BCl3 valve closed
8/17/2011	1:36:36 PM	PH3 valve closed
8/17/2011	1:36:36 PM	SiCl4 pre valve closed
8/17/2011	1:36:36 PM	SiCl4 post valve closed
8/17/2011	1:36:36 PM	Bypass valve closed
8/17/2011	1:36:36 PM	Bubbler valve closed
8/17/2011	1:36:36 PM	Helium valve opened
8/17/2011	1:36:36 PM	Main Vac valve opened
8/17/2011	1:36:36 PM	Helium MFC set to  20.000000
8/17/2011	1:36:36 PM	H2 MFC set to  0.000000
8/17/2011	1:36:36 PM	BCl3 MFC set to  0.000000
8/17/2011	1:36:36 PM	PHl3 MFC set to  0.000000
8/17/2011	1:36:36 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:36:36 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:36:36 PM	Tube furnace set to 0
8/17/2011	1:37:06 PM	Helium valve closed
8/17/2011	1:37:06 PM	H2 valve closed
8/17/2011	1:37:06 PM	BCl3 valve closed
8/17/2011	1:37:06 PM	PH3 valve closed
8/17/2011	1:37:06 PM	SiCl4 pre valve closed
8/17/2011	1:37:06 PM	SiCl4 post valve closed
8/17/2011	1:37:06 PM	Bypass valve closed
8/17/2011	1:37:06 PM	Bubbler valve closed
8/17/2011	1:37:06 PM	Main Vac valve opened
8/17/2011	1:37:06 PM	Helium MFC set to  0.000000
8/17/2011	1:37:06 PM	H2 MFC set to  0.000000
8/17/2011	1:37:06 PM	BCl3 MFC set to  0.000000
8/17/2011	1:37:06 PM	PHl3 MFC set to  0.000000
8/17/2011	1:37:06 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:37:06 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:37:06 PM	Tube furnace set to 200
8/17/2011	1:37:36 PM	H2 valve closed
8/17/2011	1:37:36 PM	BCl3 valve closed
8/17/2011	1:37:36 PM	PH3 valve closed
8/17/2011	1:37:36 PM	SiCl4 pre valve closed
8/17/2011	1:37:36 PM	SiCl4 post valve closed
8/17/2011	1:37:36 PM	Bypass valve closed
8/17/2011	1:37:36 PM	Bubbler valve closed
8/17/2011	1:37:36 PM	Helium valve opened
8/17/2011	1:37:36 PM	Main Vac valve opened
8/17/2011	1:37:36 PM	Helium MFC set to  20.000000
8/17/2011	1:37:36 PM	H2 MFC set to  0.000000
8/17/2011	1:37:36 PM	BCl3 MFC set to  0.000000
8/17/2011	1:37:36 PM	PHl3 MFC set to  0.000000
8/17/2011	1:37:36 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:37:36 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:37:37 PM	Tube furnace set to 200
8/17/2011	1:38:07 PM	Helium valve closed
8/17/2011	1:38:07 PM	H2 valve closed
8/17/2011	1:38:07 PM	BCl3 valve closed
8/17/2011	1:38:07 PM	PH3 valve closed
8/17/2011	1:38:07 PM	SiCl4 pre valve closed
8/17/2011	1:38:07 PM	SiCl4 post valve closed
8/17/2011	1:38:07 PM	Bypass valve closed
8/17/2011	1:38:07 PM	Bubbler valve closed
8/17/2011	1:38:07 PM	Main Vac valve opened
8/17/2011	1:38:07 PM	Helium MFC set to  0.000000
8/17/2011	1:38:07 PM	H2 MFC set to  0.000000
8/17/2011	1:38:07 PM	BCl3 MFC set to  0.000000
8/17/2011	1:38:07 PM	PHl3 MFC set to  0.000000
8/17/2011	1:38:07 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:38:07 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:38:07 PM	Tube furnace set to 200
8/17/2011	1:38:37 PM	H2 valve closed
8/17/2011	1:38:37 PM	BCl3 valve closed
8/17/2011	1:38:37 PM	PH3 valve closed
8/17/2011	1:38:37 PM	SiCl4 pre valve closed
8/17/2011	1:38:37 PM	SiCl4 post valve closed
8/17/2011	1:38:37 PM	Bypass valve closed
8/17/2011	1:38:37 PM	Bubbler valve closed
8/17/2011	1:38:37 PM	Helium valve opened
8/17/2011	1:38:37 PM	Main Vac valve opened
8/17/2011	1:38:37 PM	Helium MFC set to  20.000000
8/17/2011	1:38:37 PM	H2 MFC set to  0.000000
8/17/2011	1:38:37 PM	BCl3 MFC set to  0.000000
8/17/2011	1:38:37 PM	PHl3 MFC set to  0.000000
8/17/2011	1:38:37 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:38:37 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:38:37 PM	Tube furnace set to 200
8/17/2011	1:39:07 PM	Helium valve closed
8/17/2011	1:39:07 PM	H2 valve closed
8/17/2011	1:39:07 PM	BCl3 valve closed
8/17/2011	1:39:07 PM	PH3 valve closed
8/17/2011	1:39:07 PM	SiCl4 pre valve closed
8/17/2011	1:39:07 PM	SiCl4 post valve closed
8/17/2011	1:39:07 PM	Bypass valve closed
8/17/2011	1:39:07 PM	Bubbler valve closed
8/17/2011	1:39:07 PM	Main Vac valve opened
8/17/2011	1:39:07 PM	Helium MFC set to  0.000000
8/17/2011	1:39:07 PM	H2 MFC set to  0.000000
8/17/2011	1:39:07 PM	BCl3 MFC set to  0.000000
8/17/2011	1:39:07 PM	PHl3 MFC set to  0.000000
8/17/2011	1:39:07 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:39:07 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:39:07 PM	Tube furnace set to 200
8/17/2011	1:39:37 PM	H2 valve closed
8/17/2011	1:39:37 PM	BCl3 valve closed
8/17/2011	1:39:37 PM	PH3 valve closed
8/17/2011	1:39:37 PM	SiCl4 pre valve closed
8/17/2011	1:39:37 PM	SiCl4 post valve closed
8/17/2011	1:39:37 PM	Bypass valve closed
8/17/2011	1:39:37 PM	Bubbler valve closed
8/17/2011	1:39:37 PM	Helium valve opened
8/17/2011	1:39:37 PM	Main Vac valve opened
8/17/2011	1:39:37 PM	Helium MFC set to  20.000000
8/17/2011	1:39:37 PM	H2 MFC set to  0.000000
8/17/2011	1:39:37 PM	BCl3 MFC set to  0.000000
8/17/2011	1:39:37 PM	PHl3 MFC set to  0.000000
8/17/2011	1:39:37 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:39:37 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:39:37 PM	Tube furnace set to 200
8/17/2011	1:40:08 PM	Helium valve closed
8/17/2011	1:40:08 PM	H2 valve closed
8/17/2011	1:40:08 PM	BCl3 valve closed
8/17/2011	1:40:08 PM	PH3 valve closed
8/17/2011	1:40:08 PM	SiCl4 pre valve closed
8/17/2011	1:40:08 PM	SiCl4 post valve closed
8/17/2011	1:40:08 PM	Bypass valve closed
8/17/2011	1:40:08 PM	Bubbler valve closed
8/17/2011	1:40:08 PM	Main Vac valve opened
8/17/2011	1:40:08 PM	Helium MFC set to  0.000000
8/17/2011	1:40:08 PM	H2 MFC set to  0.000000
8/17/2011	1:40:08 PM	BCl3 MFC set to  0.000000
8/17/2011	1:40:08 PM	PHl3 MFC set to  0.000000
8/17/2011	1:40:08 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:40:08 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:40:08 PM	Tube furnace set to 200
8/17/2011	1:40:38 PM	H2 valve closed
8/17/2011	1:40:38 PM	BCl3 valve closed
8/17/2011	1:40:38 PM	PH3 valve closed
8/17/2011	1:40:38 PM	SiCl4 pre valve closed
8/17/2011	1:40:38 PM	SiCl4 post valve closed
8/17/2011	1:40:38 PM	Bypass valve closed
8/17/2011	1:40:38 PM	Bubbler valve closed
8/17/2011	1:40:38 PM	Helium valve opened
8/17/2011	1:40:38 PM	Main Vac valve opened
8/17/2011	1:40:38 PM	Helium MFC set to  20.000000
8/17/2011	1:40:38 PM	H2 MFC set to  0.000000
8/17/2011	1:40:38 PM	BCl3 MFC set to  0.000000
8/17/2011	1:40:38 PM	PHl3 MFC set to  0.000000
8/17/2011	1:40:38 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:40:38 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:40:38 PM	Tube furnace set to 200
8/17/2011	1:41:08 PM	Helium valve closed
8/17/2011	1:41:08 PM	H2 valve closed
8/17/2011	1:41:08 PM	BCl3 valve closed
8/17/2011	1:41:08 PM	PH3 valve closed
8/17/2011	1:41:08 PM	SiCl4 pre valve closed
8/17/2011	1:41:08 PM	SiCl4 post valve closed
8/17/2011	1:41:08 PM	Bypass valve closed
8/17/2011	1:41:08 PM	Bubbler valve closed
8/17/2011	1:41:08 PM	Main Vac valve opened
8/17/2011	1:41:08 PM	Helium MFC set to  0.000000
8/17/2011	1:41:08 PM	H2 MFC set to  0.000000
8/17/2011	1:41:08 PM	BCl3 MFC set to  0.000000
8/17/2011	1:41:08 PM	PHl3 MFC set to  0.000000
8/17/2011	1:41:08 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:41:08 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:41:08 PM	Tube furnace set to 200
8/17/2011	1:41:38 PM	H2 valve closed
8/17/2011	1:41:38 PM	BCl3 valve closed
8/17/2011	1:41:38 PM	PH3 valve closed
8/17/2011	1:41:38 PM	SiCl4 pre valve closed
8/17/2011	1:41:38 PM	SiCl4 post valve closed
8/17/2011	1:41:38 PM	Bypass valve closed
8/17/2011	1:41:38 PM	Bubbler valve closed
8/17/2011	1:41:38 PM	Helium valve opened
8/17/2011	1:41:38 PM	Main Vac valve opened
8/17/2011	1:41:38 PM	Helium MFC set to  20.000000
8/17/2011	1:41:38 PM	H2 MFC set to  0.000000
8/17/2011	1:41:38 PM	BCl3 MFC set to  0.000000
8/17/2011	1:41:38 PM	PHl3 MFC set to  0.000000
8/17/2011	1:41:38 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:41:38 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:41:38 PM	Tube furnace set to 200
8/17/2011	1:42:08 PM	Helium valve closed
8/17/2011	1:42:08 PM	H2 valve closed
8/17/2011	1:42:08 PM	BCl3 valve closed
8/17/2011	1:42:08 PM	PH3 valve closed
8/17/2011	1:42:08 PM	SiCl4 pre valve closed
8/17/2011	1:42:08 PM	SiCl4 post valve closed
8/17/2011	1:42:08 PM	Bypass valve closed
8/17/2011	1:42:08 PM	Bubbler valve closed
8/17/2011	1:42:08 PM	Main Vac valve opened
8/17/2011	1:42:08 PM	Helium MFC set to  0.000000
8/17/2011	1:42:08 PM	H2 MFC set to  0.000000
8/17/2011	1:42:08 PM	BCl3 MFC set to  0.000000
8/17/2011	1:42:08 PM	PHl3 MFC set to  0.000000
8/17/2011	1:42:08 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:42:08 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:42:09 PM	Tube furnace set to 200
8/17/2011	1:42:39 PM	H2 valve closed
8/17/2011	1:42:39 PM	BCl3 valve closed
8/17/2011	1:42:39 PM	PH3 valve closed
8/17/2011	1:42:39 PM	SiCl4 pre valve closed
8/17/2011	1:42:39 PM	SiCl4 post valve closed
8/17/2011	1:42:39 PM	Bypass valve closed
8/17/2011	1:42:39 PM	Bubbler valve closed
8/17/2011	1:42:39 PM	Helium valve opened
8/17/2011	1:42:39 PM	Main Vac valve opened
8/17/2011	1:42:39 PM	Helium MFC set to  20.000000
8/17/2011	1:42:39 PM	H2 MFC set to  0.000000
8/17/2011	1:42:39 PM	BCl3 MFC set to  0.000000
8/17/2011	1:42:39 PM	PHl3 MFC set to  0.000000
8/17/2011	1:42:39 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:42:39 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:42:39 PM	Tube furnace set to 200
8/17/2011	1:43:09 PM	Helium valve closed
8/17/2011	1:43:09 PM	H2 valve closed
8/17/2011	1:43:09 PM	BCl3 valve closed
8/17/2011	1:43:09 PM	PH3 valve closed
8/17/2011	1:43:09 PM	SiCl4 pre valve closed
8/17/2011	1:43:09 PM	SiCl4 post valve closed
8/17/2011	1:43:09 PM	Bypass valve closed
8/17/2011	1:43:09 PM	Bubbler valve closed
8/17/2011	1:43:09 PM	Main Vac valve opened
8/17/2011	1:43:09 PM	Helium MFC set to  0.000000
8/17/2011	1:43:09 PM	H2 MFC set to  0.000000
8/17/2011	1:43:09 PM	BCl3 MFC set to  0.000000
8/17/2011	1:43:09 PM	PHl3 MFC set to  0.000000
8/17/2011	1:43:09 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:43:09 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:43:09 PM	Tube furnace set to 0
8/17/2011	1:43:10 PM	Run finished at 1:43 PM
8/17/2011	1:50:26 PM	Main Vac valve closed
8/17/2011	1:50:39 PM	Main Vac valve opened
8/17/2011	1:51:14 PM	Recipe started at 1:51 PM
8/17/2011	1:51:14 PM	Helium valve closed
8/17/2011	1:51:14 PM	H2 valve closed
8/17/2011	1:51:14 PM	BCl3 valve closed
8/17/2011	1:51:14 PM	PH3 valve closed
8/17/2011	1:51:14 PM	SiCl4 pre valve closed
8/17/2011	1:51:14 PM	SiCl4 post valve closed
8/17/2011	1:51:14 PM	Main Vac valve closed
8/17/2011	1:51:14 PM	Bypass valve closed
8/17/2011	1:51:14 PM	Bubbler valve closed
8/17/2011	1:51:14 PM	Helium MFC set to  0.000000
8/17/2011	1:51:14 PM	H2 MFC set to  0.000000
8/17/2011	1:51:14 PM	BCl3 MFC set to  0.000000
8/17/2011	1:51:14 PM	PHl3 MFC set to  0.000000
8/17/2011	1:51:14 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:51:14 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:51:14 PM	Tube furnace set to 0
8/17/2011	1:51:17 PM	Helium valve closed
8/17/2011	1:51:17 PM	BCl3 valve closed
8/17/2011	1:51:17 PM	PH3 valve closed
8/17/2011	1:51:17 PM	SiCl4 pre valve closed
8/17/2011	1:51:17 PM	SiCl4 post valve closed
8/17/2011	1:51:17 PM	Main Vac valve closed
8/17/2011	1:51:17 PM	Bypass valve closed
8/17/2011	1:51:17 PM	Bubbler valve closed
8/17/2011	1:51:17 PM	H2 valve opened
8/17/2011	1:51:17 PM	Helium MFC set to  0.000000
8/17/2011	1:51:17 PM	H2 MFC set to  500.000000
8/17/2011	1:51:17 PM	BCl3 MFC set to  0.000000
8/17/2011	1:51:17 PM	PHl3 MFC set to  0.000000
8/17/2011	1:51:17 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:51:17 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:51:18 PM	Tube furnace set to 0
8/17/2011	1:52:20 PM	Helium valve closed
8/17/2011	1:52:20 PM	BCl3 valve closed
8/17/2011	1:52:20 PM	PH3 valve closed
8/17/2011	1:52:20 PM	SiCl4 pre valve closed
8/17/2011	1:52:20 PM	SiCl4 post valve closed
8/17/2011	1:52:20 PM	Main Vac valve closed
8/17/2011	1:52:20 PM	Bypass valve closed
8/17/2011	1:52:20 PM	H2 valve opened
8/17/2011	1:52:20 PM	Bubbler valve opened
8/17/2011	1:52:20 PM	Helium MFC set to  0.000000
8/17/2011	1:52:20 PM	H2 MFC set to  500.000000
8/17/2011	1:52:20 PM	BCl3 MFC set to  0.000000
8/17/2011	1:52:20 PM	PHl3 MFC set to  0.000000
8/17/2011	1:52:20 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:52:20 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:52:21 PM	Tube furnace set to 0
8/17/2011	1:52:22 PM	Helium valve closed
8/17/2011	1:52:22 PM	BCl3 valve closed
8/17/2011	1:52:22 PM	PH3 valve closed
8/17/2011	1:52:22 PM	SiCl4 pre valve closed
8/17/2011	1:52:22 PM	SiCl4 post valve closed
8/17/2011	1:52:22 PM	Main Vac valve closed
8/17/2011	1:52:22 PM	Bypass valve closed
8/17/2011	1:52:22 PM	H2 valve opened
8/17/2011	1:52:22 PM	Bubbler valve opened
8/17/2011	1:52:22 PM	Helium MFC set to  0.000000
8/17/2011	1:52:22 PM	H2 MFC set to  500.000000
8/17/2011	1:52:22 PM	BCl3 MFC set to  0.000000
8/17/2011	1:52:22 PM	PHl3 MFC set to  0.000000
8/17/2011	1:52:22 PM	SiCl4 MFC set to  0.000000
8/17/2011	1:52:22 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	1:52:22 PM	Tube furnace set to 1000
8/17/2011	2:12:22 PM	Helium valve closed
8/17/2011	2:12:22 PM	BCl3 valve closed
8/17/2011	2:12:22 PM	Main Vac valve closed
8/17/2011	2:12:22 PM	Bypass valve closed
8/17/2011	2:12:22 PM	H2 valve opened
8/17/2011	2:12:22 PM	PH3 valve opened
8/17/2011	2:12:22 PM	SiCl4 pre valve opened
8/17/2011	2:12:22 PM	SiCl4 post valve opened
8/17/2011	2:12:22 PM	Bubbler valve opened
8/17/2011	2:12:22 PM	Helium MFC set to  0.000000
8/17/2011	2:12:22 PM	H2 MFC set to  500.000000
8/17/2011	2:12:22 PM	BCl3 MFC set to  0.000000
8/17/2011	2:12:22 PM	PHl3 MFC set to  1.000000
8/17/2011	2:12:22 PM	SiCl4 MFC set to  50.000000
8/17/2011	2:12:22 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	2:12:22 PM	Tube furnace set to 1000
8/17/2011	2:27:22 PM	Helium valve closed
8/17/2011	2:27:22 PM	BCl3 valve closed
8/17/2011	2:27:22 PM	PH3 valve closed
8/17/2011	2:27:22 PM	SiCl4 pre valve closed
8/17/2011	2:27:22 PM	SiCl4 post valve closed
8/17/2011	2:27:22 PM	Main Vac valve closed
8/17/2011	2:27:22 PM	Bypass valve closed
8/17/2011	2:27:22 PM	H2 valve opened
8/17/2011	2:27:22 PM	Bubbler valve opened
8/17/2011	2:27:22 PM	Helium MFC set to  0.000000
8/17/2011	2:27:22 PM	H2 MFC set to  500.000000
8/17/2011	2:27:22 PM	BCl3 MFC set to  0.000000
8/17/2011	2:27:22 PM	PHl3 MFC set to  0.000000
8/17/2011	2:27:22 PM	SiCl4 MFC set to  0.000000
8/17/2011	2:27:22 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	2:27:22 PM	Tube furnace set to 950
8/17/2011	2:29:22 PM	Helium valve closed
8/17/2011	2:29:22 PM	BCl3 valve closed
8/17/2011	2:29:22 PM	PH3 valve closed
8/17/2011	2:29:22 PM	SiCl4 pre valve closed
8/17/2011	2:29:22 PM	SiCl4 post valve closed
8/17/2011	2:29:22 PM	Main Vac valve closed
8/17/2011	2:29:22 PM	Bypass valve closed
8/17/2011	2:29:22 PM	H2 valve opened
8/17/2011	2:29:22 PM	Bubbler valve opened
8/17/2011	2:29:22 PM	Helium MFC set to  0.000000
8/17/2011	2:29:22 PM	H2 MFC set to  500.000000
8/17/2011	2:29:22 PM	BCl3 MFC set to  0.000000
8/17/2011	2:29:22 PM	PHl3 MFC set to  0.000000
8/17/2011	2:29:22 PM	SiCl4 MFC set to  0.000000
8/17/2011	2:29:22 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	2:29:22 PM	Tube furnace set to 900
8/17/2011	2:31:22 PM	Helium valve closed
8/17/2011	2:31:22 PM	BCl3 valve closed
8/17/2011	2:31:22 PM	PH3 valve closed
8/17/2011	2:31:22 PM	SiCl4 pre valve closed
8/17/2011	2:31:22 PM	SiCl4 post valve closed
8/17/2011	2:31:22 PM	Main Vac valve closed
8/17/2011	2:31:22 PM	Bypass valve closed
8/17/2011	2:31:22 PM	H2 valve opened
8/17/2011	2:31:22 PM	Bubbler valve opened
8/17/2011	2:31:22 PM	Helium MFC set to  0.000000
8/17/2011	2:31:22 PM	H2 MFC set to  500.000000
8/17/2011	2:31:22 PM	BCl3 MFC set to  0.000000
8/17/2011	2:31:22 PM	PHl3 MFC set to  0.000000
8/17/2011	2:31:22 PM	SiCl4 MFC set to  0.000000
8/17/2011	2:31:22 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	2:31:22 PM	Tube furnace set to 850
8/17/2011	2:33:22 PM	H2 valve closed
8/17/2011	2:33:22 PM	BCl3 valve closed
8/17/2011	2:33:22 PM	PH3 valve closed
8/17/2011	2:33:22 PM	SiCl4 pre valve closed
8/17/2011	2:33:22 PM	SiCl4 post valve closed
8/17/2011	2:33:22 PM	Main Vac valve closed
8/17/2011	2:33:22 PM	Bypass valve closed
8/17/2011	2:33:22 PM	Helium valve opened
8/17/2011	2:33:22 PM	Bubbler valve opened
8/17/2011	2:33:22 PM	Helium MFC set to  500.000000
8/17/2011	2:33:22 PM	H2 MFC set to  0.000000
8/17/2011	2:33:22 PM	BCl3 MFC set to  0.000000
8/17/2011	2:33:22 PM	PHl3 MFC set to  0.000000
8/17/2011	2:33:22 PM	SiCl4 MFC set to  0.000000
8/17/2011	2:33:22 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	2:33:23 PM	Tube furnace set to 800
8/17/2011	2:35:23 PM	H2 valve closed
8/17/2011	2:35:23 PM	BCl3 valve closed
8/17/2011	2:35:23 PM	PH3 valve closed
8/17/2011	2:35:23 PM	SiCl4 pre valve closed
8/17/2011	2:35:23 PM	SiCl4 post valve closed
8/17/2011	2:35:23 PM	Main Vac valve closed
8/17/2011	2:35:23 PM	Bypass valve closed
8/17/2011	2:35:23 PM	Helium valve opened
8/17/2011	2:35:23 PM	Bubbler valve opened
8/17/2011	2:35:23 PM	Helium MFC set to  500.000000
8/17/2011	2:35:23 PM	H2 MFC set to  0.000000
8/17/2011	2:35:23 PM	BCl3 MFC set to  0.000000
8/17/2011	2:35:23 PM	PHl3 MFC set to  0.000000
8/17/2011	2:35:23 PM	SiCl4 MFC set to  0.000000
8/17/2011	2:35:23 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	2:35:23 PM	Tube furnace set to 750
8/17/2011	2:37:23 PM	H2 valve closed
8/17/2011	2:37:23 PM	BCl3 valve closed
8/17/2011	2:37:23 PM	PH3 valve closed
8/17/2011	2:37:23 PM	SiCl4 pre valve closed
8/17/2011	2:37:23 PM	SiCl4 post valve closed
8/17/2011	2:37:23 PM	Main Vac valve closed
8/17/2011	2:37:23 PM	Bypass valve closed
8/17/2011	2:37:23 PM	Helium valve opened
8/17/2011	2:37:23 PM	Bubbler valve opened
8/17/2011	2:37:23 PM	Helium MFC set to  500.000000
8/17/2011	2:37:23 PM	H2 MFC set to  0.000000
8/17/2011	2:37:23 PM	BCl3 MFC set to  0.000000
8/17/2011	2:37:23 PM	PHl3 MFC set to  0.000000
8/17/2011	2:37:23 PM	SiCl4 MFC set to  0.000000
8/17/2011	2:37:23 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	2:37:23 PM	Tube furnace set to 0
8/17/2011	2:57:23 PM	Helium valve closed
8/17/2011	2:57:23 PM	H2 valve closed
8/17/2011	2:57:23 PM	BCl3 valve closed
8/17/2011	2:57:23 PM	PH3 valve closed
8/17/2011	2:57:23 PM	SiCl4 pre valve closed
8/17/2011	2:57:23 PM	SiCl4 post valve closed
8/17/2011	2:57:23 PM	Main Vac valve closed
8/17/2011	2:57:23 PM	Bypass valve closed
8/17/2011	2:57:23 PM	Bubbler valve closed
8/17/2011	2:57:23 PM	Helium MFC set to  0.000000
8/17/2011	2:57:23 PM	H2 MFC set to  0.000000
8/17/2011	2:57:23 PM	BCl3 MFC set to  0.000000
8/17/2011	2:57:23 PM	PHl3 MFC set to  0.000000
8/17/2011	2:57:23 PM	SiCl4 MFC set to  0.000000
8/17/2011	2:57:23 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	2:57:23 PM	Tube furnace set to 0
8/17/2011	2:57:24 PM	Run finished at 2:57 PM
8/17/2011	3:06:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	3:06:44 PM	Recipe started at 3:06 PM
8/17/2011	3:06:44 PM	Helium valve closed
8/17/2011	3:06:44 PM	H2 valve closed
8/17/2011	3:06:44 PM	BCl3 valve closed
8/17/2011	3:06:44 PM	PH3 valve closed
8/17/2011	3:06:44 PM	SiCl4 pre valve closed
8/17/2011	3:06:44 PM	SiCl4 post valve closed
8/17/2011	3:06:44 PM	Main Vac valve closed
8/17/2011	3:06:44 PM	Bypass valve closed
8/17/2011	3:06:44 PM	Bubbler valve closed
8/17/2011	3:06:44 PM	Helium MFC set to  0.000000
8/17/2011	3:06:44 PM	H2 MFC set to  0.000000
8/17/2011	3:06:44 PM	BCl3 MFC set to  0.000000
8/17/2011	3:06:44 PM	PHl3 MFC set to  0.000000
8/17/2011	3:06:44 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:06:44 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:06:45 PM	Tube furnace set to 0
8/17/2011	3:06:48 PM	H2 valve closed
8/17/2011	3:06:48 PM	BCl3 valve closed
8/17/2011	3:06:48 PM	PH3 valve closed
8/17/2011	3:06:48 PM	SiCl4 pre valve closed
8/17/2011	3:06:48 PM	SiCl4 post valve closed
8/17/2011	3:06:48 PM	Main Vac valve closed
8/17/2011	3:06:48 PM	Bypass valve closed
8/17/2011	3:06:48 PM	Bubbler valve closed
8/17/2011	3:06:48 PM	Helium valve opened
8/17/2011	3:06:48 PM	Helium MFC set to  500.000000
8/17/2011	3:06:48 PM	H2 MFC set to  0.000000
8/17/2011	3:06:48 PM	BCl3 MFC set to  0.000000
8/17/2011	3:06:48 PM	PHl3 MFC set to  0.000000
8/17/2011	3:06:48 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:06:48 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:06:48 PM	Tube furnace set to 0
8/17/2011	3:06:50 PM	Helium valve closed
8/17/2011	3:06:50 PM	H2 valve closed
8/17/2011	3:06:50 PM	BCl3 valve closed
8/17/2011	3:06:50 PM	PH3 valve closed
8/17/2011	3:06:50 PM	SiCl4 pre valve closed
8/17/2011	3:06:50 PM	SiCl4 post valve closed
8/17/2011	3:06:50 PM	Main Vac valve closed
8/17/2011	3:06:50 PM	Bypass valve closed
8/17/2011	3:06:50 PM	Bubbler valve closed
8/17/2011	3:06:50 PM	Helium MFC set to  0.000000
8/17/2011	3:06:50 PM	H2 MFC set to  0.000000
8/17/2011	3:06:50 PM	BCl3 MFC set to  0.000000
8/17/2011	3:06:50 PM	PHl3 MFC set to  0.000000
8/17/2011	3:06:50 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:06:50 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:06:50 PM	Tube furnace set to 0
8/17/2011	3:06:51 PM	Run finished at 3:06 PM
8/17/2011	3:06:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	3:10:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2011	3:10:15 PM	Recipe started at 3:10 PM
8/17/2011	3:10:15 PM	Helium valve closed
8/17/2011	3:10:15 PM	H2 valve closed
8/17/2011	3:10:15 PM	BCl3 valve closed
8/17/2011	3:10:15 PM	PH3 valve closed
8/17/2011	3:10:15 PM	SiCl4 pre valve closed
8/17/2011	3:10:15 PM	SiCl4 post valve closed
8/17/2011	3:10:15 PM	Main Vac valve closed
8/17/2011	3:10:15 PM	Bubbler valve closed
8/17/2011	3:10:15 PM	Bypass valve opened
8/17/2011	3:10:15 PM	Helium MFC set to  0.000000
8/17/2011	3:10:15 PM	H2 MFC set to  0.000000
8/17/2011	3:10:15 PM	BCl3 MFC set to  0.000000
8/17/2011	3:10:15 PM	PHl3 MFC set to  0.000000
8/17/2011	3:10:15 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:10:15 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:10:15 PM	Tube furnace set to 0
8/17/2011	3:11:20 PM	Helium valve closed
8/17/2011	3:11:20 PM	H2 valve closed
8/17/2011	3:11:20 PM	BCl3 valve closed
8/17/2011	3:11:20 PM	PH3 valve closed
8/17/2011	3:11:20 PM	SiCl4 pre valve closed
8/17/2011	3:11:20 PM	SiCl4 post valve closed
8/17/2011	3:11:20 PM	Main Vac valve closed
8/17/2011	3:11:20 PM	Bubbler valve closed
8/17/2011	3:11:20 PM	Bypass valve opened
8/17/2011	3:11:20 PM	Helium MFC set to  0.000000
8/17/2011	3:11:20 PM	H2 MFC set to  0.000000
8/17/2011	3:11:20 PM	BCl3 MFC set to  0.000000
8/17/2011	3:11:20 PM	PHl3 MFC set to  0.000000
8/17/2011	3:11:20 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:11:20 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:11:20 PM	Tube furnace set to 0
8/17/2011	3:12:20 PM	Helium valve closed
8/17/2011	3:12:20 PM	H2 valve closed
8/17/2011	3:12:20 PM	BCl3 valve closed
8/17/2011	3:12:20 PM	PH3 valve closed
8/17/2011	3:12:20 PM	SiCl4 pre valve closed
8/17/2011	3:12:20 PM	SiCl4 post valve closed
8/17/2011	3:12:20 PM	Bypass valve closed
8/17/2011	3:12:20 PM	Bubbler valve closed
8/17/2011	3:12:20 PM	Main Vac valve opened
8/17/2011	3:12:20 PM	Helium MFC set to  0.000000
8/17/2011	3:12:20 PM	H2 MFC set to  0.000000
8/17/2011	3:12:20 PM	BCl3 MFC set to  0.000000
8/17/2011	3:12:20 PM	PHl3 MFC set to  0.000000
8/17/2011	3:12:20 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:12:20 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:12:20 PM	Tube furnace set to 0
8/17/2011	3:12:21 PM	Run finished at 3:12 PM
8/17/2011	3:12:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2011	3:55:00 PM	Main Vac valve closed
8/17/2011	3:55:08 PM	Main Vac valve opened
8/17/2011	3:55:22 PM	Recipe started at 3:55 PM
8/17/2011	3:55:22 PM	Helium valve closed
8/17/2011	3:55:22 PM	H2 valve closed
8/17/2011	3:55:22 PM	BCl3 valve closed
8/17/2011	3:55:22 PM	PH3 valve closed
8/17/2011	3:55:22 PM	SiCl4 pre valve closed
8/17/2011	3:55:22 PM	SiCl4 post valve closed
8/17/2011	3:55:22 PM	Bypass valve closed
8/17/2011	3:55:22 PM	Bubbler valve closed
8/17/2011	3:55:22 PM	Main Vac valve opened
8/17/2011	3:55:22 PM	Helium MFC set to  0.000000
8/17/2011	3:55:22 PM	H2 MFC set to  0.000000
8/17/2011	3:55:22 PM	BCl3 MFC set to  0.000000
8/17/2011	3:55:22 PM	PHl3 MFC set to  0.000000
8/17/2011	3:55:22 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:55:22 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:55:22 PM	Tube furnace set to 0
8/17/2011	3:55:26 PM	H2 valve closed
8/17/2011	3:55:26 PM	BCl3 valve closed
8/17/2011	3:55:26 PM	PH3 valve closed
8/17/2011	3:55:26 PM	SiCl4 pre valve closed
8/17/2011	3:55:26 PM	SiCl4 post valve closed
8/17/2011	3:55:26 PM	Bypass valve closed
8/17/2011	3:55:26 PM	Bubbler valve closed
8/17/2011	3:55:26 PM	Helium valve opened
8/17/2011	3:55:26 PM	Main Vac valve opened
8/17/2011	3:55:26 PM	Helium MFC set to  20.000000
8/17/2011	3:55:26 PM	H2 MFC set to  0.000000
8/17/2011	3:55:26 PM	BCl3 MFC set to  0.000000
8/17/2011	3:55:26 PM	PHl3 MFC set to  0.000000
8/17/2011	3:55:26 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:55:26 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:55:27 PM	Tube furnace set to 0
8/17/2011	3:55:28 PM	Helium valve closed
8/17/2011	3:55:28 PM	H2 valve closed
8/17/2011	3:55:28 PM	BCl3 valve closed
8/17/2011	3:55:28 PM	PH3 valve closed
8/17/2011	3:55:28 PM	SiCl4 pre valve closed
8/17/2011	3:55:28 PM	SiCl4 post valve closed
8/17/2011	3:55:28 PM	Bypass valve closed
8/17/2011	3:55:28 PM	Bubbler valve closed
8/17/2011	3:55:28 PM	Main Vac valve opened
8/17/2011	3:55:28 PM	Helium MFC set to  0.000000
8/17/2011	3:55:28 PM	H2 MFC set to  0.000000
8/17/2011	3:55:28 PM	BCl3 MFC set to  0.000000
8/17/2011	3:55:28 PM	PHl3 MFC set to  0.000000
8/17/2011	3:55:28 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:55:28 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:55:28 PM	Tube furnace set to 0
8/17/2011	3:55:29 PM	H2 valve closed
8/17/2011	3:55:29 PM	BCl3 valve closed
8/17/2011	3:55:29 PM	PH3 valve closed
8/17/2011	3:55:29 PM	SiCl4 pre valve closed
8/17/2011	3:55:29 PM	SiCl4 post valve closed
8/17/2011	3:55:29 PM	Bypass valve closed
8/17/2011	3:55:29 PM	Bubbler valve closed
8/17/2011	3:55:29 PM	Helium valve opened
8/17/2011	3:55:29 PM	Main Vac valve opened
8/17/2011	3:55:29 PM	Helium MFC set to  20.000000
8/17/2011	3:55:29 PM	H2 MFC set to  0.000000
8/17/2011	3:55:29 PM	BCl3 MFC set to  0.000000
8/17/2011	3:55:29 PM	PHl3 MFC set to  0.000000
8/17/2011	3:55:29 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:55:29 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:55:29 PM	Tube furnace set to 0
8/17/2011	3:55:30 PM	Helium valve closed
8/17/2011	3:55:30 PM	H2 valve closed
8/17/2011	3:55:30 PM	BCl3 valve closed
8/17/2011	3:55:30 PM	PH3 valve closed
8/17/2011	3:55:30 PM	SiCl4 pre valve closed
8/17/2011	3:55:30 PM	SiCl4 post valve closed
8/17/2011	3:55:30 PM	Bypass valve closed
8/17/2011	3:55:30 PM	Bubbler valve closed
8/17/2011	3:55:30 PM	Main Vac valve opened
8/17/2011	3:55:30 PM	Helium MFC set to  0.000000
8/17/2011	3:55:30 PM	H2 MFC set to  0.000000
8/17/2011	3:55:30 PM	BCl3 MFC set to  0.000000
8/17/2011	3:55:30 PM	PHl3 MFC set to  0.000000
8/17/2011	3:55:30 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:55:30 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:55:30 PM	Tube furnace set to 0
8/17/2011	3:55:31 PM	H2 valve closed
8/17/2011	3:55:31 PM	BCl3 valve closed
8/17/2011	3:55:31 PM	PH3 valve closed
8/17/2011	3:55:31 PM	SiCl4 pre valve closed
8/17/2011	3:55:31 PM	SiCl4 post valve closed
8/17/2011	3:55:31 PM	Bypass valve closed
8/17/2011	3:55:31 PM	Bubbler valve closed
8/17/2011	3:55:31 PM	Helium valve opened
8/17/2011	3:55:31 PM	Main Vac valve opened
8/17/2011	3:55:31 PM	Helium MFC set to  20.000000
8/17/2011	3:55:31 PM	H2 MFC set to  0.000000
8/17/2011	3:55:31 PM	BCl3 MFC set to  0.000000
8/17/2011	3:55:31 PM	PHl3 MFC set to  0.000000
8/17/2011	3:55:31 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:55:31 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:55:31 PM	Tube furnace set to 0
8/17/2011	3:55:32 PM	Helium valve closed
8/17/2011	3:55:32 PM	H2 valve closed
8/17/2011	3:55:32 PM	BCl3 valve closed
8/17/2011	3:55:32 PM	PH3 valve closed
8/17/2011	3:55:32 PM	SiCl4 pre valve closed
8/17/2011	3:55:32 PM	SiCl4 post valve closed
8/17/2011	3:55:32 PM	Bypass valve closed
8/17/2011	3:55:32 PM	Bubbler valve closed
8/17/2011	3:55:32 PM	Main Vac valve opened
8/17/2011	3:55:32 PM	Helium MFC set to  0.000000
8/17/2011	3:55:32 PM	H2 MFC set to  0.000000
8/17/2011	3:55:32 PM	BCl3 MFC set to  0.000000
8/17/2011	3:55:32 PM	PHl3 MFC set to  0.000000
8/17/2011	3:55:32 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:55:32 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:55:32 PM	Tube furnace set to 0
8/17/2011	3:56:02 PM	H2 valve closed
8/17/2011	3:56:02 PM	BCl3 valve closed
8/17/2011	3:56:02 PM	PH3 valve closed
8/17/2011	3:56:02 PM	SiCl4 pre valve closed
8/17/2011	3:56:02 PM	SiCl4 post valve closed
8/17/2011	3:56:02 PM	Bypass valve closed
8/17/2011	3:56:02 PM	Bubbler valve closed
8/17/2011	3:56:02 PM	Helium valve opened
8/17/2011	3:56:02 PM	Main Vac valve opened
8/17/2011	3:56:02 PM	Helium MFC set to  20.000000
8/17/2011	3:56:02 PM	H2 MFC set to  0.000000
8/17/2011	3:56:02 PM	BCl3 MFC set to  0.000000
8/17/2011	3:56:02 PM	PHl3 MFC set to  0.000000
8/17/2011	3:56:02 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:56:02 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:56:02 PM	Tube furnace set to 0
8/17/2011	3:56:32 PM	Helium valve closed
8/17/2011	3:56:32 PM	H2 valve closed
8/17/2011	3:56:32 PM	BCl3 valve closed
8/17/2011	3:56:32 PM	PH3 valve closed
8/17/2011	3:56:32 PM	SiCl4 pre valve closed
8/17/2011	3:56:32 PM	SiCl4 post valve closed
8/17/2011	3:56:32 PM	Bypass valve closed
8/17/2011	3:56:32 PM	Bubbler valve closed
8/17/2011	3:56:32 PM	Main Vac valve opened
8/17/2011	3:56:32 PM	Helium MFC set to  0.000000
8/17/2011	3:56:32 PM	H2 MFC set to  0.000000
8/17/2011	3:56:32 PM	BCl3 MFC set to  0.000000
8/17/2011	3:56:32 PM	PHl3 MFC set to  0.000000
8/17/2011	3:56:32 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:56:32 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:56:32 PM	Tube furnace set to 0
8/17/2011	3:57:02 PM	H2 valve closed
8/17/2011	3:57:02 PM	BCl3 valve closed
8/17/2011	3:57:02 PM	PH3 valve closed
8/17/2011	3:57:02 PM	SiCl4 pre valve closed
8/17/2011	3:57:02 PM	SiCl4 post valve closed
8/17/2011	3:57:02 PM	Bypass valve closed
8/17/2011	3:57:02 PM	Bubbler valve closed
8/17/2011	3:57:02 PM	Helium valve opened
8/17/2011	3:57:02 PM	Main Vac valve opened
8/17/2011	3:57:02 PM	Helium MFC set to  20.000000
8/17/2011	3:57:02 PM	H2 MFC set to  0.000000
8/17/2011	3:57:02 PM	BCl3 MFC set to  0.000000
8/17/2011	3:57:02 PM	PHl3 MFC set to  0.000000
8/17/2011	3:57:02 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:57:02 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:57:03 PM	Tube furnace set to 0
8/17/2011	3:57:33 PM	Helium valve closed
8/17/2011	3:57:33 PM	H2 valve closed
8/17/2011	3:57:33 PM	BCl3 valve closed
8/17/2011	3:57:33 PM	PH3 valve closed
8/17/2011	3:57:33 PM	SiCl4 pre valve closed
8/17/2011	3:57:33 PM	SiCl4 post valve closed
8/17/2011	3:57:33 PM	Bypass valve closed
8/17/2011	3:57:33 PM	Bubbler valve closed
8/17/2011	3:57:33 PM	Main Vac valve opened
8/17/2011	3:57:33 PM	Helium MFC set to  0.000000
8/17/2011	3:57:33 PM	H2 MFC set to  0.000000
8/17/2011	3:57:33 PM	BCl3 MFC set to  0.000000
8/17/2011	3:57:33 PM	PHl3 MFC set to  0.000000
8/17/2011	3:57:33 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:57:33 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:57:33 PM	Tube furnace set to 0
8/17/2011	3:58:03 PM	H2 valve closed
8/17/2011	3:58:03 PM	BCl3 valve closed
8/17/2011	3:58:03 PM	PH3 valve closed
8/17/2011	3:58:03 PM	SiCl4 pre valve closed
8/17/2011	3:58:03 PM	SiCl4 post valve closed
8/17/2011	3:58:03 PM	Bypass valve closed
8/17/2011	3:58:03 PM	Bubbler valve closed
8/17/2011	3:58:03 PM	Helium valve opened
8/17/2011	3:58:03 PM	Main Vac valve opened
8/17/2011	3:58:03 PM	Helium MFC set to  20.000000
8/17/2011	3:58:03 PM	H2 MFC set to  0.000000
8/17/2011	3:58:03 PM	BCl3 MFC set to  0.000000
8/17/2011	3:58:03 PM	PHl3 MFC set to  0.000000
8/17/2011	3:58:03 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:58:03 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:58:03 PM	Tube furnace set to 0
8/17/2011	3:58:33 PM	Helium valve closed
8/17/2011	3:58:33 PM	H2 valve closed
8/17/2011	3:58:33 PM	BCl3 valve closed
8/17/2011	3:58:33 PM	PH3 valve closed
8/17/2011	3:58:33 PM	SiCl4 pre valve closed
8/17/2011	3:58:33 PM	SiCl4 post valve closed
8/17/2011	3:58:33 PM	Bypass valve closed
8/17/2011	3:58:33 PM	Bubbler valve closed
8/17/2011	3:58:33 PM	Main Vac valve opened
8/17/2011	3:58:33 PM	Helium MFC set to  0.000000
8/17/2011	3:58:33 PM	H2 MFC set to  0.000000
8/17/2011	3:58:33 PM	BCl3 MFC set to  0.000000
8/17/2011	3:58:33 PM	PHl3 MFC set to  0.000000
8/17/2011	3:58:33 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:58:33 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:58:33 PM	Tube furnace set to 0
8/17/2011	3:59:03 PM	H2 valve closed
8/17/2011	3:59:03 PM	BCl3 valve closed
8/17/2011	3:59:03 PM	PH3 valve closed
8/17/2011	3:59:03 PM	SiCl4 pre valve closed
8/17/2011	3:59:03 PM	SiCl4 post valve closed
8/17/2011	3:59:03 PM	Bypass valve closed
8/17/2011	3:59:03 PM	Bubbler valve closed
8/17/2011	3:59:03 PM	Helium valve opened
8/17/2011	3:59:03 PM	Main Vac valve opened
8/17/2011	3:59:03 PM	Helium MFC set to  20.000000
8/17/2011	3:59:03 PM	H2 MFC set to  0.000000
8/17/2011	3:59:03 PM	BCl3 MFC set to  0.000000
8/17/2011	3:59:03 PM	PHl3 MFC set to  0.000000
8/17/2011	3:59:03 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:59:03 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:59:03 PM	Tube furnace set to 0
8/17/2011	3:59:33 PM	Helium valve closed
8/17/2011	3:59:33 PM	H2 valve closed
8/17/2011	3:59:33 PM	BCl3 valve closed
8/17/2011	3:59:33 PM	PH3 valve closed
8/17/2011	3:59:33 PM	SiCl4 pre valve closed
8/17/2011	3:59:33 PM	SiCl4 post valve closed
8/17/2011	3:59:33 PM	Bypass valve closed
8/17/2011	3:59:33 PM	Bubbler valve closed
8/17/2011	3:59:33 PM	Main Vac valve opened
8/17/2011	3:59:33 PM	Helium MFC set to  0.000000
8/17/2011	3:59:33 PM	H2 MFC set to  0.000000
8/17/2011	3:59:33 PM	BCl3 MFC set to  0.000000
8/17/2011	3:59:33 PM	PHl3 MFC set to  0.000000
8/17/2011	3:59:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	3:59:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	3:59:34 PM	Tube furnace set to 0
8/17/2011	4:00:04 PM	H2 valve closed
8/17/2011	4:00:04 PM	BCl3 valve closed
8/17/2011	4:00:04 PM	PH3 valve closed
8/17/2011	4:00:04 PM	SiCl4 pre valve closed
8/17/2011	4:00:04 PM	SiCl4 post valve closed
8/17/2011	4:00:04 PM	Bypass valve closed
8/17/2011	4:00:04 PM	Bubbler valve closed
8/17/2011	4:00:04 PM	Helium valve opened
8/17/2011	4:00:04 PM	Main Vac valve opened
8/17/2011	4:00:04 PM	Helium MFC set to  20.000000
8/17/2011	4:00:04 PM	H2 MFC set to  0.000000
8/17/2011	4:00:04 PM	BCl3 MFC set to  0.000000
8/17/2011	4:00:04 PM	PHl3 MFC set to  0.000000
8/17/2011	4:00:04 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:00:04 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:00:04 PM	Tube furnace set to 0
8/17/2011	4:00:34 PM	Helium valve closed
8/17/2011	4:00:34 PM	H2 valve closed
8/17/2011	4:00:34 PM	BCl3 valve closed
8/17/2011	4:00:34 PM	PH3 valve closed
8/17/2011	4:00:34 PM	SiCl4 pre valve closed
8/17/2011	4:00:34 PM	SiCl4 post valve closed
8/17/2011	4:00:34 PM	Bypass valve closed
8/17/2011	4:00:34 PM	Bubbler valve closed
8/17/2011	4:00:34 PM	Main Vac valve opened
8/17/2011	4:00:34 PM	Helium MFC set to  0.000000
8/17/2011	4:00:34 PM	H2 MFC set to  0.000000
8/17/2011	4:00:34 PM	BCl3 MFC set to  0.000000
8/17/2011	4:00:34 PM	PHl3 MFC set to  0.000000
8/17/2011	4:00:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:00:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:00:34 PM	Tube furnace set to 0
8/17/2011	4:01:04 PM	H2 valve closed
8/17/2011	4:01:04 PM	BCl3 valve closed
8/17/2011	4:01:04 PM	PH3 valve closed
8/17/2011	4:01:04 PM	SiCl4 pre valve closed
8/17/2011	4:01:04 PM	SiCl4 post valve closed
8/17/2011	4:01:04 PM	Bypass valve closed
8/17/2011	4:01:04 PM	Bubbler valve closed
8/17/2011	4:01:04 PM	Helium valve opened
8/17/2011	4:01:04 PM	Main Vac valve opened
8/17/2011	4:01:04 PM	Helium MFC set to  20.000000
8/17/2011	4:01:04 PM	H2 MFC set to  0.000000
8/17/2011	4:01:04 PM	BCl3 MFC set to  0.000000
8/17/2011	4:01:04 PM	PHl3 MFC set to  0.000000
8/17/2011	4:01:04 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:01:04 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:01:04 PM	Tube furnace set to 0
8/17/2011	4:01:34 PM	Helium valve closed
8/17/2011	4:01:34 PM	H2 valve closed
8/17/2011	4:01:34 PM	BCl3 valve closed
8/17/2011	4:01:34 PM	PH3 valve closed
8/17/2011	4:01:34 PM	SiCl4 pre valve closed
8/17/2011	4:01:34 PM	SiCl4 post valve closed
8/17/2011	4:01:34 PM	Bypass valve closed
8/17/2011	4:01:34 PM	Bubbler valve closed
8/17/2011	4:01:34 PM	Main Vac valve opened
8/17/2011	4:01:34 PM	Helium MFC set to  0.000000
8/17/2011	4:01:34 PM	H2 MFC set to  0.000000
8/17/2011	4:01:34 PM	BCl3 MFC set to  0.000000
8/17/2011	4:01:34 PM	PHl3 MFC set to  0.000000
8/17/2011	4:01:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:01:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:01:35 PM	Tube furnace set to 200
8/17/2011	4:02:05 PM	H2 valve closed
8/17/2011	4:02:05 PM	BCl3 valve closed
8/17/2011	4:02:05 PM	PH3 valve closed
8/17/2011	4:02:05 PM	SiCl4 pre valve closed
8/17/2011	4:02:05 PM	SiCl4 post valve closed
8/17/2011	4:02:05 PM	Bypass valve closed
8/17/2011	4:02:05 PM	Bubbler valve closed
8/17/2011	4:02:05 PM	Helium valve opened
8/17/2011	4:02:05 PM	Main Vac valve opened
8/17/2011	4:02:05 PM	Helium MFC set to  20.000000
8/17/2011	4:02:05 PM	H2 MFC set to  0.000000
8/17/2011	4:02:05 PM	BCl3 MFC set to  0.000000
8/17/2011	4:02:05 PM	PHl3 MFC set to  0.000000
8/17/2011	4:02:05 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:02:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:02:05 PM	Tube furnace set to 200
8/17/2011	4:02:35 PM	Helium valve closed
8/17/2011	4:02:35 PM	H2 valve closed
8/17/2011	4:02:35 PM	BCl3 valve closed
8/17/2011	4:02:35 PM	PH3 valve closed
8/17/2011	4:02:35 PM	SiCl4 pre valve closed
8/17/2011	4:02:35 PM	SiCl4 post valve closed
8/17/2011	4:02:35 PM	Bypass valve closed
8/17/2011	4:02:35 PM	Bubbler valve closed
8/17/2011	4:02:35 PM	Main Vac valve opened
8/17/2011	4:02:35 PM	Helium MFC set to  0.000000
8/17/2011	4:02:35 PM	H2 MFC set to  0.000000
8/17/2011	4:02:35 PM	BCl3 MFC set to  0.000000
8/17/2011	4:02:35 PM	PHl3 MFC set to  0.000000
8/17/2011	4:02:35 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:02:35 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:02:35 PM	Tube furnace set to 200
8/17/2011	4:03:05 PM	H2 valve closed
8/17/2011	4:03:05 PM	BCl3 valve closed
8/17/2011	4:03:05 PM	PH3 valve closed
8/17/2011	4:03:05 PM	SiCl4 pre valve closed
8/17/2011	4:03:05 PM	SiCl4 post valve closed
8/17/2011	4:03:05 PM	Bypass valve closed
8/17/2011	4:03:05 PM	Bubbler valve closed
8/17/2011	4:03:05 PM	Helium valve opened
8/17/2011	4:03:05 PM	Main Vac valve opened
8/17/2011	4:03:05 PM	Helium MFC set to  20.000000
8/17/2011	4:03:05 PM	H2 MFC set to  0.000000
8/17/2011	4:03:05 PM	BCl3 MFC set to  0.000000
8/17/2011	4:03:05 PM	PHl3 MFC set to  0.000000
8/17/2011	4:03:05 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:03:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:03:05 PM	Tube furnace set to 200
8/17/2011	4:03:35 PM	Helium valve closed
8/17/2011	4:03:35 PM	H2 valve closed
8/17/2011	4:03:35 PM	BCl3 valve closed
8/17/2011	4:03:35 PM	PH3 valve closed
8/17/2011	4:03:35 PM	SiCl4 pre valve closed
8/17/2011	4:03:35 PM	SiCl4 post valve closed
8/17/2011	4:03:35 PM	Bypass valve closed
8/17/2011	4:03:35 PM	Bubbler valve closed
8/17/2011	4:03:35 PM	Main Vac valve opened
8/17/2011	4:03:35 PM	Helium MFC set to  0.000000
8/17/2011	4:03:35 PM	H2 MFC set to  0.000000
8/17/2011	4:03:35 PM	BCl3 MFC set to  0.000000
8/17/2011	4:03:35 PM	PHl3 MFC set to  0.000000
8/17/2011	4:03:35 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:03:35 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:03:35 PM	Tube furnace set to 200
8/17/2011	4:04:05 PM	H2 valve closed
8/17/2011	4:04:05 PM	BCl3 valve closed
8/17/2011	4:04:05 PM	PH3 valve closed
8/17/2011	4:04:05 PM	SiCl4 pre valve closed
8/17/2011	4:04:05 PM	SiCl4 post valve closed
8/17/2011	4:04:05 PM	Bypass valve closed
8/17/2011	4:04:05 PM	Bubbler valve closed
8/17/2011	4:04:05 PM	Helium valve opened
8/17/2011	4:04:05 PM	Main Vac valve opened
8/17/2011	4:04:05 PM	Helium MFC set to  20.000000
8/17/2011	4:04:05 PM	H2 MFC set to  0.000000
8/17/2011	4:04:05 PM	BCl3 MFC set to  0.000000
8/17/2011	4:04:05 PM	PHl3 MFC set to  0.000000
8/17/2011	4:04:05 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:04:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:04:06 PM	Tube furnace set to 200
8/17/2011	4:04:36 PM	Helium valve closed
8/17/2011	4:04:36 PM	H2 valve closed
8/17/2011	4:04:36 PM	BCl3 valve closed
8/17/2011	4:04:36 PM	PH3 valve closed
8/17/2011	4:04:36 PM	SiCl4 pre valve closed
8/17/2011	4:04:36 PM	SiCl4 post valve closed
8/17/2011	4:04:36 PM	Bypass valve closed
8/17/2011	4:04:36 PM	Bubbler valve closed
8/17/2011	4:04:36 PM	Main Vac valve opened
8/17/2011	4:04:36 PM	Helium MFC set to  0.000000
8/17/2011	4:04:36 PM	H2 MFC set to  0.000000
8/17/2011	4:04:36 PM	BCl3 MFC set to  0.000000
8/17/2011	4:04:36 PM	PHl3 MFC set to  0.000000
8/17/2011	4:04:36 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:04:36 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:04:36 PM	Tube furnace set to 200
8/17/2011	4:05:06 PM	H2 valve closed
8/17/2011	4:05:06 PM	BCl3 valve closed
8/17/2011	4:05:06 PM	PH3 valve closed
8/17/2011	4:05:06 PM	SiCl4 pre valve closed
8/17/2011	4:05:06 PM	SiCl4 post valve closed
8/17/2011	4:05:06 PM	Bypass valve closed
8/17/2011	4:05:06 PM	Bubbler valve closed
8/17/2011	4:05:06 PM	Helium valve opened
8/17/2011	4:05:06 PM	Main Vac valve opened
8/17/2011	4:05:06 PM	Helium MFC set to  20.000000
8/17/2011	4:05:06 PM	H2 MFC set to  0.000000
8/17/2011	4:05:06 PM	BCl3 MFC set to  0.000000
8/17/2011	4:05:06 PM	PHl3 MFC set to  0.000000
8/17/2011	4:05:06 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:05:06 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:05:06 PM	Tube furnace set to 200
8/17/2011	4:05:36 PM	Helium valve closed
8/17/2011	4:05:36 PM	H2 valve closed
8/17/2011	4:05:36 PM	BCl3 valve closed
8/17/2011	4:05:36 PM	PH3 valve closed
8/17/2011	4:05:36 PM	SiCl4 pre valve closed
8/17/2011	4:05:36 PM	SiCl4 post valve closed
8/17/2011	4:05:36 PM	Bypass valve closed
8/17/2011	4:05:36 PM	Bubbler valve closed
8/17/2011	4:05:36 PM	Main Vac valve opened
8/17/2011	4:05:36 PM	Helium MFC set to  0.000000
8/17/2011	4:05:36 PM	H2 MFC set to  0.000000
8/17/2011	4:05:36 PM	BCl3 MFC set to  0.000000
8/17/2011	4:05:36 PM	PHl3 MFC set to  0.000000
8/17/2011	4:05:36 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:05:36 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:05:36 PM	Tube furnace set to 200
8/17/2011	4:06:06 PM	H2 valve closed
8/17/2011	4:06:06 PM	BCl3 valve closed
8/17/2011	4:06:06 PM	PH3 valve closed
8/17/2011	4:06:06 PM	SiCl4 pre valve closed
8/17/2011	4:06:06 PM	SiCl4 post valve closed
8/17/2011	4:06:06 PM	Bypass valve closed
8/17/2011	4:06:06 PM	Bubbler valve closed
8/17/2011	4:06:06 PM	Helium valve opened
8/17/2011	4:06:06 PM	Main Vac valve opened
8/17/2011	4:06:06 PM	Helium MFC set to  20.000000
8/17/2011	4:06:06 PM	H2 MFC set to  0.000000
8/17/2011	4:06:06 PM	BCl3 MFC set to  0.000000
8/17/2011	4:06:06 PM	PHl3 MFC set to  0.000000
8/17/2011	4:06:06 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:06:06 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:06:06 PM	Tube furnace set to 200
8/17/2011	4:06:36 PM	Helium valve closed
8/17/2011	4:06:36 PM	H2 valve closed
8/17/2011	4:06:36 PM	BCl3 valve closed
8/17/2011	4:06:36 PM	PH3 valve closed
8/17/2011	4:06:37 PM	SiCl4 pre valve closed
8/17/2011	4:06:37 PM	SiCl4 post valve closed
8/17/2011	4:06:37 PM	Bypass valve closed
8/17/2011	4:06:37 PM	Bubbler valve closed
8/17/2011	4:06:37 PM	Main Vac valve opened
8/17/2011	4:06:37 PM	Helium MFC set to  0.000000
8/17/2011	4:06:37 PM	H2 MFC set to  0.000000
8/17/2011	4:06:37 PM	BCl3 MFC set to  0.000000
8/17/2011	4:06:37 PM	PHl3 MFC set to  0.000000
8/17/2011	4:06:37 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:06:37 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:06:37 PM	Tube furnace set to 200
8/17/2011	4:07:07 PM	H2 valve closed
8/17/2011	4:07:07 PM	BCl3 valve closed
8/17/2011	4:07:07 PM	PH3 valve closed
8/17/2011	4:07:07 PM	SiCl4 pre valve closed
8/17/2011	4:07:07 PM	SiCl4 post valve closed
8/17/2011	4:07:07 PM	Bypass valve closed
8/17/2011	4:07:07 PM	Bubbler valve closed
8/17/2011	4:07:07 PM	Helium valve opened
8/17/2011	4:07:07 PM	Main Vac valve opened
8/17/2011	4:07:07 PM	Helium MFC set to  20.000000
8/17/2011	4:07:07 PM	H2 MFC set to  0.000000
8/17/2011	4:07:07 PM	BCl3 MFC set to  0.000000
8/17/2011	4:07:07 PM	PHl3 MFC set to  0.000000
8/17/2011	4:07:07 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:07:07 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:07:07 PM	Tube furnace set to 200
8/17/2011	4:07:37 PM	Helium valve closed
8/17/2011	4:07:37 PM	H2 valve closed
8/17/2011	4:07:37 PM	BCl3 valve closed
8/17/2011	4:07:37 PM	PH3 valve closed
8/17/2011	4:07:37 PM	SiCl4 pre valve closed
8/17/2011	4:07:37 PM	SiCl4 post valve closed
8/17/2011	4:07:37 PM	Bypass valve closed
8/17/2011	4:07:37 PM	Bubbler valve closed
8/17/2011	4:07:37 PM	Main Vac valve opened
8/17/2011	4:07:37 PM	Helium MFC set to  0.000000
8/17/2011	4:07:37 PM	H2 MFC set to  0.000000
8/17/2011	4:07:37 PM	BCl3 MFC set to  0.000000
8/17/2011	4:07:37 PM	PHl3 MFC set to  0.000000
8/17/2011	4:07:37 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:07:37 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:07:37 PM	Tube furnace set to 0
8/17/2011	4:07:38 PM	Run finished at 4:07 PM
8/17/2011	4:18:51 PM	Main Vac valve closed
8/17/2011	4:19:10 PM	Main Vac valve opened
8/17/2011	4:30:43 PM	Recipe started at 4:30 PM
8/17/2011	4:30:43 PM	Helium valve closed
8/17/2011	4:30:43 PM	H2 valve closed
8/17/2011	4:30:43 PM	BCl3 valve closed
8/17/2011	4:30:43 PM	PH3 valve closed
8/17/2011	4:30:43 PM	SiCl4 pre valve closed
8/17/2011	4:30:43 PM	SiCl4 post valve closed
8/17/2011	4:30:43 PM	Main Vac valve closed
8/17/2011	4:30:43 PM	Bypass valve closed
8/17/2011	4:30:43 PM	Bubbler valve closed
8/17/2011	4:30:43 PM	Helium MFC set to  0.000000
8/17/2011	4:30:43 PM	H2 MFC set to  0.000000
8/17/2011	4:30:43 PM	BCl3 MFC set to  0.000000
8/17/2011	4:30:43 PM	PHl3 MFC set to  0.000000
8/17/2011	4:30:43 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:30:43 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:30:43 PM	Tube furnace set to 0
8/17/2011	4:30:46 PM	Helium valve closed
8/17/2011	4:30:46 PM	BCl3 valve closed
8/17/2011	4:30:46 PM	PH3 valve closed
8/17/2011	4:30:46 PM	SiCl4 pre valve closed
8/17/2011	4:30:46 PM	SiCl4 post valve closed
8/17/2011	4:30:46 PM	Main Vac valve closed
8/17/2011	4:30:46 PM	Bypass valve closed
8/17/2011	4:30:46 PM	Bubbler valve closed
8/17/2011	4:30:46 PM	H2 valve opened
8/17/2011	4:30:46 PM	Helium MFC set to  0.000000
8/17/2011	4:30:46 PM	H2 MFC set to  500.000000
8/17/2011	4:30:46 PM	BCl3 MFC set to  0.000000
8/17/2011	4:30:46 PM	PHl3 MFC set to  0.000000
8/17/2011	4:30:46 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:30:47 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:30:47 PM	Tube furnace set to 0
8/17/2011	4:31:50 PM	Helium valve closed
8/17/2011	4:31:50 PM	BCl3 valve closed
8/17/2011	4:31:50 PM	PH3 valve closed
8/17/2011	4:31:50 PM	SiCl4 pre valve closed
8/17/2011	4:31:50 PM	SiCl4 post valve closed
8/17/2011	4:31:50 PM	Main Vac valve closed
8/17/2011	4:31:50 PM	Bypass valve closed
8/17/2011	4:31:50 PM	H2 valve opened
8/17/2011	4:31:50 PM	Bubbler valve opened
8/17/2011	4:31:50 PM	Helium MFC set to  0.000000
8/17/2011	4:31:50 PM	H2 MFC set to  500.000000
8/17/2011	4:31:50 PM	BCl3 MFC set to  0.000000
8/17/2011	4:31:50 PM	PHl3 MFC set to  0.000000
8/17/2011	4:31:50 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:31:50 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:31:50 PM	Tube furnace set to 0
8/17/2011	4:31:51 PM	Helium valve closed
8/17/2011	4:31:51 PM	BCl3 valve closed
8/17/2011	4:31:51 PM	PH3 valve closed
8/17/2011	4:31:51 PM	SiCl4 pre valve closed
8/17/2011	4:31:51 PM	SiCl4 post valve closed
8/17/2011	4:31:51 PM	Main Vac valve closed
8/17/2011	4:31:51 PM	Bypass valve closed
8/17/2011	4:31:51 PM	H2 valve opened
8/17/2011	4:31:51 PM	Bubbler valve opened
8/17/2011	4:31:51 PM	Helium MFC set to  0.000000
8/17/2011	4:31:51 PM	H2 MFC set to  500.000000
8/17/2011	4:31:51 PM	BCl3 MFC set to  0.000000
8/17/2011	4:31:51 PM	PHl3 MFC set to  0.000000
8/17/2011	4:31:51 PM	SiCl4 MFC set to  0.000000
8/17/2011	4:31:51 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:31:51 PM	Tube furnace set to 1000
8/17/2011	4:51:51 PM	Helium valve closed
8/17/2011	4:51:51 PM	BCl3 valve closed
8/17/2011	4:51:51 PM	Main Vac valve closed
8/17/2011	4:51:51 PM	Bypass valve closed
8/17/2011	4:51:51 PM	H2 valve opened
8/17/2011	4:51:51 PM	PH3 valve opened
8/17/2011	4:51:51 PM	SiCl4 pre valve opened
8/17/2011	4:51:51 PM	SiCl4 post valve opened
8/17/2011	4:51:51 PM	Bubbler valve opened
8/17/2011	4:51:51 PM	Helium MFC set to  0.000000
8/17/2011	4:51:51 PM	H2 MFC set to  500.000000
8/17/2011	4:51:51 PM	BCl3 MFC set to  0.000000
8/17/2011	4:51:51 PM	PHl3 MFC set to  1.000000
8/17/2011	4:51:51 PM	SiCl4 MFC set to  50.000000
8/17/2011	4:51:51 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	4:51:51 PM	Tube furnace set to 1000
8/17/2011	5:07:51 PM	Helium valve closed
8/17/2011	5:07:51 PM	BCl3 valve closed
8/17/2011	5:07:51 PM	PH3 valve closed
8/17/2011	5:07:51 PM	SiCl4 pre valve closed
8/17/2011	5:07:51 PM	SiCl4 post valve closed
8/17/2011	5:07:51 PM	Main Vac valve closed
8/17/2011	5:07:51 PM	Bypass valve closed
8/17/2011	5:07:51 PM	H2 valve opened
8/17/2011	5:07:51 PM	Bubbler valve opened
8/17/2011	5:07:51 PM	Helium MFC set to  0.000000
8/17/2011	5:07:51 PM	H2 MFC set to  500.000000
8/17/2011	5:07:51 PM	BCl3 MFC set to  0.000000
8/17/2011	5:07:51 PM	PHl3 MFC set to  0.000000
8/17/2011	5:07:51 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:07:51 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:07:52 PM	Tube furnace set to 950
8/17/2011	5:09:52 PM	Helium valve closed
8/17/2011	5:09:52 PM	BCl3 valve closed
8/17/2011	5:09:52 PM	PH3 valve closed
8/17/2011	5:09:52 PM	SiCl4 pre valve closed
8/17/2011	5:09:52 PM	SiCl4 post valve closed
8/17/2011	5:09:52 PM	Main Vac valve closed
8/17/2011	5:09:52 PM	Bypass valve closed
8/17/2011	5:09:52 PM	H2 valve opened
8/17/2011	5:09:52 PM	Bubbler valve opened
8/17/2011	5:09:52 PM	Helium MFC set to  0.000000
8/17/2011	5:09:52 PM	H2 MFC set to  500.000000
8/17/2011	5:09:52 PM	BCl3 MFC set to  0.000000
8/17/2011	5:09:52 PM	PHl3 MFC set to  0.000000
8/17/2011	5:09:52 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:09:52 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:09:52 PM	Tube furnace set to 900
8/17/2011	5:11:52 PM	Helium valve closed
8/17/2011	5:11:52 PM	BCl3 valve closed
8/17/2011	5:11:52 PM	PH3 valve closed
8/17/2011	5:11:52 PM	SiCl4 pre valve closed
8/17/2011	5:11:52 PM	SiCl4 post valve closed
8/17/2011	5:11:52 PM	Main Vac valve closed
8/17/2011	5:11:52 PM	Bypass valve closed
8/17/2011	5:11:52 PM	H2 valve opened
8/17/2011	5:11:52 PM	Bubbler valve opened
8/17/2011	5:11:52 PM	Helium MFC set to  0.000000
8/17/2011	5:11:52 PM	H2 MFC set to  500.000000
8/17/2011	5:11:52 PM	BCl3 MFC set to  0.000000
8/17/2011	5:11:52 PM	PHl3 MFC set to  0.000000
8/17/2011	5:11:52 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:11:52 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:11:52 PM	Tube furnace set to 850
8/17/2011	5:13:52 PM	H2 valve closed
8/17/2011	5:13:52 PM	BCl3 valve closed
8/17/2011	5:13:52 PM	PH3 valve closed
8/17/2011	5:13:52 PM	SiCl4 pre valve closed
8/17/2011	5:13:52 PM	SiCl4 post valve closed
8/17/2011	5:13:52 PM	Main Vac valve closed
8/17/2011	5:13:52 PM	Bypass valve closed
8/17/2011	5:13:52 PM	Helium valve opened
8/17/2011	5:13:52 PM	Bubbler valve opened
8/17/2011	5:13:52 PM	Helium MFC set to  500.000000
8/17/2011	5:13:52 PM	H2 MFC set to  0.000000
8/17/2011	5:13:52 PM	BCl3 MFC set to  0.000000
8/17/2011	5:13:52 PM	PHl3 MFC set to  0.000000
8/17/2011	5:13:52 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:13:52 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:13:52 PM	Tube furnace set to 800
8/17/2011	5:15:52 PM	H2 valve closed
8/17/2011	5:15:52 PM	BCl3 valve closed
8/17/2011	5:15:52 PM	PH3 valve closed
8/17/2011	5:15:52 PM	SiCl4 pre valve closed
8/17/2011	5:15:52 PM	SiCl4 post valve closed
8/17/2011	5:15:52 PM	Main Vac valve closed
8/17/2011	5:15:52 PM	Bypass valve closed
8/17/2011	5:15:52 PM	Helium valve opened
8/17/2011	5:15:52 PM	Bubbler valve opened
8/17/2011	5:15:52 PM	Helium MFC set to  500.000000
8/17/2011	5:15:52 PM	H2 MFC set to  0.000000
8/17/2011	5:15:52 PM	BCl3 MFC set to  0.000000
8/17/2011	5:15:52 PM	PHl3 MFC set to  0.000000
8/17/2011	5:15:52 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:15:52 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:15:52 PM	Tube furnace set to 750
8/17/2011	5:17:52 PM	H2 valve closed
8/17/2011	5:17:52 PM	BCl3 valve closed
8/17/2011	5:17:52 PM	PH3 valve closed
8/17/2011	5:17:52 PM	SiCl4 pre valve closed
8/17/2011	5:17:52 PM	SiCl4 post valve closed
8/17/2011	5:17:52 PM	Main Vac valve closed
8/17/2011	5:17:52 PM	Bypass valve closed
8/17/2011	5:17:52 PM	Helium valve opened
8/17/2011	5:17:52 PM	Bubbler valve opened
8/17/2011	5:17:52 PM	Helium MFC set to  500.000000
8/17/2011	5:17:52 PM	H2 MFC set to  0.000000
8/17/2011	5:17:52 PM	BCl3 MFC set to  0.000000
8/17/2011	5:17:52 PM	PHl3 MFC set to  0.000000
8/17/2011	5:17:52 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:17:52 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:17:53 PM	Tube furnace set to 0
8/17/2011	5:37:53 PM	Helium valve closed
8/17/2011	5:37:53 PM	H2 valve closed
8/17/2011	5:37:53 PM	BCl3 valve closed
8/17/2011	5:37:53 PM	PH3 valve closed
8/17/2011	5:37:53 PM	SiCl4 pre valve closed
8/17/2011	5:37:53 PM	SiCl4 post valve closed
8/17/2011	5:37:53 PM	Main Vac valve closed
8/17/2011	5:37:53 PM	Bypass valve closed
8/17/2011	5:37:53 PM	Bubbler valve closed
8/17/2011	5:37:53 PM	Helium MFC set to  0.000000
8/17/2011	5:37:53 PM	H2 MFC set to  0.000000
8/17/2011	5:37:53 PM	BCl3 MFC set to  0.000000
8/17/2011	5:37:53 PM	PHl3 MFC set to  0.000000
8/17/2011	5:37:53 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:37:53 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:37:53 PM	Tube furnace set to 0
8/17/2011	5:37:54 PM	Run finished at 5:37 PM
8/17/2011	5:47:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	5:47:42 PM	Recipe started at 5:47 PM
8/17/2011	5:47:42 PM	Helium valve closed
8/17/2011	5:47:42 PM	H2 valve closed
8/17/2011	5:47:42 PM	BCl3 valve closed
8/17/2011	5:47:42 PM	PH3 valve closed
8/17/2011	5:47:42 PM	SiCl4 pre valve closed
8/17/2011	5:47:42 PM	SiCl4 post valve closed
8/17/2011	5:47:42 PM	Main Vac valve closed
8/17/2011	5:47:42 PM	Bypass valve closed
8/17/2011	5:47:42 PM	Bubbler valve closed
8/17/2011	5:47:42 PM	Helium MFC set to  0.000000
8/17/2011	5:47:42 PM	H2 MFC set to  0.000000
8/17/2011	5:47:42 PM	BCl3 MFC set to  0.000000
8/17/2011	5:47:42 PM	PHl3 MFC set to  0.000000
8/17/2011	5:47:42 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:47:42 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:47:42 PM	Tube furnace set to 0
8/17/2011	5:47:45 PM	H2 valve closed
8/17/2011	5:47:45 PM	BCl3 valve closed
8/17/2011	5:47:45 PM	PH3 valve closed
8/17/2011	5:47:45 PM	SiCl4 pre valve closed
8/17/2011	5:47:45 PM	SiCl4 post valve closed
8/17/2011	5:47:45 PM	Main Vac valve closed
8/17/2011	5:47:45 PM	Bypass valve closed
8/17/2011	5:47:45 PM	Bubbler valve closed
8/17/2011	5:47:45 PM	Helium valve opened
8/17/2011	5:47:45 PM	Helium MFC set to  500.000000
8/17/2011	5:47:45 PM	H2 MFC set to  0.000000
8/17/2011	5:47:45 PM	BCl3 MFC set to  0.000000
8/17/2011	5:47:45 PM	PHl3 MFC set to  0.000000
8/17/2011	5:47:45 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:47:45 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:47:45 PM	Tube furnace set to 0
8/17/2011	5:47:48 PM	Helium valve closed
8/17/2011	5:47:48 PM	H2 valve closed
8/17/2011	5:47:48 PM	BCl3 valve closed
8/17/2011	5:47:48 PM	PH3 valve closed
8/17/2011	5:47:48 PM	SiCl4 pre valve closed
8/17/2011	5:47:48 PM	SiCl4 post valve closed
8/17/2011	5:47:48 PM	Main Vac valve closed
8/17/2011	5:47:48 PM	Bypass valve closed
8/17/2011	5:47:48 PM	Bubbler valve closed
8/17/2011	5:47:48 PM	Helium MFC set to  0.000000
8/17/2011	5:47:48 PM	H2 MFC set to  0.000000
8/17/2011	5:47:48 PM	BCl3 MFC set to  0.000000
8/17/2011	5:47:48 PM	PHl3 MFC set to  0.000000
8/17/2011	5:47:48 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:47:48 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:47:48 PM	Tube furnace set to 0
8/17/2011	5:47:49 PM	Run finished at 5:47 PM
8/17/2011	5:47:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	5:51:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2011	5:51:08 PM	Recipe started at 5:51 PM
8/17/2011	5:51:08 PM	Helium valve closed
8/17/2011	5:51:08 PM	H2 valve closed
8/17/2011	5:51:08 PM	BCl3 valve closed
8/17/2011	5:51:08 PM	PH3 valve closed
8/17/2011	5:51:08 PM	SiCl4 pre valve closed
8/17/2011	5:51:08 PM	SiCl4 post valve closed
8/17/2011	5:51:08 PM	Main Vac valve closed
8/17/2011	5:51:08 PM	Bubbler valve closed
8/17/2011	5:51:08 PM	Bypass valve opened
8/17/2011	5:51:08 PM	Helium MFC set to  0.000000
8/17/2011	5:51:08 PM	H2 MFC set to  0.000000
8/17/2011	5:51:08 PM	BCl3 MFC set to  0.000000
8/17/2011	5:51:08 PM	PHl3 MFC set to  0.000000
8/17/2011	5:51:08 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:51:08 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:51:08 PM	Tube furnace set to 0
8/17/2011	5:52:12 PM	Helium valve closed
8/17/2011	5:52:12 PM	H2 valve closed
8/17/2011	5:52:12 PM	BCl3 valve closed
8/17/2011	5:52:12 PM	PH3 valve closed
8/17/2011	5:52:12 PM	SiCl4 pre valve closed
8/17/2011	5:52:12 PM	SiCl4 post valve closed
8/17/2011	5:52:12 PM	Main Vac valve closed
8/17/2011	5:52:12 PM	Bubbler valve closed
8/17/2011	5:52:12 PM	Bypass valve opened
8/17/2011	5:52:12 PM	Helium MFC set to  0.000000
8/17/2011	5:52:12 PM	H2 MFC set to  0.000000
8/17/2011	5:52:12 PM	BCl3 MFC set to  0.000000
8/17/2011	5:52:12 PM	PHl3 MFC set to  0.000000
8/17/2011	5:52:12 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:52:12 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:52:12 PM	Tube furnace set to 0
8/17/2011	5:53:12 PM	Helium valve closed
8/17/2011	5:53:12 PM	H2 valve closed
8/17/2011	5:53:12 PM	BCl3 valve closed
8/17/2011	5:53:12 PM	PH3 valve closed
8/17/2011	5:53:12 PM	SiCl4 pre valve closed
8/17/2011	5:53:12 PM	SiCl4 post valve closed
8/17/2011	5:53:12 PM	Bypass valve closed
8/17/2011	5:53:12 PM	Bubbler valve closed
8/17/2011	5:53:12 PM	Main Vac valve opened
8/17/2011	5:53:12 PM	Helium MFC set to  0.000000
8/17/2011	5:53:12 PM	H2 MFC set to  0.000000
8/17/2011	5:53:12 PM	BCl3 MFC set to  0.000000
8/17/2011	5:53:12 PM	PHl3 MFC set to  0.000000
8/17/2011	5:53:12 PM	SiCl4 MFC set to  0.000000
8/17/2011	5:53:12 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	5:53:12 PM	Tube furnace set to 0
8/17/2011	5:53:13 PM	Run finished at 5:53 PM
8/17/2011	5:53:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2011	6:17:29 PM	Recipe started at 6:17 PM
8/17/2011	6:17:29 PM	Helium valve closed
8/17/2011	6:17:29 PM	H2 valve closed
8/17/2011	6:17:29 PM	BCl3 valve closed
8/17/2011	6:17:29 PM	PH3 valve closed
8/17/2011	6:17:29 PM	SiCl4 pre valve closed
8/17/2011	6:17:29 PM	SiCl4 post valve closed
8/17/2011	6:17:29 PM	Bypass valve closed
8/17/2011	6:17:29 PM	Bubbler valve closed
8/17/2011	6:17:29 PM	Main Vac valve opened
8/17/2011	6:17:29 PM	Helium MFC set to  0.000000
8/17/2011	6:17:29 PM	H2 MFC set to  0.000000
8/17/2011	6:17:29 PM	BCl3 MFC set to  0.000000
8/17/2011	6:17:29 PM	PHl3 MFC set to  0.000000
8/17/2011	6:17:29 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:17:29 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:17:29 PM	Tube furnace set to 0
8/17/2011	6:17:59 PM	H2 valve closed
8/17/2011	6:17:59 PM	BCl3 valve closed
8/17/2011	6:17:59 PM	PH3 valve closed
8/17/2011	6:17:59 PM	SiCl4 pre valve closed
8/17/2011	6:17:59 PM	SiCl4 post valve closed
8/17/2011	6:17:59 PM	Bypass valve closed
8/17/2011	6:17:59 PM	Bubbler valve closed
8/17/2011	6:17:59 PM	Helium valve opened
8/17/2011	6:17:59 PM	Main Vac valve opened
8/17/2011	6:17:59 PM	Helium MFC set to  20.000000
8/17/2011	6:17:59 PM	H2 MFC set to  0.000000
8/17/2011	6:17:59 PM	BCl3 MFC set to  0.000000
8/17/2011	6:17:59 PM	PHl3 MFC set to  0.000000
8/17/2011	6:17:59 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:17:59 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:17:59 PM	Tube furnace set to 0
8/17/2011	6:18:29 PM	Helium valve closed
8/17/2011	6:18:29 PM	H2 valve closed
8/17/2011	6:18:29 PM	BCl3 valve closed
8/17/2011	6:18:29 PM	PH3 valve closed
8/17/2011	6:18:29 PM	SiCl4 pre valve closed
8/17/2011	6:18:29 PM	SiCl4 post valve closed
8/17/2011	6:18:29 PM	Bypass valve closed
8/17/2011	6:18:29 PM	Bubbler valve closed
8/17/2011	6:18:29 PM	Main Vac valve opened
8/17/2011	6:18:29 PM	Helium MFC set to  0.000000
8/17/2011	6:18:29 PM	H2 MFC set to  0.000000
8/17/2011	6:18:29 PM	BCl3 MFC set to  0.000000
8/17/2011	6:18:29 PM	PHl3 MFC set to  0.000000
8/17/2011	6:18:29 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:18:29 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:18:29 PM	Tube furnace set to 0
8/17/2011	6:18:59 PM	H2 valve closed
8/17/2011	6:18:59 PM	BCl3 valve closed
8/17/2011	6:18:59 PM	PH3 valve closed
8/17/2011	6:18:59 PM	SiCl4 pre valve closed
8/17/2011	6:18:59 PM	SiCl4 post valve closed
8/17/2011	6:18:59 PM	Bypass valve closed
8/17/2011	6:18:59 PM	Bubbler valve closed
8/17/2011	6:18:59 PM	Helium valve opened
8/17/2011	6:18:59 PM	Main Vac valve opened
8/17/2011	6:18:59 PM	Helium MFC set to  20.000000
8/17/2011	6:18:59 PM	H2 MFC set to  0.000000
8/17/2011	6:18:59 PM	BCl3 MFC set to  0.000000
8/17/2011	6:18:59 PM	PHl3 MFC set to  0.000000
8/17/2011	6:19:00 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:19:00 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:19:00 PM	Tube furnace set to 0
8/17/2011	6:19:30 PM	Helium valve closed
8/17/2011	6:19:30 PM	H2 valve closed
8/17/2011	6:19:30 PM	BCl3 valve closed
8/17/2011	6:19:30 PM	PH3 valve closed
8/17/2011	6:19:30 PM	SiCl4 pre valve closed
8/17/2011	6:19:30 PM	SiCl4 post valve closed
8/17/2011	6:19:30 PM	Bypass valve closed
8/17/2011	6:19:30 PM	Bubbler valve closed
8/17/2011	6:19:30 PM	Main Vac valve opened
8/17/2011	6:19:30 PM	Helium MFC set to  0.000000
8/17/2011	6:19:30 PM	H2 MFC set to  0.000000
8/17/2011	6:19:30 PM	BCl3 MFC set to  0.000000
8/17/2011	6:19:30 PM	PHl3 MFC set to  0.000000
8/17/2011	6:19:30 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:19:30 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:19:30 PM	Tube furnace set to 0
8/17/2011	6:20:00 PM	H2 valve closed
8/17/2011	6:20:00 PM	BCl3 valve closed
8/17/2011	6:20:00 PM	PH3 valve closed
8/17/2011	6:20:00 PM	SiCl4 pre valve closed
8/17/2011	6:20:00 PM	SiCl4 post valve closed
8/17/2011	6:20:00 PM	Bypass valve closed
8/17/2011	6:20:00 PM	Bubbler valve closed
8/17/2011	6:20:00 PM	Helium valve opened
8/17/2011	6:20:00 PM	Main Vac valve opened
8/17/2011	6:20:00 PM	Helium MFC set to  20.000000
8/17/2011	6:20:00 PM	H2 MFC set to  0.000000
8/17/2011	6:20:00 PM	BCl3 MFC set to  0.000000
8/17/2011	6:20:00 PM	PHl3 MFC set to  0.000000
8/17/2011	6:20:00 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:20:00 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:20:00 PM	Tube furnace set to 0
8/17/2011	6:20:30 PM	Helium valve closed
8/17/2011	6:20:30 PM	H2 valve closed
8/17/2011	6:20:30 PM	BCl3 valve closed
8/17/2011	6:20:30 PM	PH3 valve closed
8/17/2011	6:20:30 PM	SiCl4 pre valve closed
8/17/2011	6:20:30 PM	SiCl4 post valve closed
8/17/2011	6:20:30 PM	Bypass valve closed
8/17/2011	6:20:30 PM	Bubbler valve closed
8/17/2011	6:20:30 PM	Main Vac valve opened
8/17/2011	6:20:30 PM	Helium MFC set to  0.000000
8/17/2011	6:20:30 PM	H2 MFC set to  0.000000
8/17/2011	6:20:30 PM	BCl3 MFC set to  0.000000
8/17/2011	6:20:30 PM	PHl3 MFC set to  0.000000
8/17/2011	6:20:30 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:20:30 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:20:30 PM	Tube furnace set to 0
8/17/2011	6:21:00 PM	H2 valve closed
8/17/2011	6:21:00 PM	BCl3 valve closed
8/17/2011	6:21:00 PM	PH3 valve closed
8/17/2011	6:21:00 PM	SiCl4 pre valve closed
8/17/2011	6:21:00 PM	SiCl4 post valve closed
8/17/2011	6:21:00 PM	Bypass valve closed
8/17/2011	6:21:00 PM	Bubbler valve closed
8/17/2011	6:21:00 PM	Helium valve opened
8/17/2011	6:21:00 PM	Main Vac valve opened
8/17/2011	6:21:00 PM	Helium MFC set to  20.000000
8/17/2011	6:21:00 PM	H2 MFC set to  0.000000
8/17/2011	6:21:00 PM	BCl3 MFC set to  0.000000
8/17/2011	6:21:00 PM	PHl3 MFC set to  0.000000
8/17/2011	6:21:00 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:21:00 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:21:00 PM	Tube furnace set to 0
8/17/2011	6:21:30 PM	Helium valve closed
8/17/2011	6:21:30 PM	H2 valve closed
8/17/2011	6:21:30 PM	BCl3 valve closed
8/17/2011	6:21:30 PM	PH3 valve closed
8/17/2011	6:21:30 PM	SiCl4 pre valve closed
8/17/2011	6:21:30 PM	SiCl4 post valve closed
8/17/2011	6:21:30 PM	Bypass valve closed
8/17/2011	6:21:30 PM	Bubbler valve closed
8/17/2011	6:21:30 PM	Main Vac valve opened
8/17/2011	6:21:30 PM	Helium MFC set to  0.000000
8/17/2011	6:21:30 PM	H2 MFC set to  0.000000
8/17/2011	6:21:30 PM	BCl3 MFC set to  0.000000
8/17/2011	6:21:30 PM	PHl3 MFC set to  0.000000
8/17/2011	6:21:31 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:21:31 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:21:31 PM	Tube furnace set to 0
8/17/2011	6:22:01 PM	H2 valve closed
8/17/2011	6:22:01 PM	BCl3 valve closed
8/17/2011	6:22:01 PM	PH3 valve closed
8/17/2011	6:22:01 PM	SiCl4 pre valve closed
8/17/2011	6:22:01 PM	SiCl4 post valve closed
8/17/2011	6:22:01 PM	Bypass valve closed
8/17/2011	6:22:01 PM	Bubbler valve closed
8/17/2011	6:22:01 PM	Helium valve opened
8/17/2011	6:22:01 PM	Main Vac valve opened
8/17/2011	6:22:01 PM	Helium MFC set to  20.000000
8/17/2011	6:22:01 PM	H2 MFC set to  0.000000
8/17/2011	6:22:01 PM	BCl3 MFC set to  0.000000
8/17/2011	6:22:01 PM	PHl3 MFC set to  0.000000
8/17/2011	6:22:01 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:22:01 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:22:01 PM	Tube furnace set to 0
8/17/2011	6:22:31 PM	Helium valve closed
8/17/2011	6:22:31 PM	H2 valve closed
8/17/2011	6:22:31 PM	BCl3 valve closed
8/17/2011	6:22:31 PM	PH3 valve closed
8/17/2011	6:22:31 PM	SiCl4 pre valve closed
8/17/2011	6:22:31 PM	SiCl4 post valve closed
8/17/2011	6:22:31 PM	Bypass valve closed
8/17/2011	6:22:31 PM	Bubbler valve closed
8/17/2011	6:22:31 PM	Main Vac valve opened
8/17/2011	6:22:31 PM	Helium MFC set to  0.000000
8/17/2011	6:22:31 PM	H2 MFC set to  0.000000
8/17/2011	6:22:31 PM	BCl3 MFC set to  0.000000
8/17/2011	6:22:31 PM	PHl3 MFC set to  0.000000
8/17/2011	6:22:31 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:22:31 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:22:31 PM	Tube furnace set to 0
8/17/2011	6:23:01 PM	H2 valve closed
8/17/2011	6:23:01 PM	BCl3 valve closed
8/17/2011	6:23:01 PM	PH3 valve closed
8/17/2011	6:23:01 PM	SiCl4 pre valve closed
8/17/2011	6:23:01 PM	SiCl4 post valve closed
8/17/2011	6:23:01 PM	Bypass valve closed
8/17/2011	6:23:01 PM	Bubbler valve closed
8/17/2011	6:23:01 PM	Helium valve opened
8/17/2011	6:23:01 PM	Main Vac valve opened
8/17/2011	6:23:01 PM	Helium MFC set to  20.000000
8/17/2011	6:23:01 PM	H2 MFC set to  0.000000
8/17/2011	6:23:01 PM	BCl3 MFC set to  0.000000
8/17/2011	6:23:01 PM	PHl3 MFC set to  0.000000
8/17/2011	6:23:01 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:23:01 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:23:01 PM	Tube furnace set to 0
8/17/2011	6:23:31 PM	Helium valve closed
8/17/2011	6:23:31 PM	H2 valve closed
8/17/2011	6:23:31 PM	BCl3 valve closed
8/17/2011	6:23:31 PM	PH3 valve closed
8/17/2011	6:23:31 PM	SiCl4 pre valve closed
8/17/2011	6:23:31 PM	SiCl4 post valve closed
8/17/2011	6:23:31 PM	Bypass valve closed
8/17/2011	6:23:31 PM	Bubbler valve closed
8/17/2011	6:23:31 PM	Main Vac valve opened
8/17/2011	6:23:31 PM	Helium MFC set to  0.000000
8/17/2011	6:23:31 PM	H2 MFC set to  0.000000
8/17/2011	6:23:31 PM	BCl3 MFC set to  0.000000
8/17/2011	6:23:31 PM	PHl3 MFC set to  0.000000
8/17/2011	6:23:31 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:23:31 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:23:32 PM	Tube furnace set to 0
8/17/2011	6:24:02 PM	H2 valve closed
8/17/2011	6:24:02 PM	BCl3 valve closed
8/17/2011	6:24:02 PM	PH3 valve closed
8/17/2011	6:24:02 PM	SiCl4 pre valve closed
8/17/2011	6:24:02 PM	SiCl4 post valve closed
8/17/2011	6:24:02 PM	Bypass valve closed
8/17/2011	6:24:02 PM	Bubbler valve closed
8/17/2011	6:24:02 PM	Helium valve opened
8/17/2011	6:24:02 PM	Main Vac valve opened
8/17/2011	6:24:02 PM	Helium MFC set to  20.000000
8/17/2011	6:24:02 PM	H2 MFC set to  0.000000
8/17/2011	6:24:02 PM	BCl3 MFC set to  0.000000
8/17/2011	6:24:02 PM	PHl3 MFC set to  0.000000
8/17/2011	6:24:02 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:24:02 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:24:02 PM	Tube furnace set to 0
8/17/2011	6:24:32 PM	Helium valve closed
8/17/2011	6:24:32 PM	H2 valve closed
8/17/2011	6:24:32 PM	BCl3 valve closed
8/17/2011	6:24:32 PM	PH3 valve closed
8/17/2011	6:24:32 PM	SiCl4 pre valve closed
8/17/2011	6:24:32 PM	SiCl4 post valve closed
8/17/2011	6:24:32 PM	Bypass valve closed
8/17/2011	6:24:32 PM	Bubbler valve closed
8/17/2011	6:24:32 PM	Main Vac valve opened
8/17/2011	6:24:32 PM	Helium MFC set to  0.000000
8/17/2011	6:24:32 PM	H2 MFC set to  0.000000
8/17/2011	6:24:32 PM	BCl3 MFC set to  0.000000
8/17/2011	6:24:32 PM	PHl3 MFC set to  0.000000
8/17/2011	6:24:32 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:24:32 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:24:32 PM	Tube furnace set to 0
8/17/2011	6:25:02 PM	H2 valve closed
8/17/2011	6:25:02 PM	BCl3 valve closed
8/17/2011	6:25:02 PM	PH3 valve closed
8/17/2011	6:25:02 PM	SiCl4 pre valve closed
8/17/2011	6:25:02 PM	SiCl4 post valve closed
8/17/2011	6:25:02 PM	Bypass valve closed
8/17/2011	6:25:02 PM	Bubbler valve closed
8/17/2011	6:25:02 PM	Helium valve opened
8/17/2011	6:25:02 PM	Main Vac valve opened
8/17/2011	6:25:02 PM	Helium MFC set to  20.000000
8/17/2011	6:25:02 PM	H2 MFC set to  0.000000
8/17/2011	6:25:02 PM	BCl3 MFC set to  0.000000
8/17/2011	6:25:02 PM	PHl3 MFC set to  0.000000
8/17/2011	6:25:02 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:25:02 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:25:02 PM	Tube furnace set to 0
8/17/2011	6:25:32 PM	Helium valve closed
8/17/2011	6:25:32 PM	H2 valve closed
8/17/2011	6:25:32 PM	BCl3 valve closed
8/17/2011	6:25:32 PM	PH3 valve closed
8/17/2011	6:25:32 PM	SiCl4 pre valve closed
8/17/2011	6:25:32 PM	SiCl4 post valve closed
8/17/2011	6:25:32 PM	Bypass valve closed
8/17/2011	6:25:32 PM	Bubbler valve closed
8/17/2011	6:25:32 PM	Main Vac valve opened
8/17/2011	6:25:32 PM	Helium MFC set to  0.000000
8/17/2011	6:25:32 PM	H2 MFC set to  0.000000
8/17/2011	6:25:32 PM	BCl3 MFC set to  0.000000
8/17/2011	6:25:32 PM	PHl3 MFC set to  0.000000
8/17/2011	6:25:32 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:25:32 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:25:32 PM	Tube furnace set to 0
8/17/2011	6:26:02 PM	H2 valve closed
8/17/2011	6:26:02 PM	BCl3 valve closed
8/17/2011	6:26:02 PM	PH3 valve closed
8/17/2011	6:26:02 PM	SiCl4 pre valve closed
8/17/2011	6:26:02 PM	SiCl4 post valve closed
8/17/2011	6:26:02 PM	Bypass valve closed
8/17/2011	6:26:02 PM	Bubbler valve closed
8/17/2011	6:26:02 PM	Helium valve opened
8/17/2011	6:26:02 PM	Main Vac valve opened
8/17/2011	6:26:02 PM	Helium MFC set to  20.000000
8/17/2011	6:26:02 PM	H2 MFC set to  0.000000
8/17/2011	6:26:02 PM	BCl3 MFC set to  0.000000
8/17/2011	6:26:02 PM	PHl3 MFC set to  0.000000
8/17/2011	6:26:02 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:26:02 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:26:03 PM	Tube furnace set to 0
8/17/2011	6:26:33 PM	Helium valve closed
8/17/2011	6:26:33 PM	H2 valve closed
8/17/2011	6:26:33 PM	BCl3 valve closed
8/17/2011	6:26:33 PM	PH3 valve closed
8/17/2011	6:26:33 PM	SiCl4 pre valve closed
8/17/2011	6:26:33 PM	SiCl4 post valve closed
8/17/2011	6:26:33 PM	Bypass valve closed
8/17/2011	6:26:33 PM	Bubbler valve closed
8/17/2011	6:26:33 PM	Main Vac valve opened
8/17/2011	6:26:33 PM	Helium MFC set to  0.000000
8/17/2011	6:26:33 PM	H2 MFC set to  0.000000
8/17/2011	6:26:33 PM	BCl3 MFC set to  0.000000
8/17/2011	6:26:33 PM	PHl3 MFC set to  0.000000
8/17/2011	6:26:33 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:26:33 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:26:33 PM	Tube furnace set to 200
8/17/2011	6:27:03 PM	H2 valve closed
8/17/2011	6:27:03 PM	BCl3 valve closed
8/17/2011	6:27:03 PM	PH3 valve closed
8/17/2011	6:27:03 PM	SiCl4 pre valve closed
8/17/2011	6:27:03 PM	SiCl4 post valve closed
8/17/2011	6:27:03 PM	Bypass valve closed
8/17/2011	6:27:03 PM	Bubbler valve closed
8/17/2011	6:27:03 PM	Helium valve opened
8/17/2011	6:27:03 PM	Main Vac valve opened
8/17/2011	6:27:03 PM	Helium MFC set to  20.000000
8/17/2011	6:27:03 PM	H2 MFC set to  0.000000
8/17/2011	6:27:03 PM	BCl3 MFC set to  0.000000
8/17/2011	6:27:03 PM	PHl3 MFC set to  0.000000
8/17/2011	6:27:03 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:27:03 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:27:03 PM	Tube furnace set to 200
8/17/2011	6:27:33 PM	Helium valve closed
8/17/2011	6:27:33 PM	H2 valve closed
8/17/2011	6:27:33 PM	BCl3 valve closed
8/17/2011	6:27:33 PM	PH3 valve closed
8/17/2011	6:27:33 PM	SiCl4 pre valve closed
8/17/2011	6:27:33 PM	SiCl4 post valve closed
8/17/2011	6:27:33 PM	Bypass valve closed
8/17/2011	6:27:33 PM	Bubbler valve closed
8/17/2011	6:27:33 PM	Main Vac valve opened
8/17/2011	6:27:33 PM	Helium MFC set to  0.000000
8/17/2011	6:27:33 PM	H2 MFC set to  0.000000
8/17/2011	6:27:33 PM	BCl3 MFC set to  0.000000
8/17/2011	6:27:33 PM	PHl3 MFC set to  0.000000
8/17/2011	6:27:33 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:27:33 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:27:33 PM	Tube furnace set to 200
8/17/2011	6:28:03 PM	H2 valve closed
8/17/2011	6:28:03 PM	BCl3 valve closed
8/17/2011	6:28:03 PM	PH3 valve closed
8/17/2011	6:28:03 PM	SiCl4 pre valve closed
8/17/2011	6:28:03 PM	SiCl4 post valve closed
8/17/2011	6:28:03 PM	Bypass valve closed
8/17/2011	6:28:03 PM	Bubbler valve closed
8/17/2011	6:28:03 PM	Helium valve opened
8/17/2011	6:28:03 PM	Main Vac valve opened
8/17/2011	6:28:03 PM	Helium MFC set to  20.000000
8/17/2011	6:28:03 PM	H2 MFC set to  0.000000
8/17/2011	6:28:03 PM	BCl3 MFC set to  0.000000
8/17/2011	6:28:03 PM	PHl3 MFC set to  0.000000
8/17/2011	6:28:03 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:28:03 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:28:03 PM	Tube furnace set to 200
8/17/2011	6:28:33 PM	Helium valve closed
8/17/2011	6:28:34 PM	H2 valve closed
8/17/2011	6:28:34 PM	BCl3 valve closed
8/17/2011	6:28:34 PM	PH3 valve closed
8/17/2011	6:28:34 PM	SiCl4 pre valve closed
8/17/2011	6:28:34 PM	SiCl4 post valve closed
8/17/2011	6:28:34 PM	Bypass valve closed
8/17/2011	6:28:34 PM	Bubbler valve closed
8/17/2011	6:28:34 PM	Main Vac valve opened
8/17/2011	6:28:34 PM	Helium MFC set to  0.000000
8/17/2011	6:28:34 PM	H2 MFC set to  0.000000
8/17/2011	6:28:34 PM	BCl3 MFC set to  0.000000
8/17/2011	6:28:34 PM	PHl3 MFC set to  0.000000
8/17/2011	6:28:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:28:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:28:34 PM	Tube furnace set to 200
8/17/2011	6:29:04 PM	H2 valve closed
8/17/2011	6:29:04 PM	BCl3 valve closed
8/17/2011	6:29:04 PM	PH3 valve closed
8/17/2011	6:29:04 PM	SiCl4 pre valve closed
8/17/2011	6:29:04 PM	SiCl4 post valve closed
8/17/2011	6:29:04 PM	Bypass valve closed
8/17/2011	6:29:04 PM	Bubbler valve closed
8/17/2011	6:29:04 PM	Helium valve opened
8/17/2011	6:29:04 PM	Main Vac valve opened
8/17/2011	6:29:04 PM	Helium MFC set to  20.000000
8/17/2011	6:29:04 PM	H2 MFC set to  0.000000
8/17/2011	6:29:04 PM	BCl3 MFC set to  0.000000
8/17/2011	6:29:04 PM	PHl3 MFC set to  0.000000
8/17/2011	6:29:04 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:29:04 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:29:04 PM	Tube furnace set to 200
8/17/2011	6:29:34 PM	Helium valve closed
8/17/2011	6:29:34 PM	H2 valve closed
8/17/2011	6:29:34 PM	BCl3 valve closed
8/17/2011	6:29:34 PM	PH3 valve closed
8/17/2011	6:29:34 PM	SiCl4 pre valve closed
8/17/2011	6:29:34 PM	SiCl4 post valve closed
8/17/2011	6:29:34 PM	Bypass valve closed
8/17/2011	6:29:34 PM	Bubbler valve closed
8/17/2011	6:29:34 PM	Main Vac valve opened
8/17/2011	6:29:34 PM	Helium MFC set to  0.000000
8/17/2011	6:29:34 PM	H2 MFC set to  0.000000
8/17/2011	6:29:34 PM	BCl3 MFC set to  0.000000
8/17/2011	6:29:34 PM	PHl3 MFC set to  0.000000
8/17/2011	6:29:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:29:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:29:34 PM	Tube furnace set to 200
8/17/2011	6:30:04 PM	H2 valve closed
8/17/2011	6:30:04 PM	BCl3 valve closed
8/17/2011	6:30:04 PM	PH3 valve closed
8/17/2011	6:30:04 PM	SiCl4 pre valve closed
8/17/2011	6:30:04 PM	SiCl4 post valve closed
8/17/2011	6:30:04 PM	Bypass valve closed
8/17/2011	6:30:04 PM	Bubbler valve closed
8/17/2011	6:30:04 PM	Helium valve opened
8/17/2011	6:30:04 PM	Main Vac valve opened
8/17/2011	6:30:04 PM	Helium MFC set to  20.000000
8/17/2011	6:30:04 PM	H2 MFC set to  0.000000
8/17/2011	6:30:04 PM	BCl3 MFC set to  0.000000
8/17/2011	6:30:04 PM	PHl3 MFC set to  0.000000
8/17/2011	6:30:04 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:30:04 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:30:04 PM	Tube furnace set to 200
8/17/2011	6:30:34 PM	Helium valve closed
8/17/2011	6:30:34 PM	H2 valve closed
8/17/2011	6:30:34 PM	BCl3 valve closed
8/17/2011	6:30:34 PM	PH3 valve closed
8/17/2011	6:30:34 PM	SiCl4 pre valve closed
8/17/2011	6:30:34 PM	SiCl4 post valve closed
8/17/2011	6:30:34 PM	Bypass valve closed
8/17/2011	6:30:34 PM	Bubbler valve closed
8/17/2011	6:30:34 PM	Main Vac valve opened
8/17/2011	6:30:34 PM	Helium MFC set to  0.000000
8/17/2011	6:30:34 PM	H2 MFC set to  0.000000
8/17/2011	6:30:34 PM	BCl3 MFC set to  0.000000
8/17/2011	6:30:34 PM	PHl3 MFC set to  0.000000
8/17/2011	6:30:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:30:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:30:35 PM	Tube furnace set to 200
8/17/2011	6:31:05 PM	H2 valve closed
8/17/2011	6:31:05 PM	BCl3 valve closed
8/17/2011	6:31:05 PM	PH3 valve closed
8/17/2011	6:31:05 PM	SiCl4 pre valve closed
8/17/2011	6:31:05 PM	SiCl4 post valve closed
8/17/2011	6:31:05 PM	Bypass valve closed
8/17/2011	6:31:05 PM	Bubbler valve closed
8/17/2011	6:31:05 PM	Helium valve opened
8/17/2011	6:31:05 PM	Main Vac valve opened
8/17/2011	6:31:05 PM	Helium MFC set to  20.000000
8/17/2011	6:31:05 PM	H2 MFC set to  0.000000
8/17/2011	6:31:05 PM	BCl3 MFC set to  0.000000
8/17/2011	6:31:05 PM	PHl3 MFC set to  0.000000
8/17/2011	6:31:05 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:31:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:31:05 PM	Tube furnace set to 200
8/17/2011	6:31:35 PM	Helium valve closed
8/17/2011	6:31:35 PM	H2 valve closed
8/17/2011	6:31:35 PM	BCl3 valve closed
8/17/2011	6:31:35 PM	PH3 valve closed
8/17/2011	6:31:35 PM	SiCl4 pre valve closed
8/17/2011	6:31:35 PM	SiCl4 post valve closed
8/17/2011	6:31:35 PM	Bypass valve closed
8/17/2011	6:31:35 PM	Bubbler valve closed
8/17/2011	6:31:35 PM	Main Vac valve opened
8/17/2011	6:31:35 PM	Helium MFC set to  0.000000
8/17/2011	6:31:35 PM	H2 MFC set to  0.000000
8/17/2011	6:31:35 PM	BCl3 MFC set to  0.000000
8/17/2011	6:31:35 PM	PHl3 MFC set to  0.000000
8/17/2011	6:31:35 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:31:35 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:31:35 PM	Tube furnace set to 200
8/17/2011	6:32:05 PM	H2 valve closed
8/17/2011	6:32:05 PM	BCl3 valve closed
8/17/2011	6:32:05 PM	PH3 valve closed
8/17/2011	6:32:05 PM	SiCl4 pre valve closed
8/17/2011	6:32:05 PM	SiCl4 post valve closed
8/17/2011	6:32:05 PM	Bypass valve closed
8/17/2011	6:32:05 PM	Bubbler valve closed
8/17/2011	6:32:05 PM	Helium valve opened
8/17/2011	6:32:05 PM	Main Vac valve opened
8/17/2011	6:32:05 PM	Helium MFC set to  20.000000
8/17/2011	6:32:05 PM	H2 MFC set to  0.000000
8/17/2011	6:32:05 PM	BCl3 MFC set to  0.000000
8/17/2011	6:32:05 PM	PHl3 MFC set to  0.000000
8/17/2011	6:32:05 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:32:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:32:05 PM	Tube furnace set to 200
8/17/2011	6:32:35 PM	Helium valve closed
8/17/2011	6:32:35 PM	H2 valve closed
8/17/2011	6:32:35 PM	BCl3 valve closed
8/17/2011	6:32:35 PM	PH3 valve closed
8/17/2011	6:32:35 PM	SiCl4 pre valve closed
8/17/2011	6:32:35 PM	SiCl4 post valve closed
8/17/2011	6:32:35 PM	Bypass valve closed
8/17/2011	6:32:35 PM	Bubbler valve closed
8/17/2011	6:32:35 PM	Main Vac valve opened
8/17/2011	6:32:35 PM	Helium MFC set to  0.000000
8/17/2011	6:32:35 PM	H2 MFC set to  0.000000
8/17/2011	6:32:35 PM	BCl3 MFC set to  0.000000
8/17/2011	6:32:35 PM	PHl3 MFC set to  0.000000
8/17/2011	6:32:35 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:32:35 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:32:35 PM	Tube furnace set to 0
8/17/2011	6:32:36 PM	Run finished at 6:32 PM
8/17/2011	6:38:35 PM	Main Vac valve closed
8/17/2011	6:38:47 PM	Main Vac valve opened
8/17/2011	6:39:40 PM	Recipe started at 6:39 PM
8/17/2011	6:39:40 PM	Helium valve closed
8/17/2011	6:39:40 PM	H2 valve closed
8/17/2011	6:39:40 PM	BCl3 valve closed
8/17/2011	6:39:40 PM	PH3 valve closed
8/17/2011	6:39:40 PM	SiCl4 pre valve closed
8/17/2011	6:39:40 PM	SiCl4 post valve closed
8/17/2011	6:39:40 PM	Main Vac valve closed
8/17/2011	6:39:40 PM	Bypass valve closed
8/17/2011	6:39:40 PM	Bubbler valve closed
8/17/2011	6:39:40 PM	Helium MFC set to  0.000000
8/17/2011	6:39:40 PM	H2 MFC set to  0.000000
8/17/2011	6:39:40 PM	BCl3 MFC set to  0.000000
8/17/2011	6:39:40 PM	PHl3 MFC set to  0.000000
8/17/2011	6:39:40 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:39:40 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:39:40 PM	Tube furnace set to 0
8/17/2011	6:39:43 PM	Helium valve closed
8/17/2011	6:39:43 PM	BCl3 valve closed
8/17/2011	6:39:43 PM	PH3 valve closed
8/17/2011	6:39:43 PM	SiCl4 pre valve closed
8/17/2011	6:39:43 PM	SiCl4 post valve closed
8/17/2011	6:39:43 PM	Main Vac valve closed
8/17/2011	6:39:43 PM	Bypass valve closed
8/17/2011	6:39:43 PM	Bubbler valve closed
8/17/2011	6:39:43 PM	H2 valve opened
8/17/2011	6:39:43 PM	Helium MFC set to  0.000000
8/17/2011	6:39:43 PM	H2 MFC set to  500.000000
8/17/2011	6:39:43 PM	BCl3 MFC set to  0.000000
8/17/2011	6:39:43 PM	PHl3 MFC set to  0.000000
8/17/2011	6:39:43 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:39:43 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:39:43 PM	Tube furnace set to 0
8/17/2011	6:40:46 PM	Helium valve closed
8/17/2011	6:40:46 PM	BCl3 valve closed
8/17/2011	6:40:46 PM	PH3 valve closed
8/17/2011	6:40:46 PM	SiCl4 pre valve closed
8/17/2011	6:40:46 PM	SiCl4 post valve closed
8/17/2011	6:40:46 PM	Main Vac valve closed
8/17/2011	6:40:46 PM	Bypass valve closed
8/17/2011	6:40:46 PM	H2 valve opened
8/17/2011	6:40:46 PM	Bubbler valve opened
8/17/2011	6:40:46 PM	Helium MFC set to  0.000000
8/17/2011	6:40:46 PM	H2 MFC set to  500.000000
8/17/2011	6:40:46 PM	BCl3 MFC set to  0.000000
8/17/2011	6:40:46 PM	PHl3 MFC set to  0.000000
8/17/2011	6:40:46 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:40:46 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:40:46 PM	Tube furnace set to 0
8/17/2011	6:40:47 PM	Helium valve closed
8/17/2011	6:40:47 PM	BCl3 valve closed
8/17/2011	6:40:47 PM	PH3 valve closed
8/17/2011	6:40:47 PM	SiCl4 pre valve closed
8/17/2011	6:40:47 PM	SiCl4 post valve closed
8/17/2011	6:40:47 PM	Main Vac valve closed
8/17/2011	6:40:47 PM	Bypass valve closed
8/17/2011	6:40:47 PM	H2 valve opened
8/17/2011	6:40:47 PM	Bubbler valve opened
8/17/2011	6:40:47 PM	Helium MFC set to  0.000000
8/17/2011	6:40:47 PM	H2 MFC set to  500.000000
8/17/2011	6:40:47 PM	BCl3 MFC set to  0.000000
8/17/2011	6:40:47 PM	PHl3 MFC set to  0.000000
8/17/2011	6:40:47 PM	SiCl4 MFC set to  0.000000
8/17/2011	6:40:47 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	6:40:47 PM	Tube furnace set to 1000
8/17/2011	7:00:47 PM	Helium valve closed
8/17/2011	7:00:47 PM	BCl3 valve closed
8/17/2011	7:00:47 PM	Main Vac valve closed
8/17/2011	7:00:47 PM	Bypass valve closed
8/17/2011	7:00:47 PM	H2 valve opened
8/17/2011	7:00:47 PM	PH3 valve opened
8/17/2011	7:00:47 PM	SiCl4 pre valve opened
8/17/2011	7:00:47 PM	SiCl4 post valve opened
8/17/2011	7:00:47 PM	Bubbler valve opened
8/17/2011	7:00:47 PM	Helium MFC set to  0.000000
8/17/2011	7:00:47 PM	H2 MFC set to  500.000000
8/17/2011	7:00:47 PM	BCl3 MFC set to  0.000000
8/17/2011	7:00:47 PM	PHl3 MFC set to  2.000000
8/17/2011	7:00:47 PM	SiCl4 MFC set to  50.000000
8/17/2011	7:00:47 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	7:00:48 PM	Tube furnace set to 1000
8/17/2011	7:16:48 PM	Helium valve closed
8/17/2011	7:16:48 PM	BCl3 valve closed
8/17/2011	7:16:48 PM	PH3 valve closed
8/17/2011	7:16:48 PM	SiCl4 pre valve closed
8/17/2011	7:16:48 PM	SiCl4 post valve closed
8/17/2011	7:16:48 PM	Main Vac valve closed
8/17/2011	7:16:48 PM	Bypass valve closed
8/17/2011	7:16:48 PM	H2 valve opened
8/17/2011	7:16:48 PM	Bubbler valve opened
8/17/2011	7:16:48 PM	Helium MFC set to  0.000000
8/17/2011	7:16:48 PM	H2 MFC set to  500.000000
8/17/2011	7:16:48 PM	BCl3 MFC set to  0.000000
8/17/2011	7:16:48 PM	PHl3 MFC set to  0.000000
8/17/2011	7:16:48 PM	SiCl4 MFC set to  0.000000
8/17/2011	7:16:48 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	7:16:48 PM	Tube furnace set to 950
8/17/2011	7:18:48 PM	Helium valve closed
8/17/2011	7:18:48 PM	BCl3 valve closed
8/17/2011	7:18:48 PM	PH3 valve closed
8/17/2011	7:18:48 PM	SiCl4 pre valve closed
8/17/2011	7:18:48 PM	SiCl4 post valve closed
8/17/2011	7:18:48 PM	Main Vac valve closed
8/17/2011	7:18:48 PM	Bypass valve closed
8/17/2011	7:18:48 PM	H2 valve opened
8/17/2011	7:18:48 PM	Bubbler valve opened
8/17/2011	7:18:48 PM	Helium MFC set to  0.000000
8/17/2011	7:18:48 PM	H2 MFC set to  500.000000
8/17/2011	7:18:48 PM	BCl3 MFC set to  0.000000
8/17/2011	7:18:48 PM	PHl3 MFC set to  0.000000
8/17/2011	7:18:48 PM	SiCl4 MFC set to  0.000000
8/17/2011	7:18:48 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	7:18:48 PM	Tube furnace set to 900
8/17/2011	7:20:48 PM	Helium valve closed
8/17/2011	7:20:48 PM	BCl3 valve closed
8/17/2011	7:20:48 PM	PH3 valve closed
8/17/2011	7:20:48 PM	SiCl4 pre valve closed
8/17/2011	7:20:48 PM	SiCl4 post valve closed
8/17/2011	7:20:48 PM	Main Vac valve closed
8/17/2011	7:20:48 PM	Bypass valve closed
8/17/2011	7:20:48 PM	H2 valve opened
8/17/2011	7:20:48 PM	Bubbler valve opened
8/17/2011	7:20:48 PM	Helium MFC set to  0.000000
8/17/2011	7:20:48 PM	H2 MFC set to  500.000000
8/17/2011	7:20:48 PM	BCl3 MFC set to  0.000000
8/17/2011	7:20:48 PM	PHl3 MFC set to  0.000000
8/17/2011	7:20:48 PM	SiCl4 MFC set to  0.000000
8/17/2011	7:20:48 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	7:20:48 PM	Tube furnace set to 850
8/17/2011	7:22:48 PM	H2 valve closed
8/17/2011	7:22:48 PM	BCl3 valve closed
8/17/2011	7:22:48 PM	PH3 valve closed
8/17/2011	7:22:48 PM	SiCl4 pre valve closed
8/17/2011	7:22:48 PM	SiCl4 post valve closed
8/17/2011	7:22:48 PM	Main Vac valve closed
8/17/2011	7:22:48 PM	Bypass valve closed
8/17/2011	7:22:48 PM	Helium valve opened
8/17/2011	7:22:48 PM	Bubbler valve opened
8/17/2011	7:22:48 PM	Helium MFC set to  500.000000
8/17/2011	7:22:48 PM	H2 MFC set to  0.000000
8/17/2011	7:22:48 PM	BCl3 MFC set to  0.000000
8/17/2011	7:22:48 PM	PHl3 MFC set to  0.000000
8/17/2011	7:22:48 PM	SiCl4 MFC set to  0.000000
8/17/2011	7:22:48 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	7:22:48 PM	Tube furnace set to 800
8/17/2011	7:24:48 PM	H2 valve closed
8/17/2011	7:24:48 PM	BCl3 valve closed
8/17/2011	7:24:48 PM	PH3 valve closed
8/17/2011	7:24:48 PM	SiCl4 pre valve closed
8/17/2011	7:24:48 PM	SiCl4 post valve closed
8/17/2011	7:24:48 PM	Main Vac valve closed
8/17/2011	7:24:48 PM	Bypass valve closed
8/17/2011	7:24:48 PM	Helium valve opened
8/17/2011	7:24:48 PM	Bubbler valve opened
8/17/2011	7:24:48 PM	Helium MFC set to  500.000000
8/17/2011	7:24:48 PM	H2 MFC set to  0.000000
8/17/2011	7:24:48 PM	BCl3 MFC set to  0.000000
8/17/2011	7:24:48 PM	PHl3 MFC set to  0.000000
8/17/2011	7:24:48 PM	SiCl4 MFC set to  0.000000
8/17/2011	7:24:48 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	7:24:49 PM	Tube furnace set to 750
8/17/2011	7:26:49 PM	H2 valve closed
8/17/2011	7:26:49 PM	BCl3 valve closed
8/17/2011	7:26:49 PM	PH3 valve closed
8/17/2011	7:26:49 PM	SiCl4 pre valve closed
8/17/2011	7:26:49 PM	SiCl4 post valve closed
8/17/2011	7:26:49 PM	Main Vac valve closed
8/17/2011	7:26:49 PM	Bypass valve closed
8/17/2011	7:26:49 PM	Helium valve opened
8/17/2011	7:26:49 PM	Bubbler valve opened
8/17/2011	7:26:49 PM	Helium MFC set to  500.000000
8/17/2011	7:26:49 PM	H2 MFC set to  0.000000
8/17/2011	7:26:49 PM	BCl3 MFC set to  0.000000
8/17/2011	7:26:49 PM	PHl3 MFC set to  0.000000
8/17/2011	7:26:49 PM	SiCl4 MFC set to  0.000000
8/17/2011	7:26:49 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	7:26:49 PM	Tube furnace set to 0
8/17/2011	7:46:49 PM	Helium valve closed
8/17/2011	7:46:49 PM	H2 valve closed
8/17/2011	7:46:49 PM	BCl3 valve closed
8/17/2011	7:46:49 PM	PH3 valve closed
8/17/2011	7:46:49 PM	SiCl4 pre valve closed
8/17/2011	7:46:49 PM	SiCl4 post valve closed
8/17/2011	7:46:49 PM	Main Vac valve closed
8/17/2011	7:46:49 PM	Bypass valve closed
8/17/2011	7:46:49 PM	Bubbler valve closed
8/17/2011	7:46:49 PM	Helium MFC set to  0.000000
8/17/2011	7:46:49 PM	H2 MFC set to  0.000000
8/17/2011	7:46:49 PM	BCl3 MFC set to  0.000000
8/17/2011	7:46:49 PM	PHl3 MFC set to  0.000000
8/17/2011	7:46:49 PM	SiCl4 MFC set to  0.000000
8/17/2011	7:46:49 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	7:46:49 PM	Tube furnace set to 0
8/17/2011	7:46:50 PM	Run finished at 7:46 PM
8/17/2011	9:31:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	9:31:34 PM	Recipe started at 9:31 PM
8/17/2011	9:31:34 PM	Helium valve closed
8/17/2011	9:31:34 PM	H2 valve closed
8/17/2011	9:31:34 PM	BCl3 valve closed
8/17/2011	9:31:34 PM	PH3 valve closed
8/17/2011	9:31:34 PM	SiCl4 pre valve closed
8/17/2011	9:31:34 PM	SiCl4 post valve closed
8/17/2011	9:31:34 PM	Main Vac valve closed
8/17/2011	9:31:34 PM	Bypass valve closed
8/17/2011	9:31:34 PM	Bubbler valve closed
8/17/2011	9:31:34 PM	Helium MFC set to  0.000000
8/17/2011	9:31:34 PM	H2 MFC set to  0.000000
8/17/2011	9:31:34 PM	BCl3 MFC set to  0.000000
8/17/2011	9:31:34 PM	PHl3 MFC set to  0.000000
8/17/2011	9:31:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	9:31:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	9:31:34 PM	Tube furnace set to 0
8/17/2011	9:31:37 PM	H2 valve closed
8/17/2011	9:31:37 PM	BCl3 valve closed
8/17/2011	9:31:37 PM	PH3 valve closed
8/17/2011	9:31:37 PM	SiCl4 pre valve closed
8/17/2011	9:31:37 PM	SiCl4 post valve closed
8/17/2011	9:31:37 PM	Main Vac valve closed
8/17/2011	9:31:37 PM	Bypass valve closed
8/17/2011	9:31:37 PM	Bubbler valve closed
8/17/2011	9:31:37 PM	Helium valve opened
8/17/2011	9:31:37 PM	Helium MFC set to  500.000000
8/17/2011	9:31:37 PM	H2 MFC set to  0.000000
8/17/2011	9:31:37 PM	BCl3 MFC set to  0.000000
8/17/2011	9:31:37 PM	PHl3 MFC set to  0.000000
8/17/2011	9:31:37 PM	SiCl4 MFC set to  0.000000
8/17/2011	9:31:37 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	9:31:37 PM	Tube furnace set to 0
8/17/2011	9:31:41 PM	Helium valve closed
8/17/2011	9:31:41 PM	H2 valve closed
8/17/2011	9:31:41 PM	BCl3 valve closed
8/17/2011	9:31:41 PM	PH3 valve closed
8/17/2011	9:31:41 PM	SiCl4 pre valve closed
8/17/2011	9:31:41 PM	SiCl4 post valve closed
8/17/2011	9:31:41 PM	Main Vac valve closed
8/17/2011	9:31:41 PM	Bypass valve closed
8/17/2011	9:31:41 PM	Bubbler valve closed
8/17/2011	9:31:41 PM	Helium MFC set to  0.000000
8/17/2011	9:31:41 PM	H2 MFC set to  0.000000
8/17/2011	9:31:41 PM	BCl3 MFC set to  0.000000
8/17/2011	9:31:41 PM	PHl3 MFC set to  0.000000
8/17/2011	9:31:41 PM	SiCl4 MFC set to  0.000000
8/17/2011	9:31:41 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	9:31:42 PM	Tube furnace set to 0
8/17/2011	9:31:43 PM	Run finished at 9:31 PM
8/17/2011	9:31:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	9:34:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2011	9:34:32 PM	Recipe started at 9:34 PM
8/17/2011	9:34:32 PM	Helium valve closed
8/17/2011	9:34:32 PM	H2 valve closed
8/17/2011	9:34:32 PM	BCl3 valve closed
8/17/2011	9:34:32 PM	PH3 valve closed
8/17/2011	9:34:32 PM	SiCl4 pre valve closed
8/17/2011	9:34:32 PM	SiCl4 post valve closed
8/17/2011	9:34:32 PM	Main Vac valve closed
8/17/2011	9:34:32 PM	Bubbler valve closed
8/17/2011	9:34:32 PM	Bypass valve opened
8/17/2011	9:34:32 PM	Helium MFC set to  0.000000
8/17/2011	9:34:32 PM	H2 MFC set to  0.000000
8/17/2011	9:34:32 PM	BCl3 MFC set to  0.000000
8/17/2011	9:34:32 PM	PHl3 MFC set to  0.000000
8/17/2011	9:34:32 PM	SiCl4 MFC set to  0.000000
8/17/2011	9:34:32 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	9:34:32 PM	Tube furnace set to 0
8/17/2011	9:35:34 PM	Helium valve closed
8/17/2011	9:35:34 PM	H2 valve closed
8/17/2011	9:35:34 PM	BCl3 valve closed
8/17/2011	9:35:34 PM	PH3 valve closed
8/17/2011	9:35:34 PM	SiCl4 pre valve closed
8/17/2011	9:35:34 PM	SiCl4 post valve closed
8/17/2011	9:35:34 PM	Main Vac valve closed
8/17/2011	9:35:34 PM	Bubbler valve closed
8/17/2011	9:35:34 PM	Bypass valve opened
8/17/2011	9:35:34 PM	Helium MFC set to  0.000000
8/17/2011	9:35:34 PM	H2 MFC set to  0.000000
8/17/2011	9:35:34 PM	BCl3 MFC set to  0.000000
8/17/2011	9:35:34 PM	PHl3 MFC set to  0.000000
8/17/2011	9:35:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	9:35:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	9:35:34 PM	Tube furnace set to 0
8/17/2011	9:36:34 PM	Helium valve closed
8/17/2011	9:36:34 PM	H2 valve closed
8/17/2011	9:36:34 PM	BCl3 valve closed
8/17/2011	9:36:34 PM	PH3 valve closed
8/17/2011	9:36:34 PM	SiCl4 pre valve closed
8/17/2011	9:36:34 PM	SiCl4 post valve closed
8/17/2011	9:36:34 PM	Bypass valve closed
8/17/2011	9:36:34 PM	Bubbler valve closed
8/17/2011	9:36:34 PM	Main Vac valve opened
8/17/2011	9:36:34 PM	Helium MFC set to  0.000000
8/17/2011	9:36:34 PM	H2 MFC set to  0.000000
8/17/2011	9:36:34 PM	BCl3 MFC set to  0.000000
8/17/2011	9:36:34 PM	PHl3 MFC set to  0.000000
8/17/2011	9:36:34 PM	SiCl4 MFC set to  0.000000
8/17/2011	9:36:34 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	9:36:35 PM	Tube furnace set to 0
8/17/2011	9:36:36 PM	Run finished at 9:36 PM
8/17/2011	9:36:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2011	10:10:07 PM	Recipe started at 10:09 PM
8/17/2011	10:10:07 PM	Helium valve closed
8/17/2011	10:10:07 PM	H2 valve closed
8/17/2011	10:10:07 PM	BCl3 valve closed
8/17/2011	10:10:07 PM	PH3 valve closed
8/17/2011	10:10:07 PM	SiCl4 pre valve closed
8/17/2011	10:10:07 PM	SiCl4 post valve closed
8/17/2011	10:10:07 PM	Bypass valve closed
8/17/2011	10:10:07 PM	Bubbler valve closed
8/17/2011	10:10:07 PM	Main Vac valve opened
8/17/2011	10:10:07 PM	Helium MFC set to  0.000000
8/17/2011	10:10:07 PM	H2 MFC set to  0.000000
8/17/2011	10:10:07 PM	BCl3 MFC set to  0.000000
8/17/2011	10:10:07 PM	PHl3 MFC set to  0.000000
8/17/2011	10:10:07 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:10:07 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:10:07 PM	Tube furnace set to 0
8/17/2011	10:10:37 PM	H2 valve closed
8/17/2011	10:10:37 PM	BCl3 valve closed
8/17/2011	10:10:37 PM	PH3 valve closed
8/17/2011	10:10:37 PM	SiCl4 pre valve closed
8/17/2011	10:10:37 PM	SiCl4 post valve closed
8/17/2011	10:10:37 PM	Bypass valve closed
8/17/2011	10:10:37 PM	Bubbler valve closed
8/17/2011	10:10:37 PM	Helium valve opened
8/17/2011	10:10:37 PM	Main Vac valve opened
8/17/2011	10:10:37 PM	Helium MFC set to  20.000000
8/17/2011	10:10:37 PM	H2 MFC set to  0.000000
8/17/2011	10:10:37 PM	BCl3 MFC set to  0.000000
8/17/2011	10:10:37 PM	PHl3 MFC set to  0.000000
8/17/2011	10:10:37 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:10:37 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:10:37 PM	Tube furnace set to 0
8/17/2011	10:11:07 PM	Helium valve closed
8/17/2011	10:11:07 PM	H2 valve closed
8/17/2011	10:11:07 PM	BCl3 valve closed
8/17/2011	10:11:07 PM	PH3 valve closed
8/17/2011	10:11:07 PM	SiCl4 pre valve closed
8/17/2011	10:11:07 PM	SiCl4 post valve closed
8/17/2011	10:11:07 PM	Bypass valve closed
8/17/2011	10:11:07 PM	Bubbler valve closed
8/17/2011	10:11:07 PM	Main Vac valve opened
8/17/2011	10:11:07 PM	Helium MFC set to  0.000000
8/17/2011	10:11:07 PM	H2 MFC set to  0.000000
8/17/2011	10:11:07 PM	BCl3 MFC set to  0.000000
8/17/2011	10:11:07 PM	PHl3 MFC set to  0.000000
8/17/2011	10:11:07 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:11:07 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:11:08 PM	Tube furnace set to 0
8/17/2011	10:11:38 PM	H2 valve closed
8/17/2011	10:11:38 PM	BCl3 valve closed
8/17/2011	10:11:38 PM	PH3 valve closed
8/17/2011	10:11:38 PM	SiCl4 pre valve closed
8/17/2011	10:11:38 PM	SiCl4 post valve closed
8/17/2011	10:11:38 PM	Bypass valve closed
8/17/2011	10:11:38 PM	Bubbler valve closed
8/17/2011	10:11:38 PM	Helium valve opened
8/17/2011	10:11:38 PM	Main Vac valve opened
8/17/2011	10:11:38 PM	Helium MFC set to  20.000000
8/17/2011	10:11:38 PM	H2 MFC set to  0.000000
8/17/2011	10:11:38 PM	BCl3 MFC set to  0.000000
8/17/2011	10:11:38 PM	PHl3 MFC set to  0.000000
8/17/2011	10:11:38 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:11:38 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:11:38 PM	Tube furnace set to 0
8/17/2011	10:12:08 PM	Helium valve closed
8/17/2011	10:12:08 PM	H2 valve closed
8/17/2011	10:12:08 PM	BCl3 valve closed
8/17/2011	10:12:08 PM	PH3 valve closed
8/17/2011	10:12:08 PM	SiCl4 pre valve closed
8/17/2011	10:12:08 PM	SiCl4 post valve closed
8/17/2011	10:12:08 PM	Bypass valve closed
8/17/2011	10:12:08 PM	Bubbler valve closed
8/17/2011	10:12:08 PM	Main Vac valve opened
8/17/2011	10:12:08 PM	Helium MFC set to  0.000000
8/17/2011	10:12:08 PM	H2 MFC set to  0.000000
8/17/2011	10:12:08 PM	BCl3 MFC set to  0.000000
8/17/2011	10:12:08 PM	PHl3 MFC set to  0.000000
8/17/2011	10:12:08 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:12:08 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:12:08 PM	Tube furnace set to 0
8/17/2011	10:12:38 PM	H2 valve closed
8/17/2011	10:12:38 PM	BCl3 valve closed
8/17/2011	10:12:38 PM	PH3 valve closed
8/17/2011	10:12:38 PM	SiCl4 pre valve closed
8/17/2011	10:12:38 PM	SiCl4 post valve closed
8/17/2011	10:12:38 PM	Bypass valve closed
8/17/2011	10:12:38 PM	Bubbler valve closed
8/17/2011	10:12:38 PM	Helium valve opened
8/17/2011	10:12:38 PM	Main Vac valve opened
8/17/2011	10:12:38 PM	Helium MFC set to  20.000000
8/17/2011	10:12:38 PM	H2 MFC set to  0.000000
8/17/2011	10:12:38 PM	BCl3 MFC set to  0.000000
8/17/2011	10:12:38 PM	PHl3 MFC set to  0.000000
8/17/2011	10:12:38 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:12:38 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:12:38 PM	Tube furnace set to 0
8/17/2011	10:13:08 PM	Helium valve closed
8/17/2011	10:13:08 PM	H2 valve closed
8/17/2011	10:13:08 PM	BCl3 valve closed
8/17/2011	10:13:08 PM	PH3 valve closed
8/17/2011	10:13:08 PM	SiCl4 pre valve closed
8/17/2011	10:13:08 PM	SiCl4 post valve closed
8/17/2011	10:13:08 PM	Bypass valve closed
8/17/2011	10:13:08 PM	Bubbler valve closed
8/17/2011	10:13:08 PM	Main Vac valve opened
8/17/2011	10:13:08 PM	Helium MFC set to  0.000000
8/17/2011	10:13:08 PM	H2 MFC set to  0.000000
8/17/2011	10:13:08 PM	BCl3 MFC set to  0.000000
8/17/2011	10:13:08 PM	PHl3 MFC set to  0.000000
8/17/2011	10:13:08 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:13:08 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:13:08 PM	Tube furnace set to 0
8/17/2011	10:13:38 PM	H2 valve closed
8/17/2011	10:13:38 PM	BCl3 valve closed
8/17/2011	10:13:38 PM	PH3 valve closed
8/17/2011	10:13:38 PM	SiCl4 pre valve closed
8/17/2011	10:13:38 PM	SiCl4 post valve closed
8/17/2011	10:13:38 PM	Bypass valve closed
8/17/2011	10:13:38 PM	Bubbler valve closed
8/17/2011	10:13:38 PM	Helium valve opened
8/17/2011	10:13:38 PM	Main Vac valve opened
8/17/2011	10:13:38 PM	Helium MFC set to  20.000000
8/17/2011	10:13:38 PM	H2 MFC set to  0.000000
8/17/2011	10:13:38 PM	BCl3 MFC set to  0.000000
8/17/2011	10:13:38 PM	PHl3 MFC set to  0.000000
8/17/2011	10:13:38 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:13:38 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:13:39 PM	Tube furnace set to 0
8/17/2011	10:14:09 PM	Helium valve closed
8/17/2011	10:14:09 PM	H2 valve closed
8/17/2011	10:14:09 PM	BCl3 valve closed
8/17/2011	10:14:09 PM	PH3 valve closed
8/17/2011	10:14:09 PM	SiCl4 pre valve closed
8/17/2011	10:14:09 PM	SiCl4 post valve closed
8/17/2011	10:14:09 PM	Bypass valve closed
8/17/2011	10:14:09 PM	Bubbler valve closed
8/17/2011	10:14:09 PM	Main Vac valve opened
8/17/2011	10:14:09 PM	Helium MFC set to  0.000000
8/17/2011	10:14:09 PM	H2 MFC set to  0.000000
8/17/2011	10:14:09 PM	BCl3 MFC set to  0.000000
8/17/2011	10:14:09 PM	PHl3 MFC set to  0.000000
8/17/2011	10:14:09 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:14:09 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:14:09 PM	Tube furnace set to 0
8/17/2011	10:14:39 PM	H2 valve closed
8/17/2011	10:14:39 PM	BCl3 valve closed
8/17/2011	10:14:39 PM	PH3 valve closed
8/17/2011	10:14:39 PM	SiCl4 pre valve closed
8/17/2011	10:14:39 PM	SiCl4 post valve closed
8/17/2011	10:14:39 PM	Bypass valve closed
8/17/2011	10:14:39 PM	Bubbler valve closed
8/17/2011	10:14:39 PM	Helium valve opened
8/17/2011	10:14:39 PM	Main Vac valve opened
8/17/2011	10:14:39 PM	Helium MFC set to  20.000000
8/17/2011	10:14:39 PM	H2 MFC set to  0.000000
8/17/2011	10:14:39 PM	BCl3 MFC set to  0.000000
8/17/2011	10:14:39 PM	PHl3 MFC set to  0.000000
8/17/2011	10:14:39 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:14:39 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:14:39 PM	Tube furnace set to 0
8/17/2011	10:15:09 PM	Helium valve closed
8/17/2011	10:15:09 PM	H2 valve closed
8/17/2011	10:15:09 PM	BCl3 valve closed
8/17/2011	10:15:09 PM	PH3 valve closed
8/17/2011	10:15:09 PM	SiCl4 pre valve closed
8/17/2011	10:15:09 PM	SiCl4 post valve closed
8/17/2011	10:15:09 PM	Bypass valve closed
8/17/2011	10:15:09 PM	Bubbler valve closed
8/17/2011	10:15:09 PM	Main Vac valve opened
8/17/2011	10:15:09 PM	Helium MFC set to  0.000000
8/17/2011	10:15:09 PM	H2 MFC set to  0.000000
8/17/2011	10:15:09 PM	BCl3 MFC set to  0.000000
8/17/2011	10:15:09 PM	PHl3 MFC set to  0.000000
8/17/2011	10:15:09 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:15:09 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:15:09 PM	Tube furnace set to 0
8/17/2011	10:15:39 PM	H2 valve closed
8/17/2011	10:15:39 PM	BCl3 valve closed
8/17/2011	10:15:39 PM	PH3 valve closed
8/17/2011	10:15:39 PM	SiCl4 pre valve closed
8/17/2011	10:15:39 PM	SiCl4 post valve closed
8/17/2011	10:15:39 PM	Bypass valve closed
8/17/2011	10:15:39 PM	Bubbler valve closed
8/17/2011	10:15:39 PM	Helium valve opened
8/17/2011	10:15:39 PM	Main Vac valve opened
8/17/2011	10:15:39 PM	Helium MFC set to  20.000000
8/17/2011	10:15:39 PM	H2 MFC set to  0.000000
8/17/2011	10:15:39 PM	BCl3 MFC set to  0.000000
8/17/2011	10:15:39 PM	PHl3 MFC set to  0.000000
8/17/2011	10:15:39 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:15:39 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:15:39 PM	Tube furnace set to 0
8/17/2011	10:16:09 PM	Helium valve closed
8/17/2011	10:16:09 PM	H2 valve closed
8/17/2011	10:16:09 PM	BCl3 valve closed
8/17/2011	10:16:09 PM	PH3 valve closed
8/17/2011	10:16:09 PM	SiCl4 pre valve closed
8/17/2011	10:16:09 PM	SiCl4 post valve closed
8/17/2011	10:16:09 PM	Bypass valve closed
8/17/2011	10:16:09 PM	Bubbler valve closed
8/17/2011	10:16:09 PM	Main Vac valve opened
8/17/2011	10:16:09 PM	Helium MFC set to  0.000000
8/17/2011	10:16:09 PM	H2 MFC set to  0.000000
8/17/2011	10:16:09 PM	BCl3 MFC set to  0.000000
8/17/2011	10:16:09 PM	PHl3 MFC set to  0.000000
8/17/2011	10:16:09 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:16:09 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:16:10 PM	Tube furnace set to 0
8/17/2011	10:16:40 PM	H2 valve closed
8/17/2011	10:16:40 PM	BCl3 valve closed
8/17/2011	10:16:40 PM	PH3 valve closed
8/17/2011	10:16:40 PM	SiCl4 pre valve closed
8/17/2011	10:16:40 PM	SiCl4 post valve closed
8/17/2011	10:16:40 PM	Bypass valve closed
8/17/2011	10:16:40 PM	Bubbler valve closed
8/17/2011	10:16:40 PM	Helium valve opened
8/17/2011	10:16:40 PM	Main Vac valve opened
8/17/2011	10:16:40 PM	Helium MFC set to  20.000000
8/17/2011	10:16:40 PM	H2 MFC set to  0.000000
8/17/2011	10:16:40 PM	BCl3 MFC set to  0.000000
8/17/2011	10:16:40 PM	PHl3 MFC set to  0.000000
8/17/2011	10:16:40 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:16:40 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:16:40 PM	Tube furnace set to 0
8/17/2011	10:17:10 PM	Helium valve closed
8/17/2011	10:17:10 PM	H2 valve closed
8/17/2011	10:17:10 PM	BCl3 valve closed
8/17/2011	10:17:10 PM	PH3 valve closed
8/17/2011	10:17:10 PM	SiCl4 pre valve closed
8/17/2011	10:17:10 PM	SiCl4 post valve closed
8/17/2011	10:17:10 PM	Bypass valve closed
8/17/2011	10:17:10 PM	Bubbler valve closed
8/17/2011	10:17:10 PM	Main Vac valve opened
8/17/2011	10:17:10 PM	Helium MFC set to  0.000000
8/17/2011	10:17:10 PM	H2 MFC set to  0.000000
8/17/2011	10:17:10 PM	BCl3 MFC set to  0.000000
8/17/2011	10:17:10 PM	PHl3 MFC set to  0.000000
8/17/2011	10:17:10 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:17:10 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:17:10 PM	Tube furnace set to 0
8/17/2011	10:17:40 PM	H2 valve closed
8/17/2011	10:17:40 PM	BCl3 valve closed
8/17/2011	10:17:40 PM	PH3 valve closed
8/17/2011	10:17:40 PM	SiCl4 pre valve closed
8/17/2011	10:17:40 PM	SiCl4 post valve closed
8/17/2011	10:17:40 PM	Bypass valve closed
8/17/2011	10:17:40 PM	Bubbler valve closed
8/17/2011	10:17:40 PM	Helium valve opened
8/17/2011	10:17:40 PM	Main Vac valve opened
8/17/2011	10:17:40 PM	Helium MFC set to  20.000000
8/17/2011	10:17:40 PM	H2 MFC set to  0.000000
8/17/2011	10:17:40 PM	BCl3 MFC set to  0.000000
8/17/2011	10:17:40 PM	PHl3 MFC set to  0.000000
8/17/2011	10:17:40 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:17:40 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:17:40 PM	Tube furnace set to 0
8/17/2011	10:18:10 PM	Helium valve closed
8/17/2011	10:18:10 PM	H2 valve closed
8/17/2011	10:18:10 PM	BCl3 valve closed
8/17/2011	10:18:10 PM	PH3 valve closed
8/17/2011	10:18:10 PM	SiCl4 pre valve closed
8/17/2011	10:18:10 PM	SiCl4 post valve closed
8/17/2011	10:18:10 PM	Bypass valve closed
8/17/2011	10:18:10 PM	Bubbler valve closed
8/17/2011	10:18:10 PM	Main Vac valve opened
8/17/2011	10:18:10 PM	Helium MFC set to  0.000000
8/17/2011	10:18:10 PM	H2 MFC set to  0.000000
8/17/2011	10:18:10 PM	BCl3 MFC set to  0.000000
8/17/2011	10:18:10 PM	PHl3 MFC set to  0.000000
8/17/2011	10:18:10 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:18:10 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:18:10 PM	Tube furnace set to 0
8/17/2011	10:18:40 PM	H2 valve closed
8/17/2011	10:18:40 PM	BCl3 valve closed
8/17/2011	10:18:40 PM	PH3 valve closed
8/17/2011	10:18:40 PM	SiCl4 pre valve closed
8/17/2011	10:18:40 PM	SiCl4 post valve closed
8/17/2011	10:18:40 PM	Bypass valve closed
8/17/2011	10:18:40 PM	Bubbler valve closed
8/17/2011	10:18:40 PM	Helium valve opened
8/17/2011	10:18:40 PM	Main Vac valve opened
8/17/2011	10:18:40 PM	Helium MFC set to  20.000000
8/17/2011	10:18:40 PM	H2 MFC set to  0.000000
8/17/2011	10:18:40 PM	BCl3 MFC set to  0.000000
8/17/2011	10:18:40 PM	PHl3 MFC set to  0.000000
8/17/2011	10:18:40 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:18:40 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:18:41 PM	Tube furnace set to 0
8/17/2011	10:19:11 PM	Helium valve closed
8/17/2011	10:19:11 PM	H2 valve closed
8/17/2011	10:19:11 PM	BCl3 valve closed
8/17/2011	10:19:11 PM	PH3 valve closed
8/17/2011	10:19:11 PM	SiCl4 pre valve closed
8/17/2011	10:19:11 PM	SiCl4 post valve closed
8/17/2011	10:19:11 PM	Bypass valve closed
8/17/2011	10:19:11 PM	Bubbler valve closed
8/17/2011	10:19:11 PM	Main Vac valve opened
8/17/2011	10:19:11 PM	Helium MFC set to  0.000000
8/17/2011	10:19:11 PM	H2 MFC set to  0.000000
8/17/2011	10:19:11 PM	BCl3 MFC set to  0.000000
8/17/2011	10:19:11 PM	PHl3 MFC set to  0.000000
8/17/2011	10:19:11 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:19:11 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:19:11 PM	Tube furnace set to 200
8/17/2011	10:19:41 PM	H2 valve closed
8/17/2011	10:19:41 PM	BCl3 valve closed
8/17/2011	10:19:41 PM	PH3 valve closed
8/17/2011	10:19:41 PM	SiCl4 pre valve closed
8/17/2011	10:19:41 PM	SiCl4 post valve closed
8/17/2011	10:19:41 PM	Bypass valve closed
8/17/2011	10:19:41 PM	Bubbler valve closed
8/17/2011	10:19:41 PM	Helium valve opened
8/17/2011	10:19:41 PM	Main Vac valve opened
8/17/2011	10:19:41 PM	Helium MFC set to  20.000000
8/17/2011	10:19:41 PM	H2 MFC set to  0.000000
8/17/2011	10:19:41 PM	BCl3 MFC set to  0.000000
8/17/2011	10:19:41 PM	PHl3 MFC set to  0.000000
8/17/2011	10:19:41 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:19:41 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:19:41 PM	Tube furnace set to 200
8/17/2011	10:20:11 PM	Helium valve closed
8/17/2011	10:20:11 PM	H2 valve closed
8/17/2011	10:20:11 PM	BCl3 valve closed
8/17/2011	10:20:11 PM	PH3 valve closed
8/17/2011	10:20:11 PM	SiCl4 pre valve closed
8/17/2011	10:20:11 PM	SiCl4 post valve closed
8/17/2011	10:20:11 PM	Bypass valve closed
8/17/2011	10:20:11 PM	Bubbler valve closed
8/17/2011	10:20:11 PM	Main Vac valve opened
8/17/2011	10:20:11 PM	Helium MFC set to  0.000000
8/17/2011	10:20:11 PM	H2 MFC set to  0.000000
8/17/2011	10:20:11 PM	BCl3 MFC set to  0.000000
8/17/2011	10:20:11 PM	PHl3 MFC set to  0.000000
8/17/2011	10:20:11 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:20:11 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:20:11 PM	Tube furnace set to 200
8/17/2011	10:20:41 PM	H2 valve closed
8/17/2011	10:20:41 PM	BCl3 valve closed
8/17/2011	10:20:41 PM	PH3 valve closed
8/17/2011	10:20:41 PM	SiCl4 pre valve closed
8/17/2011	10:20:41 PM	SiCl4 post valve closed
8/17/2011	10:20:41 PM	Bypass valve closed
8/17/2011	10:20:41 PM	Bubbler valve closed
8/17/2011	10:20:41 PM	Helium valve opened
8/17/2011	10:20:41 PM	Main Vac valve opened
8/17/2011	10:20:41 PM	Helium MFC set to  20.000000
8/17/2011	10:20:41 PM	H2 MFC set to  0.000000
8/17/2011	10:20:41 PM	BCl3 MFC set to  0.000000
8/17/2011	10:20:41 PM	PHl3 MFC set to  0.000000
8/17/2011	10:20:41 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:20:41 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:20:41 PM	Tube furnace set to 200
8/17/2011	10:21:11 PM	Helium valve closed
8/17/2011	10:21:11 PM	H2 valve closed
8/17/2011	10:21:11 PM	BCl3 valve closed
8/17/2011	10:21:11 PM	PH3 valve closed
8/17/2011	10:21:11 PM	SiCl4 pre valve closed
8/17/2011	10:21:11 PM	SiCl4 post valve closed
8/17/2011	10:21:11 PM	Bypass valve closed
8/17/2011	10:21:11 PM	Bubbler valve closed
8/17/2011	10:21:11 PM	Main Vac valve opened
8/17/2011	10:21:11 PM	Helium MFC set to  0.000000
8/17/2011	10:21:11 PM	H2 MFC set to  0.000000
8/17/2011	10:21:11 PM	BCl3 MFC set to  0.000000
8/17/2011	10:21:11 PM	PHl3 MFC set to  0.000000
8/17/2011	10:21:11 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:21:11 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:21:12 PM	Tube furnace set to 200
8/17/2011	10:21:42 PM	H2 valve closed
8/17/2011	10:21:42 PM	BCl3 valve closed
8/17/2011	10:21:42 PM	PH3 valve closed
8/17/2011	10:21:42 PM	SiCl4 pre valve closed
8/17/2011	10:21:42 PM	SiCl4 post valve closed
8/17/2011	10:21:42 PM	Bypass valve closed
8/17/2011	10:21:42 PM	Bubbler valve closed
8/17/2011	10:21:42 PM	Helium valve opened
8/17/2011	10:21:42 PM	Main Vac valve opened
8/17/2011	10:21:42 PM	Helium MFC set to  20.000000
8/17/2011	10:21:42 PM	H2 MFC set to  0.000000
8/17/2011	10:21:42 PM	BCl3 MFC set to  0.000000
8/17/2011	10:21:42 PM	PHl3 MFC set to  0.000000
8/17/2011	10:21:42 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:21:42 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:21:42 PM	Tube furnace set to 200
8/17/2011	10:22:12 PM	Helium valve closed
8/17/2011	10:22:12 PM	H2 valve closed
8/17/2011	10:22:12 PM	BCl3 valve closed
8/17/2011	10:22:12 PM	PH3 valve closed
8/17/2011	10:22:12 PM	SiCl4 pre valve closed
8/17/2011	10:22:12 PM	SiCl4 post valve closed
8/17/2011	10:22:12 PM	Bypass valve closed
8/17/2011	10:22:12 PM	Bubbler valve closed
8/17/2011	10:22:12 PM	Main Vac valve opened
8/17/2011	10:22:12 PM	Helium MFC set to  0.000000
8/17/2011	10:22:12 PM	H2 MFC set to  0.000000
8/17/2011	10:22:12 PM	BCl3 MFC set to  0.000000
8/17/2011	10:22:12 PM	PHl3 MFC set to  0.000000
8/17/2011	10:22:12 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:22:12 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:22:12 PM	Tube furnace set to 200
8/17/2011	10:22:42 PM	H2 valve closed
8/17/2011	10:22:42 PM	BCl3 valve closed
8/17/2011	10:22:42 PM	PH3 valve closed
8/17/2011	10:22:42 PM	SiCl4 pre valve closed
8/17/2011	10:22:42 PM	SiCl4 post valve closed
8/17/2011	10:22:42 PM	Bypass valve closed
8/17/2011	10:22:42 PM	Bubbler valve closed
8/17/2011	10:22:42 PM	Helium valve opened
8/17/2011	10:22:42 PM	Main Vac valve opened
8/17/2011	10:22:42 PM	Helium MFC set to  20.000000
8/17/2011	10:22:42 PM	H2 MFC set to  0.000000
8/17/2011	10:22:42 PM	BCl3 MFC set to  0.000000
8/17/2011	10:22:42 PM	PHl3 MFC set to  0.000000
8/17/2011	10:22:42 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:22:42 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:22:42 PM	Tube furnace set to 200
8/17/2011	10:23:12 PM	Helium valve closed
8/17/2011	10:23:12 PM	H2 valve closed
8/17/2011	10:23:12 PM	BCl3 valve closed
8/17/2011	10:23:12 PM	PH3 valve closed
8/17/2011	10:23:12 PM	SiCl4 pre valve closed
8/17/2011	10:23:12 PM	SiCl4 post valve closed
8/17/2011	10:23:12 PM	Bypass valve closed
8/17/2011	10:23:12 PM	Bubbler valve closed
8/17/2011	10:23:12 PM	Main Vac valve opened
8/17/2011	10:23:12 PM	Helium MFC set to  0.000000
8/17/2011	10:23:12 PM	H2 MFC set to  0.000000
8/17/2011	10:23:12 PM	BCl3 MFC set to  0.000000
8/17/2011	10:23:12 PM	PHl3 MFC set to  0.000000
8/17/2011	10:23:12 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:23:12 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:23:12 PM	Tube furnace set to 200
8/17/2011	10:23:42 PM	H2 valve closed
8/17/2011	10:23:42 PM	BCl3 valve closed
8/17/2011	10:23:42 PM	PH3 valve closed
8/17/2011	10:23:42 PM	SiCl4 pre valve closed
8/17/2011	10:23:42 PM	SiCl4 post valve closed
8/17/2011	10:23:42 PM	Bypass valve closed
8/17/2011	10:23:42 PM	Bubbler valve closed
8/17/2011	10:23:42 PM	Helium valve opened
8/17/2011	10:23:42 PM	Main Vac valve opened
8/17/2011	10:23:42 PM	Helium MFC set to  20.000000
8/17/2011	10:23:42 PM	H2 MFC set to  0.000000
8/17/2011	10:23:42 PM	BCl3 MFC set to  0.000000
8/17/2011	10:23:42 PM	PHl3 MFC set to  0.000000
8/17/2011	10:23:42 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:23:42 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:23:43 PM	Tube furnace set to 200
8/17/2011	10:24:13 PM	Helium valve closed
8/17/2011	10:24:13 PM	H2 valve closed
8/17/2011	10:24:13 PM	BCl3 valve closed
8/17/2011	10:24:13 PM	PH3 valve closed
8/17/2011	10:24:13 PM	SiCl4 pre valve closed
8/17/2011	10:24:13 PM	SiCl4 post valve closed
8/17/2011	10:24:13 PM	Bypass valve closed
8/17/2011	10:24:13 PM	Bubbler valve closed
8/17/2011	10:24:13 PM	Main Vac valve opened
8/17/2011	10:24:13 PM	Helium MFC set to  0.000000
8/17/2011	10:24:13 PM	H2 MFC set to  0.000000
8/17/2011	10:24:13 PM	BCl3 MFC set to  0.000000
8/17/2011	10:24:13 PM	PHl3 MFC set to  0.000000
8/17/2011	10:24:13 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:24:13 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:24:13 PM	Tube furnace set to 200
8/17/2011	10:24:43 PM	H2 valve closed
8/17/2011	10:24:43 PM	BCl3 valve closed
8/17/2011	10:24:43 PM	PH3 valve closed
8/17/2011	10:24:43 PM	SiCl4 pre valve closed
8/17/2011	10:24:43 PM	SiCl4 post valve closed
8/17/2011	10:24:43 PM	Bypass valve closed
8/17/2011	10:24:43 PM	Bubbler valve closed
8/17/2011	10:24:43 PM	Helium valve opened
8/17/2011	10:24:43 PM	Main Vac valve opened
8/17/2011	10:24:43 PM	Helium MFC set to  20.000000
8/17/2011	10:24:43 PM	H2 MFC set to  0.000000
8/17/2011	10:24:43 PM	BCl3 MFC set to  0.000000
8/17/2011	10:24:43 PM	PHl3 MFC set to  0.000000
8/17/2011	10:24:43 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:24:43 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:24:43 PM	Tube furnace set to 200
8/17/2011	10:25:13 PM	Helium valve closed
8/17/2011	10:25:13 PM	H2 valve closed
8/17/2011	10:25:13 PM	BCl3 valve closed
8/17/2011	10:25:13 PM	PH3 valve closed
8/17/2011	10:25:13 PM	SiCl4 pre valve closed
8/17/2011	10:25:13 PM	SiCl4 post valve closed
8/17/2011	10:25:13 PM	Bypass valve closed
8/17/2011	10:25:13 PM	Bubbler valve closed
8/17/2011	10:25:13 PM	Main Vac valve opened
8/17/2011	10:25:13 PM	Helium MFC set to  0.000000
8/17/2011	10:25:13 PM	H2 MFC set to  0.000000
8/17/2011	10:25:13 PM	BCl3 MFC set to  0.000000
8/17/2011	10:25:13 PM	PHl3 MFC set to  0.000000
8/17/2011	10:25:13 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:25:13 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:25:13 PM	Tube furnace set to 0
8/17/2011	10:25:14 PM	Run finished at 10:25 PM
8/17/2011	10:28:31 PM	Main Vac valve closed
8/17/2011	10:28:41 PM	Main Vac valve opened
8/17/2011	10:29:38 PM	Recipe started at 10:29 PM
8/17/2011	10:29:38 PM	Helium valve closed
8/17/2011	10:29:38 PM	H2 valve closed
8/17/2011	10:29:38 PM	BCl3 valve closed
8/17/2011	10:29:38 PM	PH3 valve closed
8/17/2011	10:29:38 PM	SiCl4 pre valve closed
8/17/2011	10:29:38 PM	SiCl4 post valve closed
8/17/2011	10:29:38 PM	Main Vac valve closed
8/17/2011	10:29:38 PM	Bypass valve closed
8/17/2011	10:29:38 PM	Bubbler valve closed
8/17/2011	10:29:38 PM	Helium MFC set to  0.000000
8/17/2011	10:29:38 PM	H2 MFC set to  0.000000
8/17/2011	10:29:38 PM	BCl3 MFC set to  0.000000
8/17/2011	10:29:38 PM	PHl3 MFC set to  0.000000
8/17/2011	10:29:38 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:29:38 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:29:39 PM	Tube furnace set to 0
8/17/2011	10:29:42 PM	Helium valve closed
8/17/2011	10:29:42 PM	BCl3 valve closed
8/17/2011	10:29:42 PM	PH3 valve closed
8/17/2011	10:29:42 PM	SiCl4 pre valve closed
8/17/2011	10:29:42 PM	SiCl4 post valve closed
8/17/2011	10:29:42 PM	Main Vac valve closed
8/17/2011	10:29:42 PM	Bypass valve closed
8/17/2011	10:29:42 PM	Bubbler valve closed
8/17/2011	10:29:42 PM	H2 valve opened
8/17/2011	10:29:42 PM	Helium MFC set to  0.000000
8/17/2011	10:29:42 PM	H2 MFC set to  500.000000
8/17/2011	10:29:42 PM	BCl3 MFC set to  0.000000
8/17/2011	10:29:42 PM	PHl3 MFC set to  0.000000
8/17/2011	10:29:42 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:29:42 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:29:42 PM	Tube furnace set to 0
8/17/2011	10:30:44 PM	Helium valve closed
8/17/2011	10:30:44 PM	BCl3 valve closed
8/17/2011	10:30:44 PM	PH3 valve closed
8/17/2011	10:30:44 PM	SiCl4 pre valve closed
8/17/2011	10:30:44 PM	SiCl4 post valve closed
8/17/2011	10:30:44 PM	Main Vac valve closed
8/17/2011	10:30:44 PM	Bypass valve closed
8/17/2011	10:30:44 PM	H2 valve opened
8/17/2011	10:30:44 PM	Bubbler valve opened
8/17/2011	10:30:44 PM	Helium MFC set to  0.000000
8/17/2011	10:30:44 PM	H2 MFC set to  500.000000
8/17/2011	10:30:44 PM	BCl3 MFC set to  0.000000
8/17/2011	10:30:44 PM	PHl3 MFC set to  0.000000
8/17/2011	10:30:44 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:30:44 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:30:44 PM	Tube furnace set to 0
8/17/2011	10:30:45 PM	Helium valve closed
8/17/2011	10:30:45 PM	BCl3 valve closed
8/17/2011	10:30:45 PM	PH3 valve closed
8/17/2011	10:30:45 PM	SiCl4 pre valve closed
8/17/2011	10:30:45 PM	SiCl4 post valve closed
8/17/2011	10:30:45 PM	Main Vac valve closed
8/17/2011	10:30:45 PM	Bypass valve closed
8/17/2011	10:30:45 PM	H2 valve opened
8/17/2011	10:30:45 PM	Bubbler valve opened
8/17/2011	10:30:45 PM	Helium MFC set to  0.000000
8/17/2011	10:30:45 PM	H2 MFC set to  500.000000
8/17/2011	10:30:45 PM	BCl3 MFC set to  0.000000
8/17/2011	10:30:45 PM	PHl3 MFC set to  0.000000
8/17/2011	10:30:45 PM	SiCl4 MFC set to  0.000000
8/17/2011	10:30:45 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:30:46 PM	Tube furnace set to 1000
8/17/2011	10:50:46 PM	Helium valve closed
8/17/2011	10:50:46 PM	BCl3 valve closed
8/17/2011	10:50:46 PM	Main Vac valve closed
8/17/2011	10:50:46 PM	Bypass valve closed
8/17/2011	10:50:46 PM	H2 valve opened
8/17/2011	10:50:46 PM	PH3 valve opened
8/17/2011	10:50:46 PM	SiCl4 pre valve opened
8/17/2011	10:50:46 PM	SiCl4 post valve opened
8/17/2011	10:50:46 PM	Bubbler valve opened
8/17/2011	10:50:46 PM	Helium MFC set to  0.000000
8/17/2011	10:50:46 PM	H2 MFC set to  500.000000
8/17/2011	10:50:46 PM	BCl3 MFC set to  0.000000
8/17/2011	10:50:46 PM	PHl3 MFC set to  1.000000
8/17/2011	10:50:46 PM	SiCl4 MFC set to  50.000000
8/17/2011	10:50:46 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	10:50:46 PM	Tube furnace set to 1000
8/17/2011	11:06:46 PM	Helium valve closed
8/17/2011	11:06:46 PM	BCl3 valve closed
8/17/2011	11:06:46 PM	PH3 valve closed
8/17/2011	11:06:46 PM	SiCl4 pre valve closed
8/17/2011	11:06:46 PM	SiCl4 post valve closed
8/17/2011	11:06:46 PM	Main Vac valve closed
8/17/2011	11:06:46 PM	Bypass valve closed
8/17/2011	11:06:46 PM	H2 valve opened
8/17/2011	11:06:46 PM	Bubbler valve opened
8/17/2011	11:06:46 PM	Helium MFC set to  0.000000
8/17/2011	11:06:46 PM	H2 MFC set to  500.000000
8/17/2011	11:06:46 PM	BCl3 MFC set to  0.000000
8/17/2011	11:06:46 PM	PHl3 MFC set to  0.000000
8/17/2011	11:06:46 PM	SiCl4 MFC set to  0.000000
8/17/2011	11:06:46 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:06:46 PM	Tube furnace set to 950
8/17/2011	11:08:46 PM	Helium valve closed
8/17/2011	11:08:46 PM	BCl3 valve closed
8/17/2011	11:08:46 PM	PH3 valve closed
8/17/2011	11:08:46 PM	SiCl4 pre valve closed
8/17/2011	11:08:46 PM	SiCl4 post valve closed
8/17/2011	11:08:46 PM	Main Vac valve closed
8/17/2011	11:08:46 PM	Bypass valve closed
8/17/2011	11:08:46 PM	H2 valve opened
8/17/2011	11:08:46 PM	Bubbler valve opened
8/17/2011	11:08:46 PM	Helium MFC set to  0.000000
8/17/2011	11:08:46 PM	H2 MFC set to  500.000000
8/17/2011	11:08:46 PM	BCl3 MFC set to  0.000000
8/17/2011	11:08:46 PM	PHl3 MFC set to  0.000000
8/17/2011	11:08:46 PM	SiCl4 MFC set to  0.000000
8/17/2011	11:08:46 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:08:46 PM	Tube furnace set to 900
8/17/2011	11:10:46 PM	Helium valve closed
8/17/2011	11:10:46 PM	BCl3 valve closed
8/17/2011	11:10:46 PM	PH3 valve closed
8/17/2011	11:10:46 PM	SiCl4 pre valve closed
8/17/2011	11:10:46 PM	SiCl4 post valve closed
8/17/2011	11:10:46 PM	Main Vac valve closed
8/17/2011	11:10:46 PM	Bypass valve closed
8/17/2011	11:10:46 PM	H2 valve opened
8/17/2011	11:10:46 PM	Bubbler valve opened
8/17/2011	11:10:46 PM	Helium MFC set to  0.000000
8/17/2011	11:10:46 PM	H2 MFC set to  500.000000
8/17/2011	11:10:46 PM	BCl3 MFC set to  0.000000
8/17/2011	11:10:46 PM	PHl3 MFC set to  0.000000
8/17/2011	11:10:46 PM	SiCl4 MFC set to  0.000000
8/17/2011	11:10:46 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:10:46 PM	Tube furnace set to 850
8/17/2011	11:12:46 PM	H2 valve closed
8/17/2011	11:12:46 PM	BCl3 valve closed
8/17/2011	11:12:46 PM	PH3 valve closed
8/17/2011	11:12:46 PM	SiCl4 pre valve closed
8/17/2011	11:12:46 PM	SiCl4 post valve closed
8/17/2011	11:12:46 PM	Main Vac valve closed
8/17/2011	11:12:46 PM	Bypass valve closed
8/17/2011	11:12:46 PM	Helium valve opened
8/17/2011	11:12:46 PM	Bubbler valve opened
8/17/2011	11:12:46 PM	Helium MFC set to  500.000000
8/17/2011	11:12:46 PM	H2 MFC set to  0.000000
8/17/2011	11:12:46 PM	BCl3 MFC set to  0.000000
8/17/2011	11:12:46 PM	PHl3 MFC set to  0.000000
8/17/2011	11:12:46 PM	SiCl4 MFC set to  0.000000
8/17/2011	11:12:46 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:12:46 PM	Tube furnace set to 800
8/17/2011	11:14:46 PM	H2 valve closed
8/17/2011	11:14:46 PM	BCl3 valve closed
8/17/2011	11:14:46 PM	PH3 valve closed
8/17/2011	11:14:46 PM	SiCl4 pre valve closed
8/17/2011	11:14:46 PM	SiCl4 post valve closed
8/17/2011	11:14:47 PM	Main Vac valve closed
8/17/2011	11:14:47 PM	Bypass valve closed
8/17/2011	11:14:47 PM	Helium valve opened
8/17/2011	11:14:47 PM	Bubbler valve opened
8/17/2011	11:14:47 PM	Helium MFC set to  500.000000
8/17/2011	11:14:47 PM	H2 MFC set to  0.000000
8/17/2011	11:14:47 PM	BCl3 MFC set to  0.000000
8/17/2011	11:14:47 PM	PHl3 MFC set to  0.000000
8/17/2011	11:14:47 PM	SiCl4 MFC set to  0.000000
8/17/2011	11:14:47 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:14:47 PM	Tube furnace set to 750
8/17/2011	11:16:47 PM	H2 valve closed
8/17/2011	11:16:47 PM	BCl3 valve closed
8/17/2011	11:16:47 PM	PH3 valve closed
8/17/2011	11:16:47 PM	SiCl4 pre valve closed
8/17/2011	11:16:47 PM	SiCl4 post valve closed
8/17/2011	11:16:47 PM	Main Vac valve closed
8/17/2011	11:16:47 PM	Bypass valve closed
8/17/2011	11:16:47 PM	Helium valve opened
8/17/2011	11:16:47 PM	Bubbler valve opened
8/17/2011	11:16:47 PM	Helium MFC set to  500.000000
8/17/2011	11:16:47 PM	H2 MFC set to  0.000000
8/17/2011	11:16:47 PM	BCl3 MFC set to  0.000000
8/17/2011	11:16:47 PM	PHl3 MFC set to  0.000000
8/17/2011	11:16:47 PM	SiCl4 MFC set to  0.000000
8/17/2011	11:16:47 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:16:47 PM	Tube furnace set to 0
8/17/2011	11:36:47 PM	Helium valve closed
8/17/2011	11:36:47 PM	H2 valve closed
8/17/2011	11:36:47 PM	BCl3 valve closed
8/17/2011	11:36:47 PM	PH3 valve closed
8/17/2011	11:36:47 PM	SiCl4 pre valve closed
8/17/2011	11:36:47 PM	SiCl4 post valve closed
8/17/2011	11:36:47 PM	Main Vac valve closed
8/17/2011	11:36:47 PM	Bypass valve closed
8/17/2011	11:36:47 PM	Bubbler valve closed
8/17/2011	11:36:47 PM	Helium MFC set to  0.000000
8/17/2011	11:36:47 PM	H2 MFC set to  0.000000
8/17/2011	11:36:47 PM	BCl3 MFC set to  0.000000
8/17/2011	11:36:47 PM	PHl3 MFC set to  0.000000
8/17/2011	11:36:47 PM	SiCl4 MFC set to  0.000000
8/17/2011	11:36:47 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:36:47 PM	Tube furnace set to 0
8/17/2011	11:36:48 PM	Run finished at 11:36 PM
8/17/2011	11:59:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2011	11:59:02 PM	Recipe started at 11:59 PM
8/17/2011	11:59:02 PM	Helium valve closed
8/17/2011	11:59:02 PM	H2 valve closed
8/17/2011	11:59:02 PM	BCl3 valve closed
8/17/2011	11:59:02 PM	PH3 valve closed
8/17/2011	11:59:02 PM	SiCl4 pre valve closed
8/17/2011	11:59:02 PM	SiCl4 post valve closed
8/17/2011	11:59:02 PM	Main Vac valve closed
8/17/2011	11:59:02 PM	Bypass valve closed
8/17/2011	11:59:02 PM	Bubbler valve closed
8/17/2011	11:59:02 PM	Helium MFC set to  0.000000
8/17/2011	11:59:02 PM	H2 MFC set to  0.000000
8/17/2011	11:59:02 PM	BCl3 MFC set to  0.000000
8/17/2011	11:59:02 PM	PHl3 MFC set to  0.000000
8/17/2011	11:59:02 PM	SiCl4 MFC set to  0.000000
8/17/2011	11:59:02 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:59:02 PM	Tube furnace set to 0
8/17/2011	11:59:05 PM	H2 valve closed
8/17/2011	11:59:05 PM	BCl3 valve closed
8/17/2011	11:59:05 PM	PH3 valve closed
8/17/2011	11:59:05 PM	SiCl4 pre valve closed
8/17/2011	11:59:05 PM	SiCl4 post valve closed
8/17/2011	11:59:05 PM	Main Vac valve closed
8/17/2011	11:59:05 PM	Bypass valve closed
8/17/2011	11:59:05 PM	Bubbler valve closed
8/17/2011	11:59:05 PM	Helium valve opened
8/17/2011	11:59:05 PM	Helium MFC set to  500.000000
8/17/2011	11:59:05 PM	H2 MFC set to  0.000000
8/17/2011	11:59:05 PM	BCl3 MFC set to  0.000000
8/17/2011	11:59:05 PM	PHl3 MFC set to  0.000000
8/17/2011	11:59:05 PM	SiCl4 MFC set to  0.000000
8/17/2011	11:59:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:59:06 PM	Tube furnace set to 0
8/17/2011	11:59:12 PM	Helium valve closed
8/17/2011	11:59:12 PM	H2 valve closed
8/17/2011	11:59:12 PM	BCl3 valve closed
8/17/2011	11:59:12 PM	PH3 valve closed
8/17/2011	11:59:12 PM	SiCl4 pre valve closed
8/17/2011	11:59:12 PM	SiCl4 post valve closed
8/17/2011	11:59:12 PM	Main Vac valve closed
8/17/2011	11:59:12 PM	Bypass valve closed
8/17/2011	11:59:12 PM	Bubbler valve closed
8/17/2011	11:59:12 PM	Helium MFC set to  0.000000
8/17/2011	11:59:12 PM	H2 MFC set to  0.000000
8/17/2011	11:59:12 PM	BCl3 MFC set to  0.000000
8/17/2011	11:59:12 PM	PHl3 MFC set to  0.000000
8/17/2011	11:59:12 PM	SiCl4 MFC set to  0.000000
8/17/2011	11:59:12 PM	Bypass solenoid MFC set to  0.000000
8/17/2011	11:59:12 PM	Tube furnace set to 0
8/17/2011	11:59:13 PM	Run finished at 11:59 PM
8/17/2011	11:59:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
